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176 results about "Indium gallium arsenide" patented technology

Indium gallium arsenide (InGaAs) (alternatively gallium indium arsenide, GaInAs) is a ternary alloy (chemical compound) of indium arsenide (InAs) and gallium arsenide (GaAs). Indium and gallium are (group III) elements of the periodic table while arsenic is a (group V) element. Alloys made of these chemical groups are referred to as "III-V" compounds. InGaAs has properties intermediate between those of GaAs and InAs. InGaAs is a room-temperature semiconductor with applications in electronics and photonics.

Method for making semiconductor laser and spot-size converter by double waveguide technology

Disclosed a method for utilizing the dual-waveguide technology to manufacture the semiconductor laser and mode spot switch comprises following steps: on the N type indium phosphide substrate, sequentially extending growing the N type indium phosphide breaker, a lower waveguide layer, a space layer, a active region, and a thinner indium phosphide intrinsic layer, wherein, the indium phosphide intrinsic layer can prevent the oxidation of active region; removing the highest indium phosphide intrinsic layer, partly covering the laser with SiO2, and utilizing the wet corrosion process to etch the upper carinate shape of mode spot switch; utilizing the auto-alignment process to etch the lower carinate shape which comprises a lower waveguide layer, a space layer, a second growth P type indium phosphide coating layer, and a high doping P type indium gallium arsenide ohmic electrode contract layer; utilizing the SiO2 to partly cover the mode spot switch and etching the upper and lower carnate shapes again while the upper carinate shape comprises a active region, a P type indium phosphide coating layer and a high doping P type indium gallium arsenide ohmic electrode contract layer; and decreasing the substrate of extended plate to 100 ª–m, and manufacturing P/N electrodes to be scribed into the tube core of 250í‡500ª–m.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Wafer-level chip size encapsulation technology for GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor

The invention relates to a wafer-level chip size encapsulation technology for a GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor. The technology is characterized by comprising the following steps of: (1) firstly bonding a glass wafer and a GaAs wafer through a resin adhesive so as to protect the active surface of a chip and improve the strength of a chip wafer; (2) manufacturing a trapezoidal-slot structure by a wet corrosion or physical method so as to reduce the lining thickness of a chip interconnection area; (3) manufacturing vertical interconnected through holes by a dry etching technology so as to expose a pad on the active surface of the chip; (4) sputtering seed-layer metal and electroplating, and manufacturing a hole metalizing and RDL layer to realize circuit interconnection from the active surface to the back surface of the chip; (5) manufacturing a passivation layer, a UBM layer and raised points; and (6) finally scribing to form an independent encapsulation chip. As the trapezoidal-slot structure on the back realizes thickness reduction only in the area with the pad, the cost is effectively lowered; and through the interconnection of the vertical through holes, the encapsulation interconnection density can be improved, and the signal transmission path is shortened.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Method for stripping and transferring gallium arsenide based epitaxial layer

The invention discloses a method for stripping and transferring a gallium arsenide based epitaxial layer. The method comprises the steps of (1) cleaning surfaces of a gallium arsenide based epitaxial piece and a temporary substrate through dilute hydrochloric acid; (2) spin-coating photoresist on the front surface of the gallium arsenide based epitaxial piece; (3) putting the gallium arsenide based epitaxial piece on a hot plate with the front surface upward to perform baking; (4) bonding the cooled front surface of the gallium arsenide based epitaxial piece with the front surface of the temporary substrate oppositely; (5) removing a gallium arsenide substrate of the gallium arsenide based epitaxial piece; (6) cleaning an objective substrate and the surface of an epitaxial piece supported by the temporary substrate through the dilute hydrochloric acid; (7) spin-coating BCB on the front surface of the epitaxial piece supported by the temporary substrate; (8) putting the epitaxial piece supported by the temporary substrate on the hot plate with the front surface upward to perform baking; (9) bonding the cooled front surface of the epitaxial piece supported by the temporary substrate with the front surface of the objective substrate oppositely; (10) immersing the bonded wafer in acetone, and automatically separating the objective substrate from the temporary substrate after the photoresist is dissolved. The method has the advantages that the epitaxial layer on the gallium arsenide based epitaxial piece can be transferred onto any objective substrate integrally, the process is simple, and the gallium arsenide based epitaxial layer cannot be damaged during transfer.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Method for manufacturing lattice graded buffer layer

