41 results about "Beam resonator" patented technology

A self-sustaining ultra-high frequency oscillator and method enable the ability to oscillate and output a signal. A balanced bridge circuit is utilized to null an embedding background response. A first vibrating nanoelectromechanical (NEMS) beam resonator is part of one of the branches of the balanced bridge circuit and determines the frequency of the oscillator's output signal. A feedback loop establishes and sets oscillation conditions of the oscillator's signal. Further, the feedback loop connects an output of the first resonator to an input of the balanced bridge circuit.

The invention provides a microelectromechanical resonator device comprising a support structure and a resonator manufactured on a (100) or (110) semiconductor wafer, wherein the resonator is suspended to the support structure and comprises at least one beam being doped to a doping concentration of 1.1*1020 cm-3 or more with an n-type doping agent and is being capable of resonating in a length-extensional, flexural resonance or torsional mode upon suitable actuation. In particular, the doping concentration and angle of the beam are chosen so as to simultaneously produce zero or close to zero second order TCF, and even more preferably zero or close to zero first and second order TCFs, for the resonator in said resonance mode, thus providing a temperature stable resonator.

An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

The invention provides a microelectromechanical resonator device comprising a support structure and a resonator manufactured on a (100) or (110) semiconductor wafer, wherein the resonator is suspended to the support structure and comprises at least one beam being doped to a doping concentration of 1.1*1020 cm−3 or more with an n-type doping agent and is being capable of resonating in a length-extensional, flexural resonance or torsional mode upon suitable actuation. In particular, the doping concentration and angle of the beam are chosen so as to simultaneously produce zero or close to zero second order TCF, and even more preferably zero or close to zero first and second order TCFs, for the resonator in said resonance mode, thus providing a temperature stable resonator.

The invention discloses a frequency output composite micro-beam resonator with temperature self-compensation function. The resonator is composed of a micro-bridge resonator and a micro-cantilever beam resonator fabricated on the same chip. The beam resonators have the same material, equal or similar thickness, and the same manufacturing process and are manufactured at the same time, so they can respond to temperature changes synchronously; the distance between the micro-bridge resonator and the micro-cantilever beam resonator is on the order of microns, so the temperature-sensitive element can be accurately Reflects the temperature of the microbridge resonator. Through data fusion technology, the resonant frequency of the micro-cantilever beam resonator as a temperature-sensitive element can compensate the cross-sensitivity of the temperature change to the resonant frequency of the micro-bridge resonator in real time, thereby reducing the temperature coefficient of the resonant frequency of the micro-bridge resonator and improving the resonator. range of working temperature.

A resonator-based etching endpoint detection system and method, including a coupled beam resonator and a temperature compensation sensor placed in the etching chamber of an etching machine at the same time, and the etching signal of the coupled beam resonator and the temperature compensation sensor The data acquisition is completed through a closed-loop oscillator circuit respectively, and the two closed-loop oscillator circuits send the etching signal data to the host computer for data processing, and display it graphically through the host computer, and the etching signal data of the host computer and the etching machine are shared The coupled beam resonator includes a connecting rod. The two ends of the connecting rod are respectively connected to the inner side of the middle part of the resonant beam. The upper and lower ends of the resonant beam are fixedly supported by anchor points. The outer end of the device is fixed by anchor points; there are etched square plates hanging on both sides of the middle of the connecting rod, and the etched square plates are used as etching areas; the detection system of the present invention has the advantages of simple structure, low cost, high detection accuracy, and can accurately control Silicon, silicon oxide and other etching depth and other advantages.

The invention discloses a resonance-force balance capacitance type three-axis acceleration transducer and a manufacture method thereof, belonging to the field of microelectro mechanical systems. The resonance-force balance capacitance type three-axis acceleration transducer is structurally characterized by comprising an intermediate silicon sheet (1), an upper cover plate (2) and a lower bottom plate (3), wherein the intermediate silicon sheet (1) comprises a dual-end clamped beam resonators (4), a mass block (6), a support beam (5), a movable electrode (7) and a frame (8). The resonance-force balance capacitance type three-axis acceleration transducer is characterized in that an X axis and a Y axis acceleration signals in a chip plane are detected by adopting the dual-end clamped beam resonator (4) on the aspect of detection principle, the change of the resonance frequency of the dual-end clamped beam resonator (4) reflects the size and the direction of acceleration; and a Z axis acceleration signal in a vertical chip plane is detected by adopting a capacitance type sensitivity principle, and works in a closed loop force balance working mode. The mass block (6) has little motion displacement in the normal of a chip, and the Z axis input acceleration signal has little chiasma interference caused by detection of X axis and Y axis accelerations.

The invention relates to an optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor, and belongs to the technical field of fiber sensors. The optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor comprises an LD light source, a directional fiber coupler, a photoelectric detector, a sensing probe, coupling liquid, a micro-machined fiber grating, a metal plated film, and a coupling filtering FBG. The quality factors of the fiber grating cantilever beam harmonic oscillator sensor are influenced by air damping so as to influence the resonance amplitude of a fiber grating cantilever beam and finally change the wavelength of the reflection signal center of the FBG cantilever beam harmonic oscillator sensor, and thus the vacuum degree can be measured. The optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor has the advantages of simple structure and strong anti-electromagnetic interference performance, and can satisfy the requirement of micro, real-time on-line distributed and multi-point monitoring.