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Resonance-force balance capacitive three-axis acceleration sensor and manufacturing method

A technology of axial acceleration and sensors, which is applied in the direction of acceleration measurement, measurement acceleration, and multi-dimensional acceleration measurement using inertial force, can solve the problem of single detection method of three-axis acceleration, and achieve good linearity, low distortion error, and high measurement accuracy Effect

Inactive Publication Date: 2017-03-15
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] At present, the detection method of three-axis acceleration is relatively simple, and the three axial accelerations are mostly detected by the same principle.

Method used

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  • Resonance-force balance capacitive three-axis acceleration sensor and manufacturing method
  • Resonance-force balance capacitive three-axis acceleration sensor and manufacturing method
  • Resonance-force balance capacitive three-axis acceleration sensor and manufacturing method

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Embodiment

[0039] The technical scheme of the invention is used to manufacture a resonance-force balance capacitive triaxial acceleration sensor. Wherein, the X-axis and Y-axis acceleration signals are detected by a miniature double-end solid-supported beam resonator (4) that is electrothermally excited by polysilicon resistance and piezoresistively detected. Its production process is as follows:

[0040] 1) An N-type silicon wafer with a (100) plane and a resistivity of 0.1Ω.cm is used as the intermediate silicon wafer (1). (see attached image 3 [1])

[0041] 2) Thermal oxidation to produce a silicon dioxide film (14) with a thickness of 1 micron. (see attached image 3 [2])

[0042] 3) Depositing a polysilicon film (15) with a thickness of 1 micron by low-pressure chemical vapor deposition. (see attached image 3 [3])

[0043] 4) thermal oxidation, part of the polysilicon film (15) is oxidized to silicon dioxide (16), photolithography and etching processes are combined to make...

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Abstract

The invention discloses a resonance-force balance capacitance type three-axis acceleration transducer and a manufacture method thereof, belonging to the field of microelectro mechanical systems. The resonance-force balance capacitance type three-axis acceleration transducer is structurally characterized by comprising an intermediate silicon sheet (1), an upper cover plate (2) and a lower bottom plate (3), wherein the intermediate silicon sheet (1) comprises a dual-end clamped beam resonators (4), a mass block (6), a support beam (5), a movable electrode (7) and a frame (8). The resonance-force balance capacitance type three-axis acceleration transducer is characterized in that an X axis and a Y axis acceleration signals in a chip plane are detected by adopting the dual-end clamped beam resonator (4) on the aspect of detection principle, the change of the resonance frequency of the dual-end clamped beam resonator (4) reflects the size and the direction of acceleration; and a Z axis acceleration signal in a vertical chip plane is detected by adopting a capacitance type sensitivity principle, and works in a closed loop force balance working mode. The mass block (6) has little motion displacement in the normal of a chip, and the Z axis input acceleration signal has little chiasma interference caused by detection of X axis and Y axis accelerations.

Description

technical field [0001] The present invention relates to the working principle, structure and manufacturing method of a three-axis acceleration sensor, in particular to the working mechanism, structure and manufacturing method of a resonant-force balance capacitive three-axis acceleration sensor, belonging to Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems, MEMS) field. Background technique [0002] Miniature accelerometers are an important class of mechanical quantity sensors. As early as the end of the 1960s, people began to study one-dimensional micro-silicon acceleration sensors. The large-scale production of one-dimensional miniature acceleration sensors began in the late 1980s. In the 1990s, with the development of science and technology and the needs of the military and commercial markets, research on three-dimensional micro-acceleration sensors began to be used in military, automotive electronics, industrial automation, robotics, consumer electron...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125G01P15/18B81B3/00B81C1/00G01C19/5684
Inventor 韩建强
Owner CHINA JILIANG UNIV
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