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114 results about "Spatial light modulation" patented technology

Flow cytometer

This flow cytometer includes a flow path through which an observation object flows with a fluid; an optical illumination system including a spatial optical modulation device, and a first optical element; and an optical detection system including a first light detector, wherein the optical illumination system further includes a first spatial filter disposed in a first optical path between a light source and an image position of light imaged in the flow path by the first optical element and having a first region which hinders traveling of light emitted from the light source towards the observation object, the optical detection system further includes a second light detector disposed in a second optical path between the first light detector and the image position and having a second region which directs the light modulated by the observation object towards the first light detector, and the position of the first region and the position of the second region are in a substantially optically conjugate relationship.
Owner:THE UNIV OF TOKYO +1

Spatial light modulation targeting of therapeutic lasers for treatment of ophthalmological conditions

A therapeutic laser for use in treating ophthalmological conditions can be modulated by a spatial light modulation device in order to focus the therapeutic laser on a plurality of target locations simultaneously.
Owner:PULSEMEDICA CORP

Novel silicon-based liquid crystal spatial light modulator

The utility model relates to the field of laser processing, in particular to a novel silicon-based liquid crystal spatial light modulator, which is characterized by sequentially comprising a complementary metal oxide semiconductor (CMOS) silicon-based back plate (100), a central symmetry aluminum pixel electrode layer (101), a medium reflecting layer (102), a lower orientation layer (103), a liquid crystal molecular layer (104), an upper orientation layer (105), an indium tin oxide (ITO) electrode layer (106), a glass substrate (107) and an anti-reflecting layer (108) from bottom to top. According to the utility model, the reflectivity, the diffraction efficiency and the phase flatness of the silicon-based liquid crystal spatial light modulation device are improved, the electric field is uniformly distributed, the fringe field effect is reduced, the switching speed of phase modulation is effectively improved, the laser processing efficiency and quality are greatly improved, and more laser processing modes are realized. The technical scheme provided by the utility model can be applied to multiple fields of invisible cutting, laser marking, laser welding and the like.
Owner:JIANXIN OPTOELECTRONICS (SUZHOU) CO LTD

Controllable processing method for photoetching single crystal optical fiber multi-ring cladding based on femtosecond laser and multi-ring mask plate

The invention provides a controllable processing method for a photoetching single crystal optical fiber multi-ring cladding based on femtosecond laser and a multi-ring mask plate. The technical bottlenecks that in the prior art, the processing efficiency is low, the processing length is limited, and the structural precision is insufficient are effectively solved. The core of the method is that high-energy ultrashort pulse laser generated by a femtosecond laser is combined with a spatial light modulation technology of a programmable multi-ring mask plate to generate multi-layer femtosecond laser spots in specific annular distribution. Micron-scale focusing of multi-ring femtosecond laser beams can be achieved through a precisely-designed optical system, and precise spatial selective refractive index modulation is achieved on the cross section of the single-crystal optical fiber. Compared with a single-crystal optical fiber with a single-multi-ring annular cladding structure, the multi-ring annular cladding structure can further enhance the suppression capability of the multi-ring annular cladding structure on a high-order mode, realizes flexible regulation and control of a light wave transmission mode field, effectively reduces the influence of a multi-mode interference problem in the single-crystal optical fiber on the signal quality, and improves the signal quality. The stability of signal transmission and the quality of sensing signals are improved, and the application requirements of different scenes are met.
Owner:CHONGQING UNIV

Free space optical communication system based on structured optical frequency comb

The invention discloses a free space optical communication system based on a structured optical frequency comb, and belongs to the field of optical communication. Comprising an optical frequency comb generation system, a signal coding system, a spatial light modulation and demodulation system and a signal receiving system. The optical frequency comb generation system is used for modulating input continuous laser into an adjustable optical frequency comb with high repetition frequency, short pulse width and high power; the signal coding system is used for separating the light with different wavelengths in the optical frequency comb, independently coding the light with each wavelength, and finally combining the light with different wavelengths again; the spatial light modulation and demodulation system is used for coupling the Gaussian beam in the optical fiber into a free space and converting the Gaussian beam into structured light, demodulating the structured light after the structured light is transmitted to a receiving end and re-coupling the structured light back to the optical fiber; the signal receiving system is used for receiving and analyzing the optical signals. According to the invention, the optical frequency comb and the structured light are combined, and the problem that optical signals are easily influenced by atmospheric turbulence in free space optical communication can be effectively solved on the premise of ensuring large communication capacity.
Owner:HUAZHONG UNIV OF SCI & TECH

