Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof

A technology of microwave power and cantilever beam, which is applied in the direction of electric power measurement by thermal method, electric solid devices, instruments, etc.

Inactive Publication Date: 2012-02-22
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It has the advantages of low loss, high sensitivity and good linearity. However, its biggest disadvantage is that a microwave power sensor can only measure the input microwave power of a single port. When measuring the microwave power of multiple ports, additional circuits or Multiple microwave power sensor implementations

Method used

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  • Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof
  • Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof
  • Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof

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Embodiment Construction

[0045] The specific implementation scheme of the five-port capacitive microwave power sensor based on the micromachined cantilever beam invented in this paper is as follows:

[0046] Five CPWs 6, five MEMS cantilever beams 7, anchor regions 8 of the cantilever beams, sensing electrodes 9, pressure welding blocks 12 of the sensing electrodes, ten terminal matching resistors 13, are arranged on the gallium arsenide substrate 21. A thermopile consisting of five pairs of thermocouples 14 composed of ten thermocouples 14, two output pads 18, a metal heat sink 17, air bridge 10 and connecting wires 19 forms a MEMS liner under the substrate 21 Bottom film structure 20:

[0047] The CPW 6 is used to realize the transmission of the microwave signal, and the circuit connection between the test instrument and the terminal matching resistor 13 . Each CPW 6 consists of a CPW signal line and two ground lines.

[0048] The five MEMS cantilever beams 7 straddle the five symmetrically placed...

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Abstract

The invention discloses a five-port micromachine cantilever-based capacitance type microwave power sensor. The input ends of five coplanar waveguides (CPWs) for transmitting microwave signals are arranged on a gallium arsenide substrate, the CPWs are symmetrically arranged, and a 72-degree angle is formed between every two CPWs; the output end of each CPW is connected with two terminal matched resistors; each terminal resistor is provided with a thermocouple nearby; the five thermocouples are arranged at the inclined angle of 72 degrees and are connected in series with one another to form a thermopile; simultaneously, each CPW is bridged with a micro-electromechanical system (MEMS) cantilever; one end of each cantilever is positioned in a free state, and the other end of the cantilever isfixed in an anchor area; the anchor area is positioned on the outer side of a CPW ground wire; and a sensing electrode is arranged between a CPW signal wire and the ground wire. The sensor has low loss, high sensitivity and high linearity; the microwave power of five ports can be measured; simultaneously, ports into which the microwave power is input and the magnitude proportion of the power can be detected; and the sensor has the advantages of high integration level and compatibility with a gallium arsenide monolithic microwave integrated circuit.

Description

technical field [0001] The invention proposes a five-port capacitive microwave power sensor based on a micromechanical cantilever beam and its preparation, belonging to the technical field of microelectromechanical systems (MEMS). Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics, and the measurement of microwave power plays an important role in wireless technology applications. Microwave power sensors are similar to voltage and current meters in low frequency circuits. At present, the thermocouple microwave power sensor based on MEMS technology is one of the widely used devices. Its working principle is that the input microwave power to be measured is introduced from one end of the coplanar waveguide transmission line, and the terminal matching resistor connected to the other end of the transmission line absorbs the microwave power and converts it into heat, and a therm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R21/02B81B7/00B81C1/00
Inventor 廖小平张志强
Owner SOUTHEAST UNIV
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