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Internally-driven circular beam resonance micro-gyroscope of nickel electrode

A nickel electrode, micro-gyroscope technology, applied in the direction of speed measurement, gyroscope/steering induction equipment, measurement device, etc. with gyro effect, can solve the problems of hemispheric resonant gyroscope offset, inaccurate dynamic load connection, etc., to achieve structural stability , excellent performance, responsive effect

Active Publication Date: 2018-11-23
SHANGHAI JIAO TONG UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the rod part of the early rod structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run

Method used

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  • Internally-driven circular beam resonance micro-gyroscope of nickel electrode
  • Internally-driven circular beam resonance micro-gyroscope of nickel electrode
  • Internally-driven circular beam resonance micro-gyroscope of nickel electrode

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Embodiment Construction

[0048] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0049] The present invention provides a resonant micro-gyro driven circular beam within a nickel electrode mechanism, including a base 100, a resonator 102 and an electrode mechanism 104; the resonator 102 is arranged on the base 100; the electrode mechanism 104 is uniform along the circumferential direction distributed on the substrate 100.

[0050] The electrode mechanism 104 is in the shape of a segmented ring; the material of the electrode mechanism 104 is nickel. The segmented shape of the ring is...

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Abstract

The invention provides an internally-driven circular beam resonance micro-gyroscope of a nickel electrode mechanism. The internally-driven circular beam resonance micro-gyroscope of the nickel electrode mechanism comprises a substrate (100), a resonator (102) and an electrode mechanism (104). The substrate (100) is provided with a bulge 108. The resonator (102) is installed in the bulge 108. The electrode mechanism (104) is uniformly distributed on the substrate (100) along a circumferential direction. The electrode mechanism (104) is fan-shaped, and the electrode mechanism (104) is made of nickel. The internally-driven circular beam resonance micro-gyroscope of the nickel electrode adopts a circular beam resonance structure, and has high symmetry. The internally-driven circular beam resonance micro-gyroscope of the nickel electrode adopts an S-type flexible fixed beam, is relatively stable in structure, and shock-resistant, and has good performance. Relative to electrodes distributedon the outer circle of the circular beam resonator, the nickel electrode distributed on the inner edge of the circular beam resonator is capable of improving a Q value of the internally-driven circular beam resonance micro-gyroscope of the nickel electrode, thereby response is more sensitive.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a nickel electrode internally driven circular beam resonant micro gyroscope. Background technique [0002] Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and integrati...

Claims

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Application Information

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IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 张卫平谷留涛刘朝阳李敏阳田梦雅崔峰张钰莹成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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