Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system

Abstract

The invention discloses a microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and a preparation method of the microwave power detection system. The method is used for on-line measurement, electrostatic force can be generated between each MEMS cantilever beam and a transmission line in a center signal line transmission process, the cantilever beams are pulled downwards, and an interval between each cantilever beam and a corresponding test electrode becomes smaller, so that capacitance values are changed and microwave power in one-to-one correspondence with the capacitance values is obtained by measuring the changed capacitance values. The microwave power detection system based on the parallel-connected MEMS cantilever beams comprises a gallium arsenide substrate, wherein a plane-waveguide center signal line (A), a parallel-connected MEMS cantilever beam structure (B) and a capacitance type microwave power sensor (C) are arranged on the substrate. When a microwave signal is transmitted on the plane-waveguide center signal line, the two parallel-connected MEMS cantilever beams generate displacement under the action of the electrostatic force, and the to-be-measured power is detected by the capacitance type microwave power sensor.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a microwave power detection system based on parallel connection of MEMS cantilever beams and a preparation method thereof. Background technique [0002] In the microwave research of microelectromechanical systems (ie: MEMS), microwave power is an important parameter to characterize microwave signals. In the research of each link of microwave signal generation, transmission and reception, the detection of microwave power is essential. A common on-line microwave power detection system is a coupled microwave power detection system based on the principle of thermoelectric conversion, but the detection system has a small dynamic range and low sensitivity. Because the MEMS cantilever beam structure is more sensitive to the microwave power signal, and the displacement generated by the microwave signal induced by the MEMS cantilever beam is larger than that of t...

AI Technical Summary

Problems solved by technology

The common online microwave power detection system is a coupled microwave power detection system based on the principle of thermoelectric conversion, but the detection system has a small dynamic range and low sensitivity.

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