The invention relates to the technical field of
quartz vacuum sensors, and discloses a surface bending mode double-coupled monolithic high-sensitivity
quartz tuning fork vacuum sensor. The vacuum sensor comprises a single-piece type double-open-end multi-fork-arm
quartz tuning fork vacuum sensitive
resonator of a surface bending mode, a
kovar alloy base, a vacuum sensor shell, an envelope-shaped inserting plate type fixing structure, a
polytetrafluoroethylene-expanded
graphite combined water-repellent sealing
gasket, a
ceramic fiber waterproof sealing ring and an anti-
pollution and
mildew-proof filtering cover, wherein the number n of fork arms of the
quartz tuning fork vacuum sensitive
resonator is larger than or equal to 3; and the dustproof and oil-
stain-resistant
ceramic filter cap can be self-recovered and self-purified at the temperature of-180 DEG C to + 350 DEG C. The surface bending mode monolithic double-open-end multi-fork-arm
quartz tuning fork vacuum sensitive
resonator adopts (yxtl)-24 degrees to-50 degrees / 5 degrees to 15 degrees
cut-type double-rotation-angle quartz crystals, a fundamental wave-surface
bending vibration mode is adopted, friction with residual gas in vacuum and
mass loading are increased by increasing the arm width and carrying out Hamming weighting on the area of each fork arm
electrode, and the surface bending mode of the single-sheet double-open-end multi-fork-arm
quartz tuning fork vacuum sensitive resonator is obtained. The variable quantity of
dynamic resistance is improved, and the vacuum sensitivity and stability are improved.