Pressure sensor

A sensor and pressure technology, applied in measuring fluid pressure, instruments, measuring fluid pressure through electromagnetic components, etc., can solve problems such as signal drift, diaphragm sensitivity reduction, cavity pressure and temperature dependence, etc.

Active Publication Date: 2014-03-12
希奥检测有限公司
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  • Claims
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Problems solved by technology

However, these methods are challenging to implement for several reasons
For example, if the gas pressure in the reference chamber is not stable, signal drift may occur, which may in turn require a high level of diaphragm hermeticity
Furthermore, while thin or large area diaphragms are desirable for flex and sensitivity, it is difficult to make thin diaphragms hermetic
Outgassing of layers in the reference cavity requires recalibration, and temperature dependence of cavity pres

Method used

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Embodiment Construction

[0024] Although the embodiments herein may be modified into various modifications and alternative forms, details thereof are shown as examples in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit the invention to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the scope of the invention including aspects defined by the claims. Furthermore, the use of the term "example" throughout this application is for the purpose of illustration and not limitation.

[0025] It is believed that aspects of the various embodiments may be applied to many different types of devices, systems, and structures involving pressure sensing. While the invention is not necessarily so limited, various aspects should be understood through a discussion of examples using context.

[0026] Various embodiments relate to diaphragm-based pressure senso...

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PUM

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Abstract

As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.

Description

technical field [0001] Various example embodiments relate to pressure sensing devices, circuits, and systems, and methods including implementations of these device circuits and systems. Background technique [0002] Various devices and systems in smart buildings, used for example in altitude measurement climate control in aviation, level sensing in white goods applications, alternative energy, nuclear power plants, automotive applications such as tire pressure monitoring, engine control and braking systems ) and medical applications (such as intraocular pressure and blood pressure sensing that require pressure sensors beyond mere on / off control). These systems typically employ sensors with precise and linear outputs to track changes in operation before they become critical. The single ON / OFF condition of the switching state means that it cannot be used in closed loop systems for trend monitoring. The rapid development of microprocessors and microprocessor-based systems has...

Claims

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Application Information

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IPC IPC(8): G01L9/00
CPCG01L9/0016G01L9/0042G01L9/0019G01L21/22
Inventor 威廉·贝什林皮特·斯蒂内肯奥拉夫·温尼克
Owner 希奥检测有限公司
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