Light field display method and apparatus

The present disclosure provides a light field display method and device. The display method comprises: obtaining light field data; wherein the light field data comprises a plurality of viewpoint images; the viewpoint image comprises a pixel weight parameter; processing the viewpoint image by using an image processing model, determining a target pixel and a non-target pixel according to the processing result; and updating the value of the pixel weight parameter of the target pixel; and determining the calculation order of the light transmittance of each pixel point of each liquid crystal layer of a spatial light modulation array and the value of the light transmittance according to each viewpoint image and the value of the pixel weight parameter of each pixel after being processed by the image processing model. Such a method helps to improve the calculation efficiency and the picture quality of light field display.
Owner:BOE TECHNOLOGY GROUP CO LTD

Gray code coding rearrangement spatial light modulation method and system

The invention provides a spatial light modulation method and system for Gray code coding rearrangement, and relates to the technical field of computational imaging and spatial light modulation. According to the method, a Gray code sequence and a high-performance basic modulation matrix are combined, a basic modulation matrix is constructed according to a target image resolution ratio and a sampling rate, a Gray code index sequence with only one different adjacent indexes is generated, a measurement matrix is obtained by rearranging the matrix through a mapping function, and the measurement matrix is loaded to a spatial light modulator to code a light signal; and the double-path detector collects transmitted and reflected light intensity response and performs differential processing, and inputs a compressed sensing reconstruction algorithm to restore an image. According to the invention, stable and efficient information capture at a low sampling rate is realized, the anti-interference capability and repeatability of the system are improved, the hardware compatibility is strong, the implementation cost is low, and the method is suitable for the fields of single-pixel imaging, three-dimensional measurement and the like.
Owner:TIANFU JIANGXI LAB

Spatial light modulation unit and exposure device

The spatial light modulation unit includes a spatial light modulator including a modulation unit having a plurality of mirrors arranged two-dimensionally, a frame surrounding the modulation unit, and a substrate on which the modulation unit and the frame are mounted, and a cover positioned on a side of the spatial light modulator on which light enters the modulation unit. And a cover that is attached to the spatial light modulator and restricts light from entering the housing, the cover having an opening through which light enters the modulation unit.
Owner:NIKON CORP

Exposure method for solder resist ink

A method for exposing solder mask ink involves projecting a pattern from a spatial light modulator on an exposure lens through an imaging lens onto a substrate. The exposure lens and substrate move relative to each other in a scanning direction, creating a stripe-like pattern. Adjacent imaging areas in a direction perpendicular to the scanning direction overlap or have gaps between them. This method effectively addresses the issue of noticeable splicing marks.
Owner:YUANNENG ZHICHUANG (JIANGSU) SEMICON CO LTD

Spatial light modulation device, processing device, and position estimation method

In a spatial light modulation device 10, a detection unit 7 detects light modulated by a spatial light modulation unit 3. An estimation unit 35 estimates an incident position P2 of the light onto the spatial light modulation unit 3 on the basis of a detection result obtained by the detection unit 7. A phase pattern P1 set by a pattern setting unit 31 includes a phase pattern arranged to form a plurality of focused light spots on the detection unit 7 using the light modulated in the set phase pattern P1. The detection unit 7 detects intensity information of the focused light spots. The estimation unit 35 estimates the incident position P2 of the light onto the spatial light modulation unit 3 on the basis of a comparison result obtained from the intensity information of the plurality of focused light spots detected by the detection unit 7.
Owner:HAMAMATSU PHOTONICS KK

Laser projection equipment

The utility model relates to the field of projection display, and discloses laser projection equipment which comprises a light source, an illumination light path, a projection lens and an absorption device. The light source is used for emitting projection beams; the illumination light path comprises a spatial light modulator and a total reflection prism; the spatial light modulator is used for modulating an incident projection light beam and then emitting an image light beam and an invalid light beam; the absorption device is located on a light emitting path of the invalid light beam and comprises an optical lens group and a light absorption box; and the optical lens group is used for shrinking and shaping the invalid light beams and then emitting the invalid light beams into the light absorption box. The invalid light beams are guided into the light absorption box through the optical lens group for high-efficiency absorption, and the invalid light beams are prevented from entering the projection lens for imaging, so that the light energy of a black field picture in a projection picture is reduced, and the contrast ratio and the color layering sense of the projection picture are improved.
Owner:QINGDAO HISENSE LASER DISPLAY CO LTD

