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Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof

A resonant gyroscope, flexible beam technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, measurement device and other directions, can solve the problems of inaccurate dynamic load connection, offset of hemispherical resonant gyroscope, etc., to achieve the processing technology The effect of simple steps, stable structure and excellent performance

Active Publication Date: 2016-03-02
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run

Method used

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  • Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof
  • Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof
  • Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof

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Embodiment Construction

[0053] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0054] Such as Figure 1A , Figure 1B , Figure 1C As shown, a kind of S-shaped flexible beam resonant gyroscope outside the disk multi-ring is provided in this embodiment, including:

[0055] A substrate 100, including 8 discrete sector ring parts on the peripheral edge, 8 central discrete sector ring parts and 8 electrode sheets on the outermost edge;

[0056] A disc multi-ring external S-shaped flexible beam resonator 102, including the outermost ring, 8 S-shaped flexible beams, multiple con...

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Abstract

The invention provides a disc multi-ring outer S-shaped flexible beam resonator gyro and a preparation method thereof. The resonator gyro comprises: a substrate; a disc multi-ring outer S shaped flexible beam resonator, which includes a most peripheral ring, a plurality of concentric rings, a plurality of S-shaped flexible beams and multiple groups of spokes, wherein the most peripheral ring is connected to the substrate, the concentric rings are connected through the multiple spokes, and both ends of the plurality of S-shaped flexible beams are all connected to the inside of the most peripheral ring and the outside of the concentric rings' largest ring; and a group of electrodes that are distributed on the inside edge of the disc multi-ring outer S-shaped flexible beam resonator, with each electrode being connected to the substrate respectively. The disc multi-ring outer S-shaped flexible beam resonator gyro provided by the invention has the advantages of small volume, stable structure, and sensitive response, etc., and has good symmetry, thus being able to achieve high performance.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a resonant gyroscope with S-shaped flexible beams outside a multi-ring disk and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working...

Claims

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Application Information

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IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 张卫平朱甲强唐健邢亚亮
Owner SHANGHAI JIAO TONG UNIV
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