Low-heat elastic damping two-end-fixed micro-beam resonator with through hole structure

Abstract

The invention relates to a low-heat elastic damping two-end-fixed micro-beam resonator with a through hole structure. The through hole structure can be an elongated rectangular through hole or a circular through hole. The device comprises a low-heat elastic damping micro beam with a through hole structure, two end fixing supports and an electrode for electrostatic excitation. The previous two end-fixing micro-beam (rectangular cross section) is of a solid structure, the thermal elastic damping peak of the solid structure is at a low frequency section, the damping peak corresponds to the maximum thermal elastic energy loss, which is completely detrimental to the micro-beam device operating in a low-frequency section. The physical principle of the low-heat elastic damping two-end-fixed micro-beam adopting a long and narrow rectangular through hole scheme provided by the invention is as follows: long and narrow rectangular holes are formed along the length direction; the number of the rectangular holes is at least two; due to hole opening, the thickness of the beam is thinned, and the thermal elastic damping peak is moved to a high-frequency section, so that the thermal elastic energyloss of the micro-beam is greatly lower than that of the original solid micro-beam device under the situation that the operation (vibration) frequency is not changed.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems (MEMS), in particular to a micro-beam resonator with a through-hole structure and a micro-beam resonator with low thermoelastic damping and fixed at both ends. Background technique [0002] The two-terminal fixed microbeam in bending vibration is the core part of many MEMS devices, such as microbeam resonators and filters. Fixed at both ends is the boundary condition of the beam, that is, the two ends of the micro-beam in the length direction are constrained and fixed without displacement. This type of microbeam is generally made of Si material, and usually requires a high quality factor, that is, requires a small damping. Thermoelastic damping (Thermoelastic damping, referred to as TED) is a very important damping of microbeam bending vibration. This damping is due to the compression and stretching of the mechanical structure under stress, resulting in a change in volume. The vol...

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Problems solved by technology

But in many cases, the operating frequency is difficult to change, only in the low frequency band

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