Substrate floating device

Abstract

The present invention provides a substrate floatation device that can prevent collision with a substrate in transport and can uniformly form pressure of a fluid applied to a lower surface of a floated substrate. To this end, the present invention discloses the following features, including: a main body that fills an internal space thereof with a fluid flowing in through a lower flow inlet; a floatation plate disposed at an upper portion of the internal space and having a plurality of ejection holes that pass the fluid filled into the internal space and float a substrate placed on an upper side using ejection pressure of the ejected fluid; and a flow guide member disposed in the internal space to disperse the fluid flowing into the internal space through the lower flow inlet and to make ejection pressure of the fluid ejected from the plurality of ejection holes uniform.

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus, and more particularly, to a substrate levitation device that can prevent collision with a substrate in transit and can uniformly generate fluid pressure applied to the lower surface of a levitation substrate. Background Technology

[0002] The substrate used in the display device is placed on a conveyor including rollers and moves or circulates inside the cavity while undergoing multiple processing steps such as evaporation, baking, exposure, development, and etching.

[0003] A substrate transport device with rollers transports the substrate by friction while the rollers are in direct contact with the substrate. Due to the spacing between the rollers or the weight of the substrate, the substrate will sag relative to the rollers or at the edge of the substrate, and will rise relative to the rollers.

[0004] When a portion of the substrate being transported droops, it may collide with the rollers or the support frame of the transport device, thereby damaging the substrate. Furthermore, when a portion of the transported substrate rises, the impact pressure with the cleaning or etching solution sprayed during the cleaning or etching steps may deviate, also damaging the substrate.

[0005] To address this problem, a so-called non-contact substrate transport device has been proposed, which involves jetting high-pressure fluid onto the lower surface of a substrate and transporting it while the substrate is floating.

[0006] Figure 1 This is a schematic diagram illustrating an existing substrate floating device.

[0007] Reference Figure 1 The existing substrate levitation device 10 includes a jet chamber 12, which has a porous levitation plate 13 disposed on the lower side of the substrate. That is, fluid supplied from an external fluid supply unit fills the interior of the jet chamber 12 through the lower inlet 11. The fluid filling the jet chamber 12 is ejected at a relatively high pressure while passing through the fine holes 14 of the porous levitation plate 13. The substrate can be levied to the upper side of the porous levitation plate 13 by utilizing the ejection pressure of this fluid.

[0008] However, in this existing substrate levitation device, fluid is ejected through the fine holes 14 of the levitation plate 13 before the fluid has completely filled the interior of the ejection chamber 12 through the lower inlet 11. Consequently, the ejection pressure distribution (PR) on the entire lower surface of the substrate may become uneven during the ejection of fluid from the fine holes 14 of the levitation plate 13. That is, a relatively strong ejection pressure is generated in the central region of the levitation plate 13 adjacent to the lower inlet 11, and a relatively weak ejection pressure is generated in the edge region of the levitation plate 13 separated from the lower inlet 11.

[0009] Thus, when the jet pressure of the fluid through the micro-holes 14 of the floating plate 13 is unevenly distributed across the entire lower surface of the substrate, the level of the transported substrate will deviate, resulting in a deviation in the collision pressure with the substrate transport device or with the cleaning or etching solution, which may damage the substrate.

[0010] Especially recently, the demand for larger area substrates has increased, and in the case of such large area substrates, the deviation in the distribution of fluid jet pressure across the entire lower surface of the substrate will be greater due to the reasons mentioned above.

[0011] In addition, by ensuring a relatively wide internal space for the injection chamber 12 filled with fluid, the injection pressure of the fluid ejected from the micro-holes 14 of the levitation plate 13 can be made somewhat uniform. However, in this case, there is a problem that a relatively large amount of fluid must be supplied in order to make the substrate float, and there is a problem that the internal space of the injection chamber 12 must be further processed and manufactured.

[0012] As prior art, there is Korean Patent Registration Publication No. 0525926 (published on November 2, 2005). Summary of the Invention

[0013] The technical problem that the invention aims to solve

[0014] The purpose of this invention to solve the above problems is to provide a substrate levitation device that can form a uniform fluid jet pressure on the entire lower surface of a levitation substrate.

