The invention discloses a self-adaptive product
layout probe testing device, and relates to the field of probe testing, the self-adaptive product
layout probe testing device comprises a base, a
workbench and a
wafer bearing table, the top of the
workbench is symmetrically provided with probe carrying assemblies on the
wafer bearing table, and the probe carrying assemblies can be adjusted in multiple directions. A probe carrying
assembly is arranged on the
workbench, an
edge detector three-dimensional seat is connected to the output end of the probe carrying
assembly, a probe body is borne on the
edge detector three-dimensional seat, a visual moving
assembly is arranged on the workbench, a
visual detection module body is connected to the visual moving assembly, and a
wafer bearing table moving assembly is arranged at the top of the workbench. The
test requirements of line loops with different sizes in a product
layout can be met by adjusting the probes through the single-side double probes, and the probes are matched with the Z-axis precision
fine tuning table through the X-axis probe
linear motor and the Y-axis probe
linear motor, so that the test of different product layouts is met, and the overall compatibility is improved.