Transflective spatial light modulator with enhanced diffusion of light and method of manufacture of the same

Some implementations relate to a transflective spatial light modulator for enhancing the visual characteristics of a display device, making them paper-like, high resolution, and high brightness. The modulator may include a front surface configured to receive and modulate light from a primary source into visual information for display. The modulator may include a rear surface opposite the front surface and a stack of layers between the two surfaces. The stack of layers may include a polarizing layer, an anisotropic diffuser film, a liquid crystal layer, a thin film transistor element, and a layer of micro-reflective structure electrodes. The thin film transistor element may apply electricity to the liquid crystal layer to effectuate addressable spatial light modulation, solving intrinsic problems of transflective spatial light modulators. The combination of these elements results in a transflective spatial light modulator that is paper-like, high resolution, and high brightness.
Owner:DAYLIGHT COMPUTER CO

Waveguide device

A spatial light modulation (SLM) device includes one or more light inputs; one or more light outputs; a plurality of waveguides arranged in an array of receivers and / or transmitters, wherein each waveguide is coupled to one or more light inputs; and at least one light modulation element for modulating light passing through at least one of the plurality of waveguides. Wherein the waveguide and the light modulation element are integrated in at least one common module, and one of the light input or the light output is connected with a free space area occupied by a vacuum, gas, liquid and / or solid medium part.
Owner:OPTRIS GMBH

Gray code encoding rearranged spatial light modulation method and system

ActiveCN121770631BAvoid uneven collection problemsUniform and efficient captureElectromagnetic transmissionImage resolutionReconstruction algorithm
The application provides a spatial light modulation method and system of Gray code coding rearrangement, and relates to the technical field of computational imaging and spatial light modulation. The method combines a Gray code sequence and a high-performance basic modulation matrix, a basic modulation matrix is constructed according to a target image resolution and a sampling rate, a Gray code index sequence with only one different adjacent index is generated, a measurement matrix is obtained through a mapping function rearrangement matrix, the measurement matrix is loaded to a spatial light modulator to code light signals, a double-channel detector collects transmission and reflection light intensity responses and performs differential processing, and a compressed sensing reconstruction algorithm is input to recover an image. The application realizes stable and efficient information capture at a low sampling rate, improves the anti-interference ability and repeatability of the system, has strong hardware compatibility, low implementation cost, and is suitable for the fields of single-pixel imaging, three-dimensional measurement and the like.
Owner:TIANFU JIANGXI LAB

Nonlinear optical dyes with improved stability

The present invention primarily relates to a compound of formula (I) as defined herein and to a mixture comprising or consisting of one or more compound(s) of formula (I) as defined herein and optionally one or more host material(s). Moreover, the present invention relates to the compounds of formula (II) to (VIII) as defined herein and to further specific compounds as defined herein. The present invention also relates to an electro-optic film and an electro-optic modulator-device as defined herein and to a method for manufacturing an electro-optic modulator-device comprising or consisting of the steps as defined herein. Lastly, the present invention relates to the use of a compound of formula (I) or of a mixture as defined herein or of an electro-optic film as defined herein or of an electro-optic modulator-device as defined or as manufactured herein in a field selected from the group consisting of nonlinear optics, Mach-Zehnder modulators, silicon organic hybrid electro-optic modulators, materials for devices or arrangements for the control of the intensity, color, phase, polarization or direction of light arriving from an independent light source, preferably switching, gating, or modulating, photonic communication networks, optical data transmission, preferably in 6G applications, phased array radars, satellite and fiber telecommunications, cable television (CATV), optical gyroscopes for application in aerial and missile guidance, electronic counter measure (ECM) systems, backplane interconnects for high-speed computation, ultra-quick analog-to-digital conversion, land mine detection, radio frequency photonics, programmable photonics, cryo-communications, quantum computing, spatial light modulation, and all-optical (light-switching-light) signal processing.
Owner:SILORIX GMBH +1

