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Vacuum monitor

A vacuum gauge, in-space technology, applied in vacuum gauges, vacuum gauges using ionization effects, vacuum gauges that measure changes in gas frictional resistance, etc. The effect of shortened life, increased productivity, and reduced frequency

Pending Publication Date: 2019-07-05
HORIBA STEC CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Therefore, a part of the easily condensable material gas condenses on the sensing mechanism, and its components accumulate, causing problems such as a decrease in sensitivity to pressure and a shortened life as a sensor.
If buildup occurs on the sensing mechanism, the entire vacuum gauge has to be replaced from the vacuum chamber, and it takes time to replace and calibrate, and the downtime of the semiconductor manufacturing process becomes longer, so productivity deteriorates
[0005] In addition, if the temperature is set at a high temperature so that the material gas does not condense, decomposition occurs, and film formation of the intended component may not be achieved.

Method used

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Embodiment Construction

[0053] refer to Figure 1 to Figure 7 A vacuum gauge 100 according to one embodiment of the present invention will be described.

[0054] The vacuum gauge 100 of this embodiment is used, for example, to monitor the degree of vacuum in a vacuum chamber, which is a measurement space where film formation and the like are performed in semiconductor processing. The vacuum gauge 100 is installed outside the partition wall of the vacuum chamber, and connected so as to communicate with the inside of the vacuum chamber.

[0055] Such as figure 1As shown, the vacuum gauge 100 has a substantially rectangular parallelepiped shape, a vacuum connector VC is provided at its front end, and an output terminal T for outputting a measured pressure value to the outside is provided at its base end.

[0056] Such as figure 2 As shown in the cross-sectional view of the vacuum gauge 100, three modules are accommodated or formed in the casing C. That is, the three modules include: a sensor module...

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Abstract

The invention provides a vacuum monitor that, even if a sensing mechanism is exposed to an atmosphere into which various types of material gases are introduced, enables the deposition of matter on thesensing mechanism to be prevented, and enables the lifespan of the sensing mechanism to be extended. The vacuum monitor comprises a sensing mechanism that is in contact with an atmosphere inside a measurement space, and outputs an output signal that corresponds to a pressure inside the measurement space; and a heater that adjusts a temperature of the sensing mechanism, wherein a set temperature of the heater is adjustable.

Description

technical field [0001] This invention relates to vacuum gauges. Background technique [0002] For example, in semiconductor processing, a vacuum gauge for monitoring the degree of vacuum is provided in a vacuum chamber where film formation is performed. As shown in Patent Document 1, a vacuum gauge includes: a sensing mechanism exposed to the atmosphere in a vacuum chamber; and a pressure calculation circuit that inputs an output signal corresponding to pressure from the sensing mechanism and converts it into a pressure signal representing the pressure. [0003] In recent years, with the miniaturization of semiconductor processing, a variety of material gases have been introduced into the vacuum chamber, and some of the new material gases have very high condensation temperatures compared to conventional material gases. [0004] Therefore, a part of the easily condensable material gas condenses on the sensing mechanism, and its components accumulate, causing problems such as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/00G01L19/06
CPCG01L21/00G01L19/06G01L9/0072G01L19/142G01L9/125G01L27/002G01L21/30G01L21/22H01L21/67248H01L21/67098H01L21/67276H01L21/67207G01L19/14G01L21/12
Inventor 岸田创太郎山下圭裕中井淳也
Owner HORIBA STEC CO LTD
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