Special baking oven and special movable material rack thereof for silicon material

Abstract

The invention relates to a special baking oven and a special material rack thereof for silicon material. The baking oven comprises a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor, a temperature sensor, a frame body, idler wheels and a silicon material box, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the baking oven, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, and the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven. The movable baking shelf thereof can facilitate loading / unloading and in / out of silicon material, save baking preparation time, and has the advantages of high baking efficiency and low energy consumption. The whole silicon material box can be directly moved in the baking oven for baking, thereby greatly shortening technology preparation time and reducing labor strength of operators.

Description

Technical field: [0001] The invention relates to the technical field of semiconductor material drying, in particular to silicon material drying equipment. Background technique: [0002] With the continuous development of the semiconductor and solar energy industries, the demand for silicon materials is increasing. The purity of the silicon material is crucial to the quality of the final product. Some silicon materials have a lot of impurities on their surface, which must be removed by pickling and then cleaned. The cleaned silicon material must be dried before being put into the furnace to remove the moisture attached to the silicon material. The conventional method is to pack the silicon material in a turnover box and put it into an ordinary oven in a superimposed manner. The heater is set under the material box, and it is heated by electricity for drying treatment. The conventional bottom heating oven is used for drying. The silicon material at the bottom layer is dried ...

AI Technical Summary

Problems solved by technology

The conventional method is to divide the silicon material into a turnover box and put it into an ordinary oven in a superimposed manner. The heater is set under the material box, and the electric heating is used for drying treatment. The conventional bottom heating oven is used for drying. The silicon material at the bottom layer is dried quickly, while the silicon material at the middle and upper layers is not easy to dry. At the same time, the water vapor in the oven is not easy to discharge, the temperature in the oven is not easy to control, the heating of the silicon material is uneven, and the drying efficiency of the silicon material Low energy consumption, high energy consumption, urgent need for high-efficiency and energy-saving special oven for silicon materials

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