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Resonant accelerometer based on bident type resonant beam

A technology of accelerometer and resonant beam, which is applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring device, etc. It can solve the problem of reducing measurement sensitivity and achieve the effect of high detection sensitivity

Active Publication Date: 2019-01-18
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the silicon material has a large Young's modulus, the longitudinal stiffness of the resonant beam will also limit the displacement of the mass block in the plane, reducing the measurement sensitivity

Method used

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  • Resonant accelerometer based on bident type resonant beam
  • Resonant accelerometer based on bident type resonant beam
  • Resonant accelerometer based on bident type resonant beam

Examples

Experimental program
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Embodiment 1

[0028] Embodiment 1: The thickness of the original silicon wafer is 389 microns, the thickness of the double-pronged fork-shaped resonant beam (1) is 3 microns, the thickness of the crab-leg support beam (4) is 25 microns, and the width of the corrosion groove (8) is 660 microns. The production process determined based on the above data is as follows:

[0029] 1) The original silicon wafer is (100) double-sided polished silicon wafer with a thickness of 389 microns. Thermal oxidation, a silicon dioxide film with a thickness of 0.6 microns is produced on the front and back sides of the silicon wafer in the (100) crystal orientation, and a silicon nitride film with a thickness of 0.3 microns is produced on the front and back sides of the silicon wafer by low-pressure chemical vapor deposition. (See figure 2 [1])

[0030] 2) Combining photolithography, corrosion, and doping processes to fabricate the excitation resistor (2) and piezoresistor (3) of the double-pronged fork-shap...

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Abstract

The invention discloses a structure, a manufacturing method and a working principle of a resonant accelerometer based on a bident type resonant beam, and belongs to the field of the micro-electro mechanical system. The structure disclosed by the invention is that the resonant accelerometer is composed of a bident resonant beam (1), an excitation resistor (2), a piezoresistor (3), a crab leg type support beam (4), a mass block (5), a frame (6), and a metal internal lead (7); a center of gravity of the mass block (5) is located in a neutral surface of the crab leg type support beam (4). On the aspect of the detection principle, the sensor is characterized in that the axial stress of the bident type resonant beam (1) is changed under the acceleration effect parallel to a chip surface, therebychanging the resonance frequency thereof; and the size and the direction of the acceleration can be obtained by detecting the resonance frequency change; compared with the dual-end clamped straight beam resonator, the resonant accelerometer based on the bident resonant beam has greater detection sensitivity.

Description

technical field [0001] The invention relates to a resonant accelerometer, in particular to the structure and working mechanism of a high-sensitivity bulk micromechanical resonant accelerometer based on a double-fork resonant beam, belonging to Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems, MEMS) field. Background technique [0002] The micro accelerometer is a sensor that uses the inertial force of the sensing mass to measure acceleration. It has the advantages of small size, light weight, easy integration, low power consumption and cost, and mass production. According to the number of sensitive axes, it can be divided into single-axis, dual-axis and three-axis accelerometers. According to the movement mode of the detection mass, it can be divided into linear accelerometer and torsional accelerometer. According to whether there is a feedback signal, it can be divided into an open-loop deviation type and a closed-loop force balance type accelerometer. ...

Claims

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Application Information

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IPC IPC(8): G01P15/097
CPCG01P15/097
Inventor 韩建强陶功皓朱安赐
Owner CHINA JILIANG UNIV
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