Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

574 results about "Indium phosphide" patented technology

Indium phosphide (InP) is a binary semiconductor composed of indium and phosphorus. It has a face-centered cubic ("zincblende") crystal structure, identical to that of GaAs and most of the III-V semiconductors.

Manufacturing method of tunable semiconductor laser and tunable semiconductor laser

Provided is a making method of a tunable semiconductor laser and a tunable semiconductor laser, wherein the making method comprises the following procedures: growing lower waveguide layer, multiple quantum trap structure, upper waveguide layer and indium phosphide layer epitaxially and sequentially on the n type substrate; growing earth silicon dielectric membrane on the epitaxial layer; dividing into active waveguide region and raster region; butting passive waveguide portion; removing earth silicon dielectric membrane and indium phosphide layer on the surface of the active waveguide region; growing ridge waveguide indium phosphide material and low resistivity InGaAs ternary layer sequentially; growing earth silicon dielectric membrane; making raster graphic of the ridge waveguide and the ridge waveguide on the raster region; etching raster of the ridge waveguide and the ridge waveguide on the raster region; growing earth silicon dielectric membrane continuously; opening the window separately on active waveguide region and raster region in order to make electrode isolation ditch; making P face and N face electrode of laser. The invention has good product property and high automation degree of the product making, which simplifies the technology process and has good product ratio.
Owner:GUANGXUN SCI & TECH WUHAN

Method for manufacturing double diffusion type optical avalanche diode with incident light on back surface by adopting epitaxial equipment

The invention relates to a method for manufacturing a double diffusion type optical avalanche diode with incident light on a back surface by adopting epitaxial equipment. MOCVD epitaxial equipment is used for carrying out epitaxial treatment once on an avalanche photodiode on an indium phosphide substrate; a double diffusion method of the MOCVD epitaxial equipment is used for doping; a sputtering method is used for manufacturing a P-surface electrode; the substrate is thinned and polished; a wet corrosion method is used for manufacturing a light incidence window and an anti-reflection layer; the sputtering method is used for manufacturing a N-surface electrode; and the N-surface electrode is alloyed. By using the double diffusion method, in the diffusion process, the invention realizes gradient doping of different regions and different concentration by controlling the flow rate of a diffusion source; and an abrupt junction is formed in diffusion. The invention has good diffusion uniformity and high rate of finished products of pieces; and the manufactured avalanche photodiode with incident light on the back surface has the characteristics of small dark current, high sensitivity, small series resistance, high reliability and the like.
Owner:WUHAN HUAGONG GENUINE OPTICS TECH

Silicon nitride optical waveguide device and graphene detector integrated chip and manufacturing method thereof

ActiveCN108231803AReconfigurable optical signal processing functionBroad light absorption wavelength rangeDiodeEnergy conversion devicesGratingElectrical bandwidth
The invention discloses a silicon nitride optical waveguide device and graphene detector integrated chip and a manufacturing method thereof. The integrated chip structurally comprises a silicon nitride vertical coupling optical grating, a silicon nitride optical waveguide device and a graphene detector, wherein the silicon nitride vertical coupling optical grating is an optical signal input port,and is connected to the silicon nitride vertical coupling optical grating; the silicon nitride optical waveguide device is used for processing an optical signal, the processed optical signal is connected and transmitted to the graphene detector, and the graphene detector is used for carrying out photovoltaic conversion on the processed optical signal. The integrated chip has the advantages that firstly, various reconfigurable optical signal processing functions can be realized by designing the silicon nitride optical waveguide device with different structure; secondly, compared with a traditional indium phosphide based detector, the graphene detector has boarder optical absorption wavelength range and wider electrical bandwidth; and thirdly, the device is simple in structure, and an optical signal processing function unit and a chip of on-chip monolithic integration can be realized.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Rapid synthesis method of indium phosphide polycrystalline material and multi-tubular quartz phosphorus bubble thereof