[0015] The problems to be solved by the present invention are not limited to the above-mentioned technical problems. Those skilled in the art can clearly understand other technical problems not mentioned in the following description.

[0016] means for solving problems

[0017] The substrate levitation device according to an embodiment of the present invention for solving the above-mentioned problems is characterized by comprising: a main body having an internal space filled with fluid flowing in through a lower inlet; a levitation plate disposed on the upper part of the internal space having a plurality of injection holes for allowing the fluid filling the internal space to pass through and for levitizing a substrate placed on the upper side by means of the injection pressure of the injection fluid; and a first flow guiding member disposed in the internal space for dispersing the fluid flowing into the internal space through the lower inlet and for making the injection pressure of the fluid injected from the plurality of injection holes uniform.

[0018] In the substrate levitation device according to this embodiment, the first flow guiding component may include: a first component extending in the internal space along a first direction and separately configured along a second direction intersecting the first direction to disperse fluid moving toward the levitation plate in the second direction; a second component extending in the internal space along the second direction and separately configured along the first direction intersecting the second direction to disperse fluid moving toward the levitation plate in the first direction; and a plurality of first flow paths connecting a first lower surface toward the lower inlet and a first upper surface toward the levitation plate, and having a size smaller than the diameter of the injection hole.

[0019] The substrate floating device according to this embodiment may further include a second flow guiding member disposed above the first flow guiding member. In this case, the first flow guiding member and the second flow guiding member are staggered from each other when viewed from above, and at least a portion of the first flow path can be blocked by the second flow guiding member.

[0020] In the substrate floating device according to this embodiment, the lower inlet can be disposed in the bottom central region of the internal space, and the first flow guiding member can have a central region facing the lower inlet and an edge region separated from the central region. In this case, the cross-sectional area of ​​the first flow path can gradually increase from the central region toward the edge region.

[0021] The substrate floating device according to this embodiment may further include: a static removal unit having a discharge electrode disposed on the lower inlet and a power supply unit for supplying power to the discharge electrode, inducing corona discharge caused by the ionization of fluid passing through the lower inlet, and eliminating static electricity on the substrate in contact with the fluid ejected from the jet hole.

[0022] In the substrate floating device according to this embodiment, the first flow guiding member may be made of a non-conductive material. In this case, it may further include: a second flow guiding member disposed below the first flow guiding member and made of a conductive material; a third flow guiding member disposed above the first flow guiding member and made of a conductive material; and an electrostatic removal unit having a power supply section that supplies power of different polarities to the second flow guiding member and the third flow guiding member to induce corona discharge caused by the ionization of the fluid flowing into the internal space and to eliminate static electricity on the substrate in contact with the fluid ejected from the injection hole.

[0023] The effects of the invention

[0024] According to the present invention, fluid flowing into the internal space of the main body through the lower inlet can be dispersed and uniformly filled into the entire internal space of the main body by a flow guiding component before passing through the injection holes of the floating plate, and then uniformly injected through all the injection holes of the floating plate. Therefore, the injection pressure of the fluid injected from all the injection holes of the floating plate can be made uniform, thereby ensuring the positional stability of the floating substrate.

[0025] According to the present invention, it is not necessary to ensure a large internal space for the main body; only sufficient space is needed to house the flow guiding components. Therefore, additional processing work on the internal space of the main body can be eliminated or minimized. Furthermore, the consumption of fluid used for substrate levitation can be reduced.

[0026] According to the present invention, foreign matter contained in the fluid can also be filtered by a flow guiding member having a flow path with a diameter smaller than that of the jet hole of the floating plate, which can prevent the jet hole from being blocked by foreign matter and can also prevent damage to the substrate caused by foreign matter.

[0027] The effects of the present invention are not limited to those described above, but should be understood to include all effects that can be inferred from the structure of the present invention as described in the detailed description or claims. Attached Figure Description

[0028] Figure 1 This is a cross-sectional schematic diagram of an existing substrate floating device.

