8 results about "Beam resonator" patented technology

A resonator element (100) is provided herein, comprising a plurality of beam elements (101) having a length (L) and a width (W), wherein the plurality of beam elements (101) are placed adjacent to each other and adjacent beam elements are mechanically connected to each other, and wherein the width (W) of the plurality of beam elements (101) varies within the resonator element (100), and wherein the resonator element (100) is configured to mitigate spurious resonant modes of the resonator element (100) by having a varying width (W).

The invention discloses a high-Q-factor MEMS (Micro Electro Mechanical System) beam resonator with a periodic ripple boundary, and belongs to the field of micro electro mechanical system resonator design. According to the structure, periodic corrugation modulation is introduced into the side wall of a traditional straight beam, a plurality of periodic corrugation units are symmetrically arranged on the boundary of the side wall of a beam body, a corrugation boundary contour curve is defined by a parameterization function, the modulation amplitude and period are adjustable, the beam width is continuously and periodically changed in the length direction, and therefore thermoelastic damping and anchor point loss are reduced at the same time. The corrugated boundaries are integrally and symmetrically arranged and can be directly processed and formed by an SOI (Silicon On Insulator) process, the structure manufacturability is high, and additional assembly is not needed. Under the driving of electrostatic force, the resonator forms more uniform strain distribution and a limited heat flow channel in fundamental mode vibration, so that the energy leakage is obviously weakened, and the resonance quality factor is further improved. The structure is suitable for high-Q-factor demand scenes such as high-sensitivity MEMS sensors, low-noise oscillators and microfilters.

The present application belongs to the field of local resonance beam vibration isolation, and particularly relates to a programmable vibration suppression method and structure based on a local resonance metamaterial beam; the method is electrically connected with a piezoelectric sheet of the local resonance metamaterial beam, the metamaterial beam contains a combination curved beam resonator with four steady state combinations, and the code is composed of the steady state combinations; an elastic wave vibration signal at an excitation end is collected and preprocessed, a dominant frequency is extracted through fast Fourier transform, a control instruction is issued after matching a target code, and the steady state combination of the combination curved beam resonator driven by the piezoelectric sheet is switched to make the metamaterial beam form a band gap matching the dominant frequency. The present application realizes real-time on-demand vibration suppression of elastic waves, solves the problem that a traditional passive vibration isolation system cannot dynamically adjust the vibration isolation characteristics, and is suitable for a dynamically changing external excitation environment, with fast vibration isolation response speed and strong adaptability.

The present application relates to a kind of elastic micro beam resonators with two ends free boundary conditions, including substrate, first fixed support, second fixed support, support beam, free-free beam and fixed electrode;The number of support beam and the position of support point of support beam on free-free beam are determined according to the following rules: when free-free beam is required to work at its own N order natural frequency, N+1 identical support beam is vertically supported on the same side of free-free beam, forming N+1 vertical support point, and N+1 vertical support point is the N+1 node of the N order mode function of free-free beam;The cross section of support beam and free-free beam is rectangular, and the side length of rectangle corresponds to equal respectively.The present application realizes the boundary condition of beam two ends free support, and helps to effectively exert its performance advantage in engineering application.

The invention relates to a metal rubber and cantilever beam oscillator local resonance composite sandwich structure which comprises an array multi-cell structure composed of a plurality of local resonance composite sandwich unit cell structures. The local resonance composite interlayer unit cell structure comprises an upper plate, an amplitude adjusting pad, a cross-shaped cantilever beam, conical shell-shaped metal rubber and a lower plate which are sequentially arranged from top to bottom in the Z-axis direction, a local oscillator is arranged at the lower end of the cross-shaped cantilever beam, and the upper plate, the amplitude adjusting pad, the cross-shaped cantilever beam and the conical shell-shaped metal rubber are connected through positioning pieces. And the conical shell-shaped metal rubber is connected with the lower plate through a clamping ring. The vibration damper is simple in structure and reasonable in design, has the vibration damping capacity of low-frequency efficient suppression and wide-frequency-domain strong attenuation synergistic enhancement, has the extreme environment adaptability of wide temperature range, corrosion resistance and fatigue resistance, is high in reliability, has the flexible regulation and control capacity of independent and adjustable multi-performance parameters and customizable design, and is suitable for large-scale popularization and application. The method has the engineering advantages of process standardization, high assembly consistency and high expandability.

The utility model provides a cantilever resonator, and relates to the technical field of resonators. The cantilever beam resonator comprises a cantilever beam assembly and a crystal assembly. The cantilever beam assembly comprises a fixing piece and a cantilever beam, one end of the cantilever beam is connected with the fixing piece, the cantilever beam is provided with a root area, and the root area is adjacent to the fixing piece; the crystal component is disposed within the root region. The crystal assembly is etched on the root area of the cantilever beam, so that the crystal assembly and the cantilever beam are integrated, and when the cantilever beam vibrates, the lost energy can be reflected back through the crystal assembly, so that the energy loss is reduced, and the quality factor of the cantilever beam resonator is improved. And the crystal assembly is arranged in the root area, so that the rigidity of the cantilever beam is reduced, low-frequency operation is realized with a smaller length, and the size of the cantilever beam is reduced. Therefore, the cantilever resonator provided by the embodiment of the utility model has the characteristics of high quality factor and small size under low-frequency work, and is wide in application range.

The application discloses a PT-symmetry thermal piezoresistive MEMS wind speed and direction sensor, which comprises four groups of PT-symmetry MEMS resonators with thermal piezoresistive feedback and arranged in quadrature; the PT-symmetry MEMS resonator comprises two cantilever beam resonators which are completely identical in structure, a coupling spring beam connected to the two resonators, and a constant current source connected to one of the resonators; each cantilever beam resonator comprises two anchor areas, a wide beam connected to the anchor areas, a narrow beam with piezoresistive effect, a warped thin plate structure, and external electrodes located on both sides of the thin plate structure. The wind speed and direction signals are converted into stiffness changes of the resonator array through mechanical action by the warped thin plate structure, the stiffness changes make the PT-symmetry MEMS system deviate from the EP point, thereby causing frequency splitting of the system. Since the frequency splitting amount of the PT-symmetry system is proportional to the square root of the disturbance amount, the wind speed and direction sensor can detect a tiny wind speed signal, has very high sensitivity, and has the advantages of simple process, high integration and the like.

The application discloses a flexible micro-beam resonator with a mode limiting device working in a high-order mode, which comprises a substrate, a driving electrode, a flexible cantilever micro-beam, an upper limiter, a lower limiter and a shell cover, the shell cover is fixed on the substrate, the flexible cantilever micro-beam is fixed on the substrate and located between the shell cover and the substrate, the upper limiter is installed between the flexible cantilever micro-beam and the shell cover, the lower limiter is installed between the flexible cantilever micro-beam and the substrate, the driving electrode is fixed on the substrate and located between the flexible cantilever micro-beam and the substrate, and the flexible cantilever micro-beam further comprises a fixed micro-beam, one end of the fixed micro-beam is connected below the flexible cantilever micro-beam, and the other end of the fixed micro-beam is connected above the substrate, the flexible cantilever micro-beam vibrates at an Nth natural frequency, and N is greater than or equal to 2, and the application is suitable for the micro-beam resonator working in the high-order mode, the zero point of the high-order vibration mode function is utilized, the limiters are arranged at the zero point, and the one-way and bidirectional limiting functions are completed.