The invention provides an out-plane piezoelectric type hemispheric micro-
gyroscope and a preparation method thereof. The out-plane piezoelectric type hemispheric micro-
gyroscope comprises a
monocrystalline silicon substrate, a miniature hemispheric
harmonic oscillator, a central fixed support pillar, a common
electrode, a uniformly distributed film piezoelectric body and a uniformly distributed
signal electrode. According to the invention, the hemispheric structure is adopted as a
harmonic oscillator, so that great effective vibration displacement is obtained, and detection effect for Coriolis effect can be enhanced; the common
electrode, the film piezoelectric body and the
signal electrode are manufactured by adopting an MEMS
planar process, so that the manufacturing precision is high, and the structural degree of symmetry of the micro-
gyroscope can be improved; the out-plane driving and the detection method are adopted, so that interconversion between out-plane force and in-plane can be realized, and Coriolis effect vertical to the direction of the substrate can be detected; the piezoelectric type driving and the detection method are adopted, miniature
capacitance space needed by electrostatic micro-gyroscope is not needed, and meanwhile, the problems of stray
capacitance, electrostatic adherence and the like are avoided; the technology is simple, the integrated degree is high, and
batch production can be realized.