MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof
A microwave power and beam type technology is applied in the field of MEMS fixed beam type online microwave power sensor and its preparation, which can solve the problems of consuming input signal power and the like, and achieve the effect of low loss and high sensitivity
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[0048] The present invention will be further described below in conjunction with the accompanying drawings.
[0049] Such as figure 1 , 2 , 3 and 4 show a MEMS fixed-supported beam type online microwave power sensor, which is provided with CPW, three MEMS fixed-supported beam structures and a terminal composed of a terminal resistor 13 and a thermopile on a gallium arsenide substrate 1 Microwave power monitoring system 6 ( figure 1 part in the dotted frame).
[0050]The CPW includes a main line CPW signal line 7, a secondary line CPW signal line 8 and a CPW ground line 9, the main line CPW signal line 7 and CPW ground line 9 constitute the main line CPW, and the secondary line CPW signal line 8 and CPW ground line 9 constitute The secondary line CPW is connected to the ground line 9 that is cut off through the air bridge 17 .
[0051] The MEMS fixed beam structure includes a fixed beam 3 and an anchor area 12, the fixed beam 3 spans above the main line CPW signal line 7, a...
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