Glass edge chamfer correction processing method

The invention relates to a glass edge chamfer correction processing method. The glass edge chamfer correction processing method comprises the steps of 101, pretreatment and protection, 102, measurement and laser profiling modification, 103, chemical etching and 104, laser splitting. According to the design provided by the invention, the three-dimensional shape of the modified area is actively controlled by utilizing the spatial light modulation technology, the glass side edge with the compensation inclination angle is generated, and finally, the chamfer shape meeting the design requirement is obtained through etching, so that the consistency of the product size is remarkably improved. The two key procedures of chamfering correction and splitting are organically integrated in one flow, the number of times of workpiece clamping, transferring and aligning is reduced, and the machining efficiency and the overall yield are improved.
Owner:BIEL OPTIC HUIZHOU +1

Multiplexing SLM to realize Fresnel incoherent correlation holographic super-resolution microscopy system and method

The present invention discloses a system and method for implementing Fresnel incoherent correlation holography super-resolution microscopy using a multiplexed SLM. The system comprises a microscope module, a polarization module, a spatial light modulation module, a holographic detection module, and an image processing module. The microscope module uses a light source to illuminate a sample and collects the sample light. The polarization module includes a lens and a polarization unit to generate polarized sample light. The spatial light modulation module includes a spatial light modulator and a conversion unit to input the second modulated sample light into the holographic detection module. The holographic detection module includes a second quarter-wave plate, an imaging lens unit, and a polarization camera. The image processing module acquires and processes the polarized image set to produce a reconstructed image. This method maintains the integrity of the zone plate pattern, solves the problems of random errors and reduced image quality in existing Fresnel incoherent correlation holography technology, and improves the flexibility of the system.
Owner:ZJU HANGZHOU GLOBAL SCI & TECH INNOVATION CENT

A Polarization Interference Lithography Method and System for Three-Dimensional Micro-Nano Structures

The present invention belongs to the technical field of micro-nano structure processing, and relates to a polarization interference lithography method and system for three-dimensional micro-nano structures. An amplitude spatial light modulation element is used to modulate the amplitude of the incident light field to obtain an amplitude-modulated light field; a crystal holographic optical element is used to modulate the amplitude-modulated light field to obtain a first transmitted light field; a holographic optical element is used to modulate the first transmitted light field to obtain a second transmitted light field on the Fourier spectrum plane; a first Fourier transform lens is used to perform Fourier transforms on the amplitude-modulated light field, the first transmitted light field, and the second transmitted light field to obtain a Fourier-transformed light field; a second Fourier transform lens is used to perform a Fourier transform on the Fourier-transformed light field to obtain an interference light field with adjustable light intensity and phase on the imaging plane; the light intensity and phase of the interference light field are adjusted so that the distribution of the interference light field matches a preset three-dimensional micro-nano structure, thereby preparing the preset three-dimensional micro-nano structure. This solution can prepare three-dimensional micro-nano structures with high precision and small line widths.
Owner:SUZHOU UNIV

High-speed light beam scanning device based on two-dimensional dynamic adjustable metasurface

The invention discloses a high-speed light beam scanning device based on a two-dimensional dynamic adjustable metasurface. The unit structure of the device is composed of a bottom metal electrode backboard, a P-type semiconductor, an insulating medium, an ITO film and a gold metasurface. The working wavelength of the unit structure is determined by F-P resonance, and the carrier concentration at the interface of the P-type semiconductor, the ITO thin film and the insulating medium can be changed through a field effect by applying voltage to the two ends, so that the dielectric constant at the interface is changed to enter an ENZ region, and the reflectivity and phase mutation at the working wavelength are changed. The two-dimensional pixelated spatial light modulator is realized by spatially pixelating the bottom metal electrode back plate, and two-dimensional high-speed spatial light modulation can be realized by applying gradient voltage to each unit structure to generate different gradient phases. The invention provides a design method of an electrically tunable metasurface spatial light modulator capable of realizing high-speed light beam scanning.
Owner:ZHEJIANG UNIV

Exposure apparatus, device manufacturing method, and control method

The exposure apparatus includes: a plurality of modules including a spatial light modulation element including a plurality of micromirrors driven to switch between an ON state and an OFF state based on drawing data, an illumination unit that irradiates illumination light to the spatial light modulation element, and a projection unit that projects the illumination light to the spatial light modulation element; the projection unit takes reflected light from the micro-mirror in the open state in the spatial light modulation element as an imaging light beam to be incident to a substrate; a control unit for storing correction information for correcting the state of the imaging beam for each of the modules; and an adjustment mechanism that adjusts, for each of the modules, a position or an angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, based on the correction information.
Owner:NIKON CORP

