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Monolithic surface bending mode double-coupling five-fork-arm quartz tuning fork vacuum sensitive resonator

A quartz tuning fork and resonator technology, applied in the field of vacuum sensing, to achieve long service life, strong ability to filter dust, and good heat insulation characteristics

Pending Publication Date: 2022-04-29
常州奇军苑电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] The purpose of the present invention is to overcome the shortcomings of the existing quartz tuning fork vacuum sensitive resonator, to propose a monolithic surface bending mode double-coupled five-arm quartz tuning fork vacuum sensitive resonator, to broaden the measurement of the existing quartz tuning fork vacuum sensitive resonator Range lower limit, improve its vacuum measurement sensitivity, improve its temperature stability and time stability

Method used

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  • Monolithic surface bending mode double-coupling five-fork-arm quartz tuning fork vacuum sensitive resonator
  • Monolithic surface bending mode double-coupling five-fork-arm quartz tuning fork vacuum sensitive resonator
  • Monolithic surface bending mode double-coupling five-fork-arm quartz tuning fork vacuum sensitive resonator

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Effect test

Embodiment 1

[0062] see figure 1 , figure 2 and Figure 5 As shown, the monolithic surface bending mode double-coupled five-arm quartz tuning fork vacuum sensitive resonator is composed of a five-arm surface bending mode quartz tuning fork resonator plate, a quartz vacuum sensitive resonator socket 12 and a quartz tuning fork vacuum sensitive resonator. Consisting of 8 anti-pollution and moisture-proof filter caps, the five-arm surface bending mode quartz tuning fork resonator piece 2 is placed on the tube base 12 of the quartz vacuum-sensitive resonator and the vacuum-sensitive resonator package composed of the anti-pollution and moisture-proof filter cap 8 of the quartz tuning fork vacuum-sensitive resonator inside part 3.

[0063] Quartz vacuum-sensitive resonator base 12 includes Kovar-glass base chassis 16a, Kovar base sidewall 21, insulating glass body 22, and first pins 13 and second tubes evenly distributed in insulating glass body 22. The pin 14 and the third pin 15, the Kovar...

Embodiment 2

[0094] see image 3 and Figure 6 As shown, the monolithic double-opening five-pronged quartz tuning fork vacuum sensitive resonator piece 2 of the surface bending mode is the second monolithic surface bending mold double-opening five-pronged quartz tuning fork vacuum sensitive resonator piece 2-3, and the second The difference between the vacuum-sensitive resonator piece 2-3 with double-opening five-pronged quartz tuning fork of the monolithic surface bending mode and the vacuum-sensitive resonator piece 2-1 with double-opening five-pronged quartz tuning fork of the first monolithic surface bending mold is as follows:

[0095] 1. The two supporting beams of the second monolithic surface bending mold double-opening five-fork quartz tuning fork vacuum-sensitive resonator sheet 2-3—the third supporting beam 11c and the fourth supporting beam 11d are not arranged on the common overlapping base The left and right sides of the area are arranged on the front and rear of the second ...

Embodiment 3

[0101] see Figure 4 and Figure 6 As shown, the single-chip double-opening five-pronged quartz tuning fork vacuum sensitive resonator piece 2 of the surface bending mold is a double-opening-closed five-pronged quartz tuning fork vacuum sensitive resonator piece 2-2 of the single-piece surface bending mold , the double-opening-closed five-arm quartz tuning fork vacuum sensitive resonator piece 2-2 of the monolithic surface bending mold and the first monolithic surface bending mold double-opening five-arm quartz tuning fork vacuum sensitive resonator piece 2- 1 differs as follows:

[0102] 1. Two sets of opening-closed five-arm quartz tuning fork vacuum sensitive resonator plate 2-2 of the single-piece surface bending mold is composed of two groups of quartz tuning forks with five-arms, the first five-arm quartz tuning fork The tops of the first fork arm and the fifth fork arm and the tops of the second fork arm and the fourth fork arm on the outer edge of the outer edge are ...

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Abstract

The invention relates to the technical field of vacuum sensing, and discloses a monolithic surface bending mode double-coupling five-fork-arm quartz tuning fork vacuum sensitive resonator, which is composed of a five-fork-arm surface bending mode quartz tuning fork resonator plate, a quartz vacuum sensitive resonator tube socket and a quartz tuning fork vacuum sensitive resonator anti-pollution moisture-proof filter cap, the five-fork arm surface bending mode quartz tuning fork resonator piece is arranged in a vacuum sensitive resonator packaging part formed by the quartz vacuum sensitive resonator tube socket and the quartz tuning fork vacuum sensitive resonator anti-pollution moisture-proof filter cap; the (yxtl)-24 degrees to-50 degrees / 5 degrees to 15 degrees cut quartz crystal is suitable for a single-chip double-open-end five-fork-arm quartz tuning fork vacuum sensitive resonator of a surface bending mode and a single-chip double-group open-end and closed-end five-fork-arm quartz tuning fork vacuum sensitive resonator of the surface bending mode. And the temperature stability of the quartz tuning fork resonator is far better than that of the existing single-closed-end quartz tuning fork resonator and double-closed-end quartz tuning fork resonators.

Description

technical field [0001] The invention relates to the technical field of vacuum sensing, and relates to a resonant quartz tuning fork vacuum sensitive resonator, in particular to a single-chip surface bending mode double-coupled five-arm quartz tuning fork vacuum sensitive resonator. Background technique [0002] The resonant quartz tuning fork vacuum sensor that has emerged in recent years is quite promising. Its core component, the quartz tuning fork vacuum sensitive resonator, mainly has two forms. The first one is a single closed end thickness bending mode two-fork quartz tuning fork vacuum sensitive resonator, such as the sensitive element used in the Chinese patent CN201710742649.5. The second type is a vacuum sensitive resonator with double closed-end thickness bending mode two-fork quartz tuning fork, such as the sensitive element used in Chinese patent CN103940548. Unfortunately, it currently has the following shortcomings: [0003] 1) Sensitivity needs to be improv...

Claims

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Application Information

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IPC IPC(8): H03H9/215H03H3/02H03H9/10G01L21/22
CPCH03H9/215H03H3/02H03H9/10G01L21/22H03H2003/026
Inventor 林金秋初思博周烨初奇伟周佳辉林江
Owner 常州奇军苑电子科技有限公司
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