Cantilever beam and direct-type power sensor based microwave detecting system and detecting method thereof

A technology of power sensor and microwave detection, which is applied in the direction of electric power measurement by thermal method, frequency measurement device, etc., can solve the problem that microwave signal detection cannot be systematically integrated with frequency detection and power detection, and achieve the effect of novel structure and easy measurement

Inactive Publication Date: 2013-05-22
SOUTHEAST UNIV
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Problems solved by technology

[0003] The problem to be solved by the present invention is: the existing microwave signal detection cannot be systematically integrated with frequency detection and power detection, and users need a microwave frequency and power detector with simple structure, small volume and online detection

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  • Cantilever beam and direct-type power sensor based microwave detecting system and detecting method thereof
  • Cantilever beam and direct-type power sensor based microwave detecting system and detecting method thereof
  • Cantilever beam and direct-type power sensor based microwave detecting system and detecting method thereof

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Embodiment Construction

[0020] Such as figure 1 , the present invention includes a MEMS reconfigurable antenna, a MEMS tunable filter, a control circuit, and a microwave detector. The MEMS reconfigurable antenna receives a microwave signal, and after passing through the MEMS tunable filter, the microwave signal to be tested is obtained and input to the microwave detector. The control circuit is respectively connected with the MEMS reconfigurable antenna and the MEMS tunable filter. The invention is fabricated on a GaAs substrate 1, and the microwave detector includes a coplanar waveguide CPW transmission line, four MEMS cantilever beam structures with the same structure, a power combiner and four MEMS direct microwave power sensors with the same structure. As the signal transmission line of the frequency detector of the present invention, the CPW transmission line is used for the transmission of the microwave signal to be measured, and the transmission of the signal between the MEMS cantilever beam s...

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Abstract

The invention discloses a cantilever beam and direct-type power sensor based microwave detecting system and a detecting method thereof. The detecting system comprises an MEMS (micro-electromechanical system) reconfigurable antenna, an MEMS adjustable filter, a control circuit and a microwave detector, the microwave detector is manufactured on a GaAs substrate and comprises a CPW (coplanar waveguide) transmission line, four structurally identical MEMS cantilever beam structures, a power combiner and four structurally identical MEMS direct-type microwave power sensors. The cantilever beam and direct-type power sensor based microwave detecting system has the advantages of novel structure and small size, can achieve integration of microwave signal frequency and power detection, and can be compatible with a GaAs monolithic microwave integrated circuit.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), and relates to an on-line microwave frequency detector based on a cantilever beam and a direct power sensor and a detection method thereof. Background technique [0002] With the rapid development of science and technology, the research of microwave technology is getting more and more in-depth, so the detection of the two important parameters of microwave signal power and frequency is also essential. Detectors of microwave signal frequency and power are widely used in military, commercial and scientific research. The current microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method, phase comparison method and resonance method, and the microwave power detection technology is mainly based on the methods of diodes, thermocouples and thermistors. But these methods are all discrete, which brings an unavoidable defe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/02G01R21/02
Inventor 廖小平易真翔吴昊
Owner SOUTHEAST UNIV
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