3 results about "Beam resonator" patented technology

A resonator element (100) is provided herein, comprising a plurality of beam elements (101) having a length (L) and a width (W), wherein the plurality of beam elements (101) are placed adjacent to each other and adjacent beam elements are mechanically connected to each other, and wherein the width (W) of the plurality of beam elements (101) varies within the resonator element (100), and wherein the resonator element (100) is configured to mitigate spurious resonant modes of the resonator element (100) by having a varying width (W).

The application discloses a flexible micro-beam resonator with a mode limiting device working in a high-order mode, which comprises a substrate, a driving electrode, a flexible cantilever micro-beam, an upper limiter, a lower limiter and a shell cover, the shell cover is fixed on the substrate, the flexible cantilever micro-beam is fixed on the substrate and located between the shell cover and the substrate, the upper limiter is installed between the flexible cantilever micro-beam and the shell cover, the lower limiter is installed between the flexible cantilever micro-beam and the substrate, the driving electrode is fixed on the substrate and located between the flexible cantilever micro-beam and the substrate, and the flexible cantilever micro-beam further comprises a fixed micro-beam, one end of the fixed micro-beam is connected below the flexible cantilever micro-beam, and the other end of the fixed micro-beam is connected above the substrate, the flexible cantilever micro-beam vibrates at an Nth natural frequency, and N is greater than or equal to 2, and the application is suitable for the micro-beam resonator working in the high-order mode, the zero point of the high-order vibration mode function is utilized, the limiters are arranged at the zero point, and the one-way and bidirectional limiting functions are completed.