This invention discloses a spray air intake device for a tubular PECVD equipment, comprising a
reaction chamber, and an air intake spray plate, a
graphite boat, and an exhaust plate disposed within the
reaction chamber. The air intake spray plate and the exhaust plate are respectively installed above and below the
graphite boat, or respectively installed below and above the
graphite boat. The air intake end of the air intake spray plate extends to the outside of the furnace opening and the outside of the furnace
tail of the
reaction chamber. The front end of the reaction chamber is provided with a furnace door
flange, and the rear end of the reaction chamber is provided with a furnace
tail flange, which has multiple exhaust ports. During the process, the process gas is transported into the reaction chamber through the air intake spray plate, flows downward through the graphite boat, enters the exhaust plate, and is finally discharged through the exhaust ports on the furnace
tail flange. This invention features a compact structure, convenient operation, high safety, and high gas
distribution uniformity, effectively reducing the waste of process gas.