1results about How to "Avoid Metal Contamination" patented technology

An electron generator and ion implantation equipment, the electron generator comprises a reaction chamber, the reaction chamber is connected with a gas source and a radio frequency power source, and is used for generating a radio frequency electric field under the action of the radio frequency power source, and dissociating gas from the gas source through the radio frequency electric field to generate electrons; an outlet piece is arranged on the reaction chamber, and an electron outlet connected with the inside of the reaction chamber is arranged in the middle of the outlet piece, and the electrons in the inside of the reaction chamber overflow through the electron outlet, and the material of the outlet piece is a non-metallic conductor. The electron generator adopts the outlet piece made of the non-metallic conductor material, and can avoid metal pollution of the ion beam.