[0029] Figure 2 This is a cross-sectional schematic diagram of a substrate floating device according to a first embodiment of the present invention.

[0030] Figure 3 This is a diagram illustrating a substrate levitation device according to a second embodiment of the present invention, and a partial schematic diagram illustrating a portion of a flow guiding member according to another embodiment.

[0031] Figure 4 This is a cross-sectional schematic diagram of a substrate floating device according to a third embodiment of the present invention.

[0032] Figure 5 This is a cross-sectional schematic diagram of a substrate floating device according to a fourth embodiment of the present invention.

[0033] Figure 6 This is a cross-sectional schematic diagram of a substrate floating device according to a fifth embodiment of the present invention.

[0034] Explanation of reference numerals in the attached figures

[0035] 110: Main body; 130: Floating plate

[0036] 131: Injection hole; 150: First flow guide component Detailed Implementation

[0037] Hereinafter, preferred embodiments of the present invention that can specifically achieve the problems to be solved described above will be described with reference to the accompanying drawings. In describing these embodiments, the same names and reference numerals may be used for the same structures, and additional descriptions thereof may be omitted.

[0038] Figure 2 This is a cross-sectional schematic diagram of a substrate floating device according to a first embodiment of the present invention.

[0039] Reference Figure 2 The substrate floating device according to this embodiment may include a main body 110, a floating plate 130 and a first flow guiding component 150.

[0040] The upper side of the main body 110 is open, and the lower side has a lower inlet 111. It can also have an internal space 112 inside, which is filled with fluid flowing in through the lower inlet 111. That is, fluid pressurized by an external supply unit (not shown) can fill the internal space 112 through the lower inlet 111.

[0041] The internal space 112 of the main body 110 may have a planar area corresponding to the size of the substrate being transported, and may have a first height h1.

[0042] As the fluid used to levitate the substrate, either a gas or a liquid can be used. For example, CDA (Compressed Dry Air), DIW (De-Ionized Water), and UPW (UltraPure Water) can be used. Alternatively, a mixture of gas and liquid can be used, and in the case of a gas-liquid mixture, the gas can contain carbon dioxide. For example, using DIW can provide a substrate cleaning effect, and using DIW containing carbon dioxide can further enhance the substrate cleaning effect through electrostatic and bubble effects.

[0043] The floating plate 130 can be disposed on the upper part of the interior space 112. At this time, the edge of the floating plate 130 can be attached to the upper edge of the main body 110 and supported.

[0044] The levitation plate 130 may have multiple injection holes 131. The multiple injection holes 131 may have the same diameter and may be arranged at certain intervals relative to the entire plane of the levitation plate 130.

[0045] The injection hole 131 allows fluid filling the internal space 112 of the body 110 to pass through and be ejected upwards, and the injection pressure of the ejected fluid can be used to levitate the substrate placed on the upper side.

[0046] The first flow guide component 150 can be configured in the internal space 112 to disperse the fluid flowing into the internal space 112 through the lower inlet 111, and to make the injection pressure of the fluid ejected from the multiple injection holes 131 uniform.

[0047] The first flow guiding member 150 may have a planar area corresponding to the planar dimensions of the internal space 112, and may have a second height h2. The second height h2 may be equal to or less than the first height h1, preferably, the second height h2 may be less than the first height h1. That is, a partition space that allows fluid to flow freely may be provided between the first flow guiding member 150 and the floating plate 130, so that the first flow guiding member 150 does not become an obstruction as the fluid flows into the injection hole 131 side.

[0048] The first flow guiding component 150 according to this embodiment may include a first component 151, a second component 152, and a first flow path 153.

[0049] The first component 151 can extend in the internal space 112 along a first direction D1 and can be separately configured along a second direction D2 intersecting the first direction D1. Thus, the first component 151 can disperse fluid moving toward the buoyancy plate 130 toward the second direction D2 (see reference). Figure 3 (a) in the middle.

