4results about How to "Avoid Metal Contamination" patented technology

The invention relates to a preparation method of a high-contrast wafer-level step height standard sheet, and the method comprises the following steps: S1, sequentially depositing a silicon dioxide film layer and a silicon film layer on a first structure through employing a coating technology, and obtaining a second structure; s2, carrying out preset pattern definition on the second structure obtained in the step S1 through photoetching, and carrying out dry etching on a sample with a defined pattern until the uppermost silicon film layer is etched and the silicon dioxide film layer is exposed to obtain a third structure; and S3, depositing a silicon dioxide protective film layer on the surface of the third structure obtained in the step S2 by adopting a coating technology to obtain the high-contrast wafer-level step standard sheet. By adopting the preparation method of the high-contrast wafer-level step standard sheet, the problem of low contrast of a step standard object is effectively solved, and the high-contrast wafer-level step standard sheet has relatively high step uniformity and stability, does not have metal element pollution, and can be widely applied to automatic detection of micro-nano detection equipment.

The utility model relates to the technical field of cleaning devices, in particular to a mold cleaning device. According to the technical scheme, the cleaning device comprises an annular groove box, a cleaning barrel, a bottom plate, a mounting pipe, a motor and a water pump, the annular groove box is arranged above the bottom plate, the cleaning barrel is arranged in the annular groove box, a grid barrel is arranged in the annular groove box, the mounting pipe is arranged at one end of the annular groove box, a conveying pipe is arranged in the mounting pipe, and a nozzle is arranged at the lower end of the conveying pipe; the outer side of the grid cylinder is sleeved with a filter cover, a motor is arranged on one side of the upper end of the bottom plate, and a water pump is arranged on the rear side of the motor. According to the mold cleaning device, the cleaning cylinder is rotationally installed, during cleaning, a mold in the cleaning cylinder rolls over, and the problems that an inner mold groove of the mold is uneven, and manual cleaning wastes time and labor are solved in cooperation with the washing nozzle.

An electron generator and ion implantation equipment, the electron generator comprises a reaction chamber, the reaction chamber is connected with a gas source and a radio frequency power source, and is used for generating a radio frequency electric field under the action of the radio frequency power source, and dissociating gas from the gas source through the radio frequency electric field to generate electrons; an outlet piece is arranged on the reaction chamber, and an electron outlet connected with the inside of the reaction chamber is arranged in the middle of the outlet piece, and the electrons in the inside of the reaction chamber overflow through the electron outlet, and the material of the outlet piece is a non-metallic conductor. The electron generator adopts the outlet piece made of the non-metallic conductor material, and can avoid metal pollution of the ion beam.

The utility model provides an automatic guide vehicle, and relates to the technical field of object transfer. Wheels are rotatably arranged at the bottom of the trolley body, an elastic cushion is arranged on the edge of the bottom of the trolley body, an impurity removal mechanism is arranged on the outer side of the edge of the bottom of the trolley body and comprises a plurality of magnetic bars arranged on the outer side of the edge of the bottom of the trolley body, and supporting assemblies connected with the trolley body are arranged on the magnetic bars. The AGV can adsorb metal objects, and the metal objects are prevented from damaging the wheels of the AGV.