The invention discloses a calibration method and device for an error of an included angle between a ccd target face and a mounting and positioning face based on leaked radiation imaging. The device comprises an illuminating light source, a to-be-detected fluorescent material, a metal layer-containing chip substrate, refractive index matching oil, a microobjective, a reflector, a polarization element group, an optical filter, a bunching lens, a horizontal slide rail, an imaging lens and a ccd image sensor. A fluorescent sample irradiated by illuminating light generates a fluorescent surface plasmon wave and leaks radiation through the metal layer-containing chip substrate, and fluorescent imaging is achieved after a signal is collected through the microobjective. In the period, the excitinglight sent by the illuminating light source is filtered by the polarization element group and the optical filter. By moving the position of the imaging lens, the target face of the ccd image sensor is detected by means of leaked radiation Hough transform algorithm, so that the error of the included angle, which is hardly found, between the ccd target face and the mounting and positioning face bymeans of a conventional means is calibrated precisely. The device is simple in structure and high in applicability.