Special baking oven and special movable material rack thereof for silicon material

A mobile, silicon material technology, applied in the direction of drying solid materials, drying, dryers, etc., can solve the problems of difficult discharge of water vapor, uneven heating of silicon materials, difficult control of oven temperature, etc., to achieve convenient loading and unloading and access, The effect of saving drying preparation time
CN101749928AInactive Publication Date: 2010-06-23EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
Publication Date
2010-06-23
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The invention relates to a special baking oven and a special material rack thereof for silicon material. The baking oven comprises a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor, a temperature sensor, a frame body, idler wheels and a silicon material box, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the baking oven, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, and the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven. The movable baking shelf thereof can facilitate loading / unloading and in / out of silicon material, save baking preparation time, and has the advantages of high baking efficiency and low energy consumption. The whole silicon material box can be directly moved in the baking oven for baking, thereby greatly shortening technology preparation time and reducing labor strength of operators.
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Description

Technical field:

[0001] The invention relates to the technical field of semiconductor material drying, in particular to silicon material drying equipment. Background technique:

[0002] With the continuous development of the semiconductor and solar energy industries, the demand for silicon materials is increasing. The purity of the silicon material is crucial to the quality of the final product. Some silicon materials have a lot of impurities on their surface, which must be removed by pickling and then cleaned. The cleaned silicon material must be dried before being put into the furnace to remove the moisture attached to the silicon material. The conventional method is to pack the silicon material in a turnover box and put it into an ordinary oven in a superimposed manner. The heater is set under the material box, and it is heated by electricity for drying treatment. The conventional bottom heating oven is used for drying. The silicon material at the bottom layer is dried ...

Claims

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