Nickel Electrode Driven Circular Beam Resonant Microgyroscope
A nickel electrode, micro-gyro technology, applied in the field of gyroscope in the field of micro-electromechanical technology, can solve the problems of hemispherical resonant gyro offset, inaccurate dynamic load connection, etc., and achieve the effects of stable structure, excellent performance and sensitive response.
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[0048] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0049] The present invention provides a resonant micro-gyro driven circular beam within a nickel electrode mechanism, including a base 100, a resonator 102 and an electrode mechanism 104; the resonator 102 is arranged on the base 100; the electrode mechanism 104 is uniform along the circumferential direction distributed on the substrate 100.
[0050] The electrode mechanism 104 is in the shape of a segmented ring; the material of the electrode mechanism 104 is nickel. The segmented shape of the ring is...
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