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Resonator-based vacuum degree detection method, system and device

A detection method and detection device technology, applied in the detection field, can solve the problems of low test accuracy, high cost, and low sensitivity, and achieve the effects of shortened detection time, high degree of automation, and reduced interference

Pending Publication Date: 2021-06-22
AEROSPACE INFORMATION RES INST CAS
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  • Description
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Problems solved by technology

[0006] Based on the above problems, the present disclosure provides a resonator-based vacuum degree detection method, system and device to alleviate technical problems such as low test accuracy, low sensitivity, and high cost of the MEMS device vacuum degree detection method in the prior art

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Embodiment Construction

[0028] The present disclosure provides a method, system and device for detecting vacuum degree based on a resonator. By utilizing the characteristics of a resonator with small volume, stable performance, simple processing and easy integration, the resonator is built into the shell or cavity of a MEMS device. , based on the principle that the amplitude of the output signal of the resonator changes with the vacuum (pressure), and there is a relationship between the amplitude and the voltage, by detecting the change of the output signal amplitude of the MEMS resonator, the detection of the pressure of the vacuum cavity in the MEMS device is realized. In the case of constant excitation, the output voltage of the resonator is measured to indirectly obtain the amplitude of the output signal of the resonator in the vacuum package, and then the pressure in the cavity is converted according to the amplitude change, and the vacuum degree inside the cavity of the MEMS device is detected. ...

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Abstract

The invention provides a resonator-based vacuum degree detection method. The resonator-based vacuum degree detection method comprises the following steps: emitting an excitation signal; receiving the excitation signal and generating an output signal under the action of the excitation signal; converting the output signal into a digital signal; controlling and adjusting the excitation signal to enable the excitation signal to resonate with the inherent frequency of the resonator, and processing the digital signal to obtain a vibration amplitude corresponding to the real-time vacuum degree of the resonator; and processing the vibration amplitude into a real-time vacuum degree value and displaying the real-time vacuum degree value. The invention also provides a resonator-based vacuum degree detection system and a resonator-based vacuum degree detection device.

Description

technical field [0001] The present disclosure relates to the technical field of detection, and in particular to a resonator-based vacuum degree detection method, system and device. Background technique [0002] MEMS (MEMS, Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) generally refers to a system that is manufactured at the micron level by integrating various micro-processing technologies such as silicon micro-machining and precision machining, and is suitable for low-cost mass production. As the last process in the manufacturing of MEME devices, packaging can realize the connection and isolation with the outside on the one hand, and improve the performance of the chip on the other hand, such as chip life and reliability. In addition, only the packaged chip can become a product for practical application. Packaging plays an important role in the maturation and commercialization of MEMS devices. According to the different packaging materials used, packagi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/22
CPCG01L21/22
Inventor 陈德勇尉洁王军波鲁毓岚谢波
Owner AEROSPACE INFORMATION RES INST CAS
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