The invention discloses a rapid synthesis method of an indium phosphide polycrystalline material, which comprises the following steps of: (I) performing surface cleaning treatment on indium; (II) placing a multi-tubular quartz phosphorus bubble with phosphorus into a phosphorus source furnace; (III) placing the pre-designed thermal insulation system, heater, crucible with indium, phosphorus source furnace and seed crystal and B2O3 into a high-pressure single-crystal furnace hearth; (IV) vacuumizing the inside of the furnace and filling high-purity argon; (V) heating to vaporize phosphorus in the phosphorus bubble and injecting into indium melt, and reacting to generate indium phosphide; and (VI) growing crystal. The multi-tubular quartz phosphorus bubble comprises a quartz phosphorus container, at least two quartz phosphorus bubble tubes and a quartz cover. By adopting a multi-tubular quartz phosphorus bubble, the method disclosed by the invention realizes a rapid multi-tubular phosphorus injection synthesis technology, solves the problems of long synthesis time, non-uniform melt proportioning, impurity pollution and the like in the original technology, realizes rapid, efficient and high-purity synthesis of the indium phosphide material, and performs InP single crystal growth more easily.
Owner:THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP

Silicon-based InGaAs PIN photoelectric detector based on heterogeneous integration and vertical optical coupling

The invention discloses a silicon-based InGaAs PIN photoelectric detector based on heterogeneous integration and vertical optical coupling. The silicon-based InGaAs PIN photoelectric detector comprises a silicon-on-insulator (SOI) substrate, a vertical coupling grating, a benzocyclobutene (BCB) bonding layer, an anti-reflecting layer, a first conductivity type indium phosphide layer, an intrinsic InGaAs layer and a second conductivity type indium phosphide layer, wherein the vertical coupling grating is produced in top silicon of the SOI substrate, the BCB bonding layer is covered on the vertical coupling grating, the anti-reflecting layer is located above the BCB bonding layer, the first conductivity type indium phosphide layer is located above the anti-reflecting layer, the intrinsic InGaAs layer is located above the first conductivity type indium phosphide layer, the second conductivity type indium phosphide layer is located above the intrinsic InGaAs layer, the vertical coupling grating is produced by etching the top silicon of the SOI substrate, the etching depth is 70-110 nm, the grating period is 600-680 nm, and the refractive index of the anti-reflecting layer is between refractive indexes of the BCB bonding layer and the first conductivity type indium phosphide layer. According to the silicon-based InGaAs PIN photoelectric detector, by means of an adhesiveness bonding process, InP/InGaAs/InP stack material layers are adhered to the grating which is etched on the SOI substrate, so that light and the InP/InGaAs/InP layers are vertically coupled, and suitable designs and prioritization schemes are provided for specific applications of the silicon-based InGaAs PIN photoelectric detector.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

808nm large-power quantum well laser in non-aluminum active region of asymmetric structure

ActiveCN101340060AIncreased light confinement factorReduce leakageOptical wave guidanceLaser detailsIndium arsenideWaveguide
The invention provides an aluminum-free active region 808nm high-power quantum-well laser with asymmetric structure. From the bottom to the top, the structure of the laser sequentially comprises a substrate, a buffer layer, an N-type lower limiting layer, a lower waveguide layer, a quantum-well layer, an upper waveguide layer, a potential barrier limiting layer, a P-type upper limiting layer, a transition layer and an ohmic contact layer, wherein, the upper waveguide layer and the lower waveguide layer are made of aluminum-free material Indium gallium phosphide, the quantum-well layer made of gallium indium arsenide phosphide material, the waveguide layer and the quantum-well layer form the aluminum-free active region, and one layer potential barrier limiting layer which is made of P-type aluminum gallium indium phosphide material and 50nm-150nm thick and has a band gap wider than that of the upper limiting layer is arranged between the upper limiting layer and the upper waveguide layer. The laser of the invention can increase the optical limiting factor of the P-type material region, reduce the optical leakage towards the P-type material region, reduce optical absorption loss of a current carrier at the highly doped area, and improve the work efficiency of the laser; the structure of the invention also improves the limiting effect of the active region on the carrier, reduce the leakage of the carrier and is favorable to the decrease of the threshold current.
Owner:Shandong Huaguang Optoelectronics Co. Ltd.
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products