[0050] Furthermore, the first component 151 may have a first width w1 and may be configured separately from the second direction D2 by a first interval d1.

[0051] The second component 152 can extend in the internal space 112 along the second direction D2 and can be separately configured along a first direction D1 intersecting the second direction D2. Thus, the second component 152 can disperse fluid moving toward the buoyancy plate 130 toward the first direction D1 (see reference). Figure 3 (a) in the middle.

[0052] Furthermore, the second component 152 may have a second width w2 and may be configured separately from the first direction D1 by a second interval d2.

[0053] The first flow path 153 can connect the first lower surface facing the lower inlet 111 and the first upper surface facing the floating plate 130. Therefore, fluid flowing in from the lower inlet 111 can move to the upper side of the first flow guide member 150 through the first flow path 153.

[0054] In addition, multiple first flow paths 153 can be provided, and the first flow paths 153 can be arranged at certain intervals relative to the entire plane of the first flow guide member 150.

[0055] Furthermore, the first flow path 153 may have a size smaller than the diameter of the injection hole 131.

[0056] In addition, the size of the first flow path 153 can be adjusted by adjusting the first width w1, the first interval d1, the second width w2, and the second interval d2.

[0057] The fluid flowing into the interior space 112 through the lower inlet 111 via this first flow guide 150 can generate resistance as it passes through the first flow path 153, which is smaller than the diameter of the injection hole 131. Due to this resistance, the fluid can be uniformly filled into the entire interior space 112 where the first flow guide 150 is located before being ejected through the injection hole 131.

[0058] Furthermore, when the size of the first flow path 153 is smaller than the diameter of the injection hole 131, foreign matter contained in the fluid can be filtered out, thus the first flow guiding member 150 can also function as a filter. This prevents clogging of the injection hole 131 and also prevents damage to the substrate caused by contact with foreign matter.

[0059] In this way, the fluid flowing into the internal space 112 of the main body 110 through the lower inlet 111 can be smoothly dispersed to the edge region of the internal space 112 of the main body 110 through the first flow path 153 of the first flow guide member 150, and uniformly filled into the entire internal space 112. Then, it can be uniformly sprayed through all the spray holes 131 of the floating plate 130. That is, the spray pressure distribution (PR) of the fluid sprayed from all the spray holes 131 provided on the floating plate 130 can be made uniform, thereby ensuring the positional stability of the floating substrate.

[0060] Furthermore, since the internal space 112 of the main body 110 only needs to provide enough space to house the first flow guide member 150, additional processing work to ensure the internal space 112 of the main body 110 can be eliminated or minimized.

[0061] Furthermore, even if the size of the internal space 112 of the main body 110 is set relatively small, the fluid can be uniformly sprayed through all the spray holes 131 of the floating plate 130 due to the fluid dispersion effect of the first flow guiding member 150, thereby reducing the amount of fluid consumed for substrate floating.

[0062] As the first flow guiding component 150 according to this embodiment, a mesh can be used.

[0063] That is, the first flow guiding component 150 includes a plurality of first components 151 extending along a first direction D1 and separately arranged along a second direction D2 in the internal space 112, and a plurality of second components 152 extending along the second direction D2 and separately arranged along the first direction D1 in the internal space 112. By winding the first components 151 and the second components 152 together to intersect each other, a mesh with a first flow path 153 can be manufactured.

[0064] Figure 3 This is a diagram illustrating a substrate levitation device according to a second embodiment of the present invention, and a partial schematic diagram illustrating a portion of a flow guiding member according to another embodiment. Figure 3 (a) is a top view showing a portion of the first flow guide component. Figure 3 (b) is a top view showing a portion of the second flow guide component.

[0065] Refer to Figure 3 The substrate floating device according to this embodiment may further include a second flow guiding component 250.

[0066] The second flow guide component 250 may be disposed above the first flow guide component 150 and may include a third component 251, a fourth component 252 and a second flow path 253.

[0067] The third component 251 can extend in the internal space 112 along the first direction D1 and can be separately configured along the second direction D2 intersecting the first direction D1. Thus, the third component 251 can disperse the fluid moving toward the buoyancy plate 130 toward the second direction D2.

