Full-measuring-range vacuum gauge and testing method thereof

A vacuum gauge and full-scale technology, applied in the measurement field, can solve the problems of high cost, blank localization of medium and high vacuum measurement value transmission standard instruments, complicated control circuit, etc., and achieve the effect of improving accuracy.

Pending Publication Date: 2020-08-28
NAT UNIV OF DEFENSE TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this kind of vacuum gauge has the problems of difficult manufacture, complex control circuit and high cost. At present, only the MKS company in the United States has realized the commercial production of magnetic levitation rotor viscous gauges. blank

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  • Full-measuring-range vacuum gauge and testing method thereof
  • Full-measuring-range vacuum gauge and testing method thereof
  • Full-measuring-range vacuum gauge and testing method thereof

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Embodiment Construction

[0042]In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0043] In one embodiment, such as figure 1 As shown, a full range vacuum gauge is provided, including:

[0044] A sensitive module 102 , a control module 104 and a data processing module 106 .

[0045] The sensitive module 102 includes a plurality of sensitive units with different sizes. Driven by the different test modes output by the control module 104, the sensitive unit includes a plurality of test modes; a plurality of the test modes and a plurality of different sizes Sensitive units, respectively use the frequency response method and frequency drift method to measur...

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Abstract

The invention relates to a full-measuring-range vacuum gauge and a testing method thereof. The full-measuring-range vacuum gauge comprises a sensitive module, a control module and a data processing module, wherein the sensitive module comprises a plurality of sensitive units with different sizes. Under the driving of different test modal output by the control module, a frequency response method and a frequency drift method are respectively used for measuring test intervals of low vacuum and medium vacuum by utilizing the sensitive units; the plurality of sensitive units with different sizes are utilized, and an attenuation method and a PID control method are adopted to measure a high-vacuum test interval; and the data processing module continuously collects output parameters of the sensitive units in different test modal, and an actual pressure value of a test environment is calculated according to the output parameters. By adopting the testing method, full-measuring-range measurementof the vacuum degree can be realized.

Description

technical field [0001] The present application relates to the technical field of measurement, in particular to a full-scale vacuum gauge and a testing method thereof. Background technique [0002] The vacuum gauge is a sensitive component of a vacuum measuring instrument, and the vacuum gauge is a complete product, including a vacuum gauge, a test circuit and a control unit. [0003] Silicon microresonant gauges and damping viscous vacuum gauges are used to test low-medium vacuum and medium-high vacuum respectively, and the principles of the two are different from the range of vacuum degrees. At present, there are no relevant products or papers reporting the same gauge to test the full-scale vacuum degree (the full-scale range here refers to low vacuum: 10 5 ~10 2 Pa, medium vacuum: 10 2 ~10 -1 Pa, high vacuum 10 -1 ~10 -5 ). [0004] The silicon microresonant gauge uses the resonant frequency to test the gas pressure. The resonant frequency of the sensitive element i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/22
CPCG01L21/22
Inventor 肖定邦吴学忠侯占强王呈祥邝云斌徐强陈志华李长虹
Owner NAT UNIV OF DEFENSE TECH
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