How to make a capacitor
A manufacturing method and capacitor technology, applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve the problems of reducing yield, affecting device quality, metal pollution, etc., to improve quality, avoid metal pollution, and protect electrodes. Effect
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[0016] In the prior art by using aluminum oxide as a mask to increase the area of the lower part of the deep groove, thereby increasing the usable area of the capacitor, the inventor found that when the first electrode of the capacitor is formed on the sidewall and bottom of the expanded area of the groove, The aluminum oxide will still remain on the upper part of the trench sidewall as a mask. Since the first electrode is also a conductive material, the metal components in the aluminum oxide will cause metal contamination to the first electrode, affecting the quality and conductivity of the first electrode .
[0017] In response to the above technical problems, the inventor found through experimental research that if a nitride layer is used instead of aluminum oxide as a mask for increasing the area of the trench, the nitride layer does not contain metal components, thus avoiding the generation of counter electrodes during subsequent electrode formation. Metal contaminat...
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