ActiveCN102011182AControllable threading dislocation densityReduce dependenceFrom chemically reactive gasesThreading dislocationsEpitaxial material
The invention relates to a method for manufacturing a lattice graded buffer layer, which comprises the following steps of: (1) using a commercial germanium single crystal, arsenide gallium single crystal or indium phosphide single crystal as a substrate; (2) epitaxially forming a layer of material in lattice matching with the substrate material as a nucleation layer by utilizing epitaxial technology; (3) epitaxially growing a lattice graded layer on the nucleation layer until the lattice of the material of a top layer has an ideal lattice constant or a lattice constant slightly lower than theideal lattice constant, wherein the lattice graded layer consists of a plurality of indium gallium arsenide materials with gradually increased components; (4) epitaxially forming a layer of indium gallium arsenide material with the lattice constant more than the ideal lattice constant on the lattice graded layer as a lattice overshoot layer; and (5) epitaxially forming a layer of material which has the lattice constant equal to the ideal lattice constant and is the same as that grown on an adjacent upper layer thereof as the lattice buffer layer. The method solves the problem of influence of device appearance degradation caused by lattice mismatching between a conventional epitaxial material and the substrate, and can effectively control threading dislocation density on the surface of a device.
Owner:CHINA ELECTRONIC TECH GRP CORP NO 18 RES INST +1

Method for epitaxially growing strontium titanate (STO) thin film on gallium arsenide (GaAs) substrate

The invention relates to a method for epitaxially growing a strontium titanate (STO) thin film on a gallium arsenide (GaAs) substrate. The method comprises the following steps: 1. treating the surface of the GaAs substrate to form a flat atomically clean surface with Ga atoms as the final surface; 2. sending the GaAs substrate treated in the step 1 and an STO target to the vacuum chamber of laser molecular beam epitaxy (MBE) equipment and immobilizing the GaAs substrate and the STO target in the vacuum chamber; 3. heating the GaAs substrate immobilized in the step 2 to the temperature between 550-600; and 4. evaporating the STO target immobilized in the step 2 with laser beams to ensure the STO to be deposited on the GaAs substrate, using reflection high energy electron diffraction to monitor the growth process of the thin film in the deposition process and obtaining the STO epitaxial thin film when typical STO diffraction fringes appear on the diffraction patterns. The method has the following beneficial effect: the surface of the GaAs substrate is treated to form the flat atomically clean surface with Ga atoms as the final surface, thus overcoming the difficulty in growing the dielectric oxide thin film on the GaAs substrate binary compound.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Preparation method and light emitting diode (LED) structure of indium gallium nitride (InGaN) base multiple quantum well structure

The invention provides a preparation method and a light emitting diode (LED) structure of an indium gallium nitride (InGaN) base multiple quantum well structure. The InGaN base multiple quantum well structure comprises a plurality of barrier layers and a plurality of quantum well layers, wherein the number of the barrier layers is M+1, and the number of the quantum well layers is M. A stage of preparing one barrier layer and one quantum well layer which are adjacent is set as a growth cycle, and the preparation method includes following steps which are performed in at least one growth cycle: step A, feeding ammonia with a constant flow rate and organic gallium source gas to the interior of a reaction chamber so as to form the single barrier layer; and step B, feeding organic indium source gas and the ammonia with the constant flow rate to the interior of a reaction chamber with a substrate placed, simultaneously opening and closing a control device of the organic gallium source gas in pulse mode, and accordingly feeding the organic gallium source gas to the interior of the reaction chamber to prepare the single quantum well layer. Luminous internal quantum efficiency of the InGaN base multiple quantum well structure can be increased by adopting the preparation method of the InGaN base multiple quantum well structure.
Owner:FOSHAN NATIONSTAR SEMICON
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