Spatial light modulation method and device for quantum random number coding, equipment and medium

The invention discloses a spatial light modulation method and device for quantum random number coding, equipment and a medium, relates to the technical field of spatial light modulation, and realizes seamless adaptation of quantum random coding and spatial light modulator hardware by converting a quantum random coding matrix corresponding to a target coding base into a driving signal adaptive to a spatial light modulator. It is ensured that the driving signal can accurately control the spatial light modulator to carry out random code modulation on the incident spatial light. The method comprises the steps that a quantum random number generator is adopted as an entropy source, verification screening operation is executed on an original quantum random number sequence output by the quantum random number generator, and an effective quantum random number sequence is obtained; entropy extraction operation is executed on the effective quantum random number sequence according to the set sampling number, and a target coding base is constructed; and converting the quantum random coding matrix corresponding to the target coding base into a driving signal adaptive to a spatial light modulator, so as to control the spatial light modulator to carry out random coding modulation on the incident spatial light through the driving signal to obtain modulated light.
Owner:TIANFU JIANGXI LAB

flow cytometer

The present flow cytometer includes a flow path in which a subject flows with a fluid, an optical illumination system including a spatial light modulation device and a first optical element, and an optical detection system including a first light detector, wherein the optical illumination system further includes a first spatial filter disposed in a first optical path between a light source and an image location of light imaged through the first optical element in the flow path and having a first region that obstructs propagation of light emitted from the light source toward the subject, the optical detection system further includes a second spatial filter disposed in a second optical path between the first light detector and the image location and having a second region that directs light modulated by the subject toward the first light detector, and a location of the first region and a location of the second region are in a substantially optically conjugate relationship.
Owner:HIKAKE SHO CO LTD +1

A head-up display module and a vehicle

An embodiment of the present invention discloses a head-up display module and a vehicle. The head-up display module includes: an image generation unit for emitting image light; a beam expander unit located on the propagation path of the image light for expanding the image light to form expanded light; a transmissive-reflective unit for reflecting the expanded light to a spatial light modulation unit to form modulated image light and then transmitting the modulated image light to an image amplification unit. The image amplification unit is used for amplifying the modulated image light to form amplified modulated image light; a reflection unit is located on the propagation path of the amplified modulated image light, reflecting the reflected amplified modulated image light to the imaging unit of the vehicle so that the amplified modulated image light is reflected by the imaging unit in the imaging area of the imaging unit and then incident on the eyebox area. Using a laser light source to emit light can improve the light utilization rate. After the modulated image light is amplified by the image amplification unit and then reflected to the human eye, the human eye can see a virtual image of appropriate size.
Owner:HANGZHOU FERVCLOUD TECHNOLOGY CO LTD

Liquid crystal element and spatial light modulation device

PCT designated stageWO2026058679A1Non-linear opticsWavelength rangeMaterials science
A liquid crystal element according to an embodiment of the present disclosure comprises a first substrate having a first electrode provided to each of a plurality of pixels, a second substrate having a second electrode provided so as to face the first electrode, a liquid crystal layer provided between the first substrate and the second substrate, and an optical layer provided between the first substrate and the second substrate and having a first region and a second region. The first region has a first structure having a columnar shape. The optical layer can modulate light in a first wavelength region incident on the first region, and can modulate light in a second wavelength region incident on the second region.
Owner:SONY GROUP CORP

Nonlinear optical neural network system and nonlinear optical calculation method

The invention provides a nonlinear optical neural network system and a nonlinear optical calculation method, and the system comprises an optical feedback structure which is used for forming a circulating light path so as to enable a light beam to be circularly transmitted in the system; the input coupling assembly and the output coupling assembly are respectively used for coupling an input light beam to the circulating light path and coupling a part of light beam from the circulating light path as an output light beam; the spatial light modulation device is used for regulating and controlling at least one of the amplitude and the phase of the light beam input by the spatial light modulation device; the diffraction regulation and control assembly is used for executing multi-layer diffraction operation and regulation and control on the light beams input by the diffraction regulation and control assembly; wherein the spatial light modulation device and the diffraction regulation and control assembly are both arranged in the circulation light path, and the configuration mode of the spatial light modulation device and the diffraction regulation and control assembly enables a light beam to sequentially pass through the spatial light modulation device and the diffraction regulation and control assembly in each circulation, and the light beam reaches the output coupling assembly after passing through the diffraction regulation and control assembly.
Owner:ZHEJIANG LAB

