Nickel Electrode Driven Circular Beam Resonant Microgyroscope

A nickel electrode, micro-gyro technology, applied in the field of gyroscope in the field of micro-electromechanical technology, can solve the problems of hemispherical resonant gyro offset, inaccurate dynamic load connection, etc., and achieve the effects of stable structure, excellent performance and sensitive response.

Active Publication Date: 2021-12-10
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run

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  • Nickel Electrode Driven Circular Beam Resonant Microgyroscope
  • Nickel Electrode Driven Circular Beam Resonant Microgyroscope
  • Nickel Electrode Driven Circular Beam Resonant Microgyroscope

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Embodiment Construction

[0048] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0049] The present invention provides a resonant micro-gyro driven circular beam within a nickel electrode mechanism, including a base 100, a resonator 102 and an electrode mechanism 104; the resonator 102 is arranged on the base 100; the electrode mechanism 104 is uniform along the circumferential direction distributed on the substrate 100.

[0050] The electrode mechanism 104 is in the shape of a segmented ring; the material of the electrode mechanism 104 is nickel. The segmented shape of the ring is...

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Abstract

The present invention provides a resonant micro-gyroscope with a circular beam internally driven by a nickel electrode mechanism, comprising a base (100), a resonator (102) and an electrode mechanism (104); the base (100) is provided with a protruding portion 108; The resonator (102) is arranged in the protruding part 108; the electrode mechanism (104) is evenly distributed on the base (100) along the circumferential direction. The electrode mechanism (104) is fan-shaped; the material of the electrode mechanism (104) is nickel. The nickel electrode internal drive circular beam resonant micro gyro adopts a circular beam resonant structure, which has a high degree of symmetry; the nickel electrode internal drive circular beam resonant micro gyro adopts an S-shaped flexible fixed beam, which has a relatively stable structure, impact resistance, and excellent performance . Compared with the electrodes distributed on the outer circle of the circular beam resonator, the nickel electrodes distributed on the inner edge of the circular beam resonator can improve the Q value of the circular beam resonant micro-gyroscope driven by the nickel electrode, so the response is more sensitive.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a nickel electrode internally driven circular beam resonant micro gyroscope. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and integrati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 张卫平谷留涛刘朝阳李敏阳田梦雅崔峰张钰莹成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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