MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof

A microwave power and beam-supported technology, which is applied in the field of MEMS solid-supported beam-type online microwave power sensor and its preparation, can solve the problems of consuming input signal power and achieve the effect of low loss and high sensitivity

Inactive Publication Date: 2010-12-15
SOUTHEAST UNIV
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Problems solved by technology

Existing microwave power sensors are terminal power sensors based on diodes, thermistors, and thermopiles, which have the advantages of low l

Method used

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  • MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof
  • MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof
  • MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof

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Embodiment Construction

[0048] The present invention will be further described below in conjunction with the accompanying drawings.

[0049] Such as figure 1 , 2 , 3 and 4 show a MEMS fixed-supported beam type online microwave power sensor, which is provided with CPW, three MEMS fixed-supported beam structures and a terminal composed of a terminal resistor 13 and a thermopile on a gallium arsenide substrate 1 Microwave power monitoring system 6 ( figure 1 part in the dotted frame).

[0050]The CPW includes a main line CPW signal line 7, a secondary line CPW signal line 8 and a CPW ground line 9, the main line CPW signal line 7 and CPW ground line 9 constitute the main line CPW, and the secondary line CPW signal line 8 and CPW ground line 9 constitute The secondary line CPW is connected to the ground line 9 that is cut off through the air bridge 17 .

[0051] The MEMS fixed beam structure includes a fixed beam 3 and an anchor area 12, the fixed beam 3 spans above the main line CPW signal line 7, a...

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Abstract

The invention discloses an MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and a production method thereof. The microwave power sensor comprises a gallium arsenide substrate, a mainline CPW (Co-Planer Waveguide), a subline CPW, an MEMS clamped beam type structure and a terminal microwave power monitoring system, wherein the MEMS clamped beam type structure comprises a clamped beam and an anchor area; the clamped beam stretches across the mainline CPW signal line, and both ends of the clamped beam are fixed on the anchor area; the anchor are is connected with the terminal microwave power monitoring system through the subline CPW signal line rather than the CPW ground line; and a drive electrode is arranged below the clamped beam type structure. The MEMS clamped beam type online microwave power sensor not only has the advantages of a terminal type microwave power sensor, such as low loss and high sensitivity, but also has the advantages of online microwave power measurement, realization of monitoring and not monitoring, integration of the online microwave power sensors with various kinds of coupling factors, and compatibility with the gallium arsenide monolithic microwave integrated circuit.

Description

technical field [0001] The invention relates to microelectronic machinery (hereinafter referred to as MEMS), in particular to a MEMS solid-supported beam-type online microwave power sensor and a preparation method thereof. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics, and the measurement of microwave power plays an important role in wireless technology applications. Existing microwave power sensors are terminal power sensors based on diodes, thermistors, and thermopiles, which have the advantages of low loss and high sensitivity, but their biggest disadvantage is that the input signal power is completely consumed when measuring microwave power. With the development of microelectronics technology, modern personal communication systems and radar systems not only require that the microwave signal of the microwave power sensor is still available during the power measurem...

Claims

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Application Information

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IPC IPC(8): G01R21/02B81B3/00B81C1/00
Inventor 廖小平张志强
Owner SOUTHEAST UNIV
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