Electrode micro-gyroscope and preparation method thereof

Abstract

The invention provides a preparation method of an electrode micro-gyroscope. The preparation method comprises a first device groove forming step, a second device groove forming step, and a support post through hole forming step, wherein the second device groove forming step comprises a mask layer forming step and a resonator groove forming step; the first device groove forming step comprises an electrode groove forming step, a metal layer formation step and a surplus metal removal step. The method provided by the invention is simple in steps, adopts a mature micro-mechanical processing technology and an etching method, and is beneficial to mass production. A nickel electrode side-driven hemispheric micro-gyroscope has the advantages of high symmetry, relatively stable structure, shock resistance and excellent performance. The nickel electrode side-driven hemispheric micro-gyroscope is driven by a side driving mode, so that technological implementation is facilitated, the cost is relatively low, and mass production is facilitated. The electrode micro-gyroscope has the advantages of small size, stable structure, sensitive response and the like, and has high symmetry, so that higher performance can be achieved.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical technology, and in particular relates to a preparation method of an electrode micro-gyroscope, in particular to a nickel-electrode side-drive hemispherical micro-gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro-gyroscope based on Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) technology is processed by micro-nano batch ma...

AI Technical Summary

Problems solved by technology

However, due to the early rod structure, the rod part of the resonator needs to be assembled on the micromechanical mechanism, and in the long run, higher dynamic loads and imprecise connections at the joints will cause larger deflection of the hemispherical resonator

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