Surface bending mode double-coupled monolithic high-sensitivity quartz tuning fork vacuum sensor

A technology of vacuum sensor and quartz tuning fork, applied in the direction of vacuum gauge by measuring the change of gas frictional resistance, can solve the problems of increasing process difficulty, affecting sensitive characteristics, not installing anti-oil pollution, etc., and achieving temperature stability and time stability Improve, improve vacuum measurement sensitivity, improve the effect of vacuum sensitivity

Pending Publication Date: 2022-03-01
常州奇军苑电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

To improve the sensitivity, there are three conventional methods: the first method is to increase the length L of the fork arm of the quartz tuning fork; The error ratio is severely deteriorated, and it also increases the difficulty of the process
Especially limited by the current double-sided exposure equipment and quartz anisotropic etching process technology, it is difficult to improve its sensitivity
The second method is to increase the thickness t of the fork arm. However, due to the large difference in the vertical and horizontal corrosion rates of the quartz wet etching process, when the thickness t of the quartz tuning fork exceeds 0.12mm, the side erosion phenomenon and residual island defects are serious. Significantly affect its sensitive properties
The third method increases the width M of the wishbone, which will lead to an increase in frequency and volume
Therefore, it is difficult to increase the sensitivity by con

Method used

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  • Surface bending mode double-coupled monolithic high-sensitivity quartz tuning fork vacuum sensor
  • Surface bending mode double-coupled monolithic high-sensitivity quartz tuning fork vacuum sensor
  • Surface bending mode double-coupled monolithic high-sensitivity quartz tuning fork vacuum sensor

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Embodiment 1

[0100] See figure 1 , figure 2 and Figure 4 As shown, a single-piece high-sensitive stone tunnel vacuum sensor, a single-chip double-open multi-open multi-cardiped aperture, a single-chip double-open multi-bage-based, bending mold, is characterized by a surface curved mold. Single-chip double-opening multi-made arm stone tunklow vacuum sensitive resonator 2 is a surface-bending mode type double-open quartz tonic type double-open quartz tunnel vacuum sensitive resonator;

[0101] Single-chip double-open multi-board arm of face curved molds, the vacuum sensitive resonator 2 includes a single closing stone 61 and a second set of multi-forkled arms each having a multi-fork arm Quartz tonic 81, the first set of multi-folded stone tunnel fork 61 and the second set of multi-bage-only stone tunnel fork 81 overlap or partially overlap each other, ie there is a public overlapping base 67. Double-opening tuning quartz resonators of the integrated single-chip structure of the integrated singl...

Embodiment 2

[0153]See image 3 Specifically, the present embodiment, the second embodiment, and the first embodiment, there are two:

[0154] 1. In the first opening of the single-closed stone tank fork 61 and the second set of multi-made stone tonic 81 located in the first set of forklons, the first opening rectangular slot 201 is loaded into the first The elliptical quartz crystal bar 293, the first elliptical quartz crystal bar 293 is equal, and the single-closed stone tuning fork 61 and the second set of multi-aircraft arm fork 61 and the second set of pusher The tunnel of the tone of the torch tunnel 81 is symmetrical. The crystal cutoform of the first elliptical quartz crystal bar 293 is (YXTL) - 32 ° / 15 ° quartz crystal bar; and in the first opening rectangular pass groove 201 and the first elliptical quartz crystal bar 293 The gap between the gap is filled with low melting glass, and the third low melting glass powder sealing area 297 is formed by the sintering process, and then the ...

Embodiment 3

[0158] See figure 1 and figure 2 Specifically, the present embodiment, the third embodiment, and the examples of the embodiments are as follows: the single-piece double-opening pork-projection of the surface curved mold is (YXTL) - 40 ° / 10 °. Sliced ​​quartz crystals.

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Abstract

The invention relates to the technical field of quartz vacuum sensors, and discloses a surface bending mode double-coupled monolithic high-sensitivity quartz tuning fork vacuum sensor. The vacuum sensor comprises a single-piece type double-open-end multi-fork-arm quartz tuning fork vacuum sensitive resonator of a surface bending mode, a kovar alloy base, a vacuum sensor shell, an envelope-shaped inserting plate type fixing structure, a polytetrafluoroethylene-expanded graphite combined water-repellent sealing gasket, a ceramic fiber waterproof sealing ring and an anti-pollution and mildew-proof filtering cover, wherein the number n of fork arms of the quartz tuning fork vacuum sensitive resonator is larger than or equal to 3; and the dustproof and oil-stain-resistant ceramic filter cap can be self-recovered and self-purified at the temperature of-180 DEG C to + 350 DEG C. The surface bending mode monolithic double-open-end multi-fork-arm quartz tuning fork vacuum sensitive resonator adopts (yxtl)-24 degrees to-50 degrees/5 degrees to 15 degrees cut-type double-rotation-angle quartz crystals, a fundamental wave-surface bending vibration mode is adopted, friction with residual gas in vacuum and mass loading are increased by increasing the arm width and carrying out Hamming weighting on the area of each fork arm electrode, and the surface bending mode of the single-sheet double-open-end multi-fork-arm quartz tuning fork vacuum sensitive resonator is obtained. The variable quantity of dynamic resistance is improved, and the vacuum sensitivity and stability are improved.

Description

Technical field [0001] The present invention relates to the technical field of quartz vacuum sensors, and is specifically a single-chip high-sensitive stone tuning vacuum sensor having a face bending die double coupling. Background technique [0002] Vacuum sensors are currently a weak technology, but there is a sensor with prospects in nuclear industry, aerospace, aerospace, ship, semiconductor industry, such as: nuclear power plant requires a high precision of high-profile resistance to high magnetic fields. Vacuum sensor; skydiving actuator of the aviation system, super high level atmospheric monitoring in the aerospace sector, the surface to 100km exploration balloon engineering and other departments urgently need a mechanical vibration, impact, and pressure range of 10 5 ~ 10-3PA high stable vacuum sensor, but its current situation is not optimistic: [0003] Existing vacuum sensor, for example: Pirani, ionizing hot cathode, metal diaphragm vacuum sensor dynamic range, low s...

Claims

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Application Information

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IPC IPC(8): G01L21/16
CPCG01L21/16
Inventor 初思搏周烨林金秋初奇伟周佳辉林江
Owner 常州奇军苑电子科技有限公司
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