Electrode micro-gyroscope and preparation method thereof

A micro-gyroscope and electrode technology, applied in the field of micro-electromechanical, can solve the problems of the offset of the hemispherical resonant gyroscope and the inaccuracy of the dynamic load connection, and achieve the effects of stable structure, simple processing steps and small volume.

Inactive Publication Date: 2018-11-23
SHANGHAI JIAO TONG UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the early rod structure, the rod part of the resonator needs to be assembled on the micromechanical mechanism, and in

Method used

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  • Electrode micro-gyroscope and preparation method thereof
  • Electrode micro-gyroscope and preparation method thereof
  • Electrode micro-gyroscope and preparation method thereof

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[0049] The present invention will be described in detail below in conjunction with specific inventions. The following invention will help those skilled in the art to further understand the invention, but does not limit the invention in any form. It should be pointed out that for those of ordinary skill in the art, several changes and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0050] The present invention provides a method for preparing an electrode micro-gyro, which includes a first device groove forming step, a second device groove forming step, and a supporting pillar through hole forming step; the second device groove forming step includes a mask layer Forming step, resonator groove forming step.

[0051] The first device groove forming step includes an electrode groove forming step, a metal layer group forming step, and a removing excess metal step.

[0052] In the e...

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Abstract

The invention provides a preparation method of an electrode micro-gyroscope. The preparation method comprises a first device groove forming step, a second device groove forming step, and a support post through hole forming step, wherein the second device groove forming step comprises a mask layer forming step and a resonator groove forming step; the first device groove forming step comprises an electrode groove forming step, a metal layer formation step and a surplus metal removal step. The method provided by the invention is simple in steps, adopts a mature micro-mechanical processing technology and an etching method, and is beneficial to mass production. A nickel electrode side-driven hemispheric micro-gyroscope has the advantages of high symmetry, relatively stable structure, shock resistance and excellent performance. The nickel electrode side-driven hemispheric micro-gyroscope is driven by a side driving mode, so that technological implementation is facilitated, the cost is relatively low, and mass production is facilitated. The electrode micro-gyroscope has the advantages of small size, stable structure, sensitive response and the like, and has high symmetry, so that higher performance can be achieved.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical technology, and in particular relates to a preparation method of an electrode micro-gyroscope, in particular to a nickel-electrode side-drive hemispherical micro-gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro-gyroscope based on Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) technology is processed by micro-nano batch ma...

Claims

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Application Information

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IPC IPC(8): G01C19/56
CPCG01C19/56
Inventor 张卫平李敏阳刘朝阳谷留涛田梦雅崔峰张钰莹成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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