Personalized aberration correction femtosecond laser refractive surgery system and method based on spatial light modulation

The invention discloses a personalized aberration correction femtosecond laser refractive surgery system and method based on spatial light modulation, and relates to the technical field of ophthalmology medical equipment.The system comprises a femtosecond laser refractive surgery system body, a control module and a light modulation module; the control module is used for acquiring personalized aberration data to be corrected of the target eye and generating a laser energy spatial distribution model according to the personalized aberration data to be corrected of the target eye; and during light modulation, the light modulation module is connected with the control module and is used for carrying out spatial intensity modulation on a laser beam output by a femtosecond laser source of the femtosecond laser refractive surgery system body according to the laser energy spatial distribution model, and the modulated beam is incident to a target eye. The technical defect that the personalized high-order aberration of the patient cannot be effectively corrected by the existing femtosecond laser refractive lens extraction method can be solved.
Owner:NANKAI UNIV

Imaging control system, method, image sensor, processor, storage medium, and program product

PendingCN121815108AEngineeringTesting Methods
The invention relates to an imaging control system and method, an image sensor, a processor, a computer readable storage medium and a computer program product. The imaging control system includes an image sensor and a processor. The image sensor comprises a pixel array with a plurality of pixel points and a spatial light modulation array with a plurality of light modulation units. The spatial light modulation array is located on the light sensing side of the pixel array, and the light modulation unit corresponds to at least one pixel. The processor is configured to independently adjust control parameters of the light modulation units in the spatial light modulation array, so that the adjusted light modulation units attenuate polarized light in incident light.
Owner:BLACK SESAME TECH (SHANGHAI) CO LTD

Non-contact distance measuring device

The non-contact distance measuring machine (1) that illuminates the measuring light from the interferometer (30) to the side from the front end of the probe (20) comprises: a cylindrical light generating unit (21) that converts the measuring light from the interferometer (30) into cylindrical light; an optical element group that makes the cylindrical light from the cylindrical light generating unit (21) light along the extension axis (E) of the probe (20); a planar light generating unit (24) that converts the light along the extension axis (E) into light radiating outward from the extension axis (E), and converts the light reflected from the surface of the object to be measured (W) and returning inward from the extension axis (E) into light along the extension axis (E); an orientation detection unit (28) that detects the orientation that becomes the maximum intensity in the light returning to the planar light generating unit (24); and a spatial light modulation unit (25) that limits the light returning to the planar light generating unit (24) to the orientation detected by the orientation detection unit (28).
Owner:MITUTOYO CORP

High-speed spatial light modulation and quantum control

An atom control architecture based on VIS-IR photonic integrated circuit (PIC) technology is characterized by (1) visible (VIS) and near-infrared (IR) wavelength operation, (2) channel counts extensible beyond 1000s of individually addressable atoms, (3) high intensity modulation extinction and (4) repeatability compatible with low gate errors, and (5) fast switching times. A 16-channel SiN-based APIC with (5.8±0.4) ns response times and <−30 dB extinction ratio at a wavelength of 780 nm. Based on a complementary metal-oxide-semiconductor (CMOS) fabrication process, this atom-control PIC (APIC) technology can be used for atomic, molecular, and optical physics and emerging applications, from quantum computers with cold atoms or ions to quantum networks with solid-state color centers. This APIC technology is especially suitable for scalable quantum information processing based on optically programmable atomic systems.
Owner:MASSACHUSETTS INST OF TECH

Pattern exposure device and device manufacturing method

An exposure device includes: a spatial light modulation element including micromirrors; an illumination unit that irradiates the spatial light modulation element with first light with a peak wavelength λ1 and second light with a peak wavelength λ2 (λ2≈λ1), so that the first light is diffracted by ON-state micromirrors of the spatial light modulation element as first diffraction light and the second light is diffracted by the ON-state micromirror as second diffraction light; and a projection unit, wherein the first diffraction light and the second diffraction light enter the projection unit, so that the first diffraction light and the second diffraction light are distributed with an optical axis of the projection unit interposed therebetween.
Owner:NIKON CORP