[0068] Furthermore, the third component 251 may have a third width and may be configured separately from the second direction D2 by a third interval.

[0069] The fourth component 252 can extend in the internal space 112 along the second direction D2 and can be separately configured along the first direction D1 intersecting the second direction D2. Thus, the fourth component 252 can disperse the fluid moving toward the buoyancy plate 130 toward the first direction D1.

[0070] Furthermore, the fourth component 252 may have a fourth width and may be configured to be separated from the first direction D1 by a fourth interval.

[0071] The second flow path 253 can connect the second lower surface of the first upper surface facing the first flow guide member 150 and the second upper surface facing the floating plate 130. Therefore, the fluid passing through the first flow guide member 150 can move to the upper side of the second flow guide member 250 while passing through the second flow path 253 again.

[0072] In addition, multiple second flow paths 253 can be provided, and the second flow paths 253 can be arranged at certain intervals relative to the entire plane of the second flow guide member 250.

[0073] In addition, the second flow path 253 may also have a smaller diameter than the injection hole 131.

[0074] In addition, the size of the second flow path 253 can also be adjusted by adjusting the third width, the third interval, the fourth width, and the fourth interval.

[0075] On the other hand, when the first flow guide member 150 and the second flow guide member 250 are stacked in this configuration, the first flow guide member 150 and the second flow guide member 250 can be staggered from each other when viewed from above. Thus, at least a portion of the first flow path 153 can be blocked by the third member 251 or the fourth member 252 of the second flow guide member 250.

[0076] Thus, the fluid flowing into the internal space 112 of the main body 110 through the lower inlet 111 is first dispersed and uniformly filled in the lower region of the internal space 112 while passing through the first flow path 153 of the first flow guide member 150. Then, it is dispersed again and uniformly filled in the upper region of the internal space 112 while passing through the second flow path 253 of the second flow guide member 250. In this way, the fluid that is uniformly filled into the internal space 112 of the main body 110 by the first flow guide member 150 and the second flow guide member 250 can then be uniformly sprayed through all the spray holes 131 of the float plate 130.

[0077] Figure 4 This is a cross-sectional schematic diagram of a substrate floating device according to a third embodiment of the present invention.

[0078] Reference Figure 4 According to this embodiment, the lower inlet 111 can be configured in the bottom central region of the internal space 112 of the main body 110. At this time, the first flow guide member 450 according to this embodiment can have a central region 450A facing the lower inlet 111 and an edge region 450B separated from the central region 450A.

[0079] Here, the cross-sectional area of ​​the first flow path of the first flow guide member 450 according to this embodiment can be formed to gradually increase from the central region 450A toward the edge region.

[0080] Thus, because the cross-sectional area of ​​the first flow path in the central region 450A of the first flow guide component is made relatively small, the fluid flowing into the internal space 112 through the lower inlet 111 will generate relatively large resistance during the process of passing through the first flow path. This resistance can be used to further improve the dispersion effect of the fluid toward the edge region 450B. As a result, fluid with uniform pressure can be quickly filled into the entire central region 450A and edge region 450B of the first flow guide component 450.

[0081] Figure 5 This is a cross-sectional schematic diagram of a substrate floating device according to a fourth embodiment of the present invention.

[0082] Reference Figure 5 The substrate floating device according to this embodiment may further include a power removal unit 170.

[0083] The static electricity removal unit 170 is a unit that eliminates static electricity present on the substrate, and may include a discharge electrode 171 and a power supply unit 172.

[0084] Specifically, the discharge electrode 171 can be disposed on the lower inlet 111, and the power supply unit 172 can supply power to the discharge electrode 171.

[0085] That is, when a voltage is applied to the discharge electrode 171 and a magnetic field is generated around the discharge electrode 171, fluid molecules passing through the lower inlet 111 can be ionized to induce corona discharge. This eliminates static electricity present on the substrate in contact with the fluid ejected through the jet hole 131. As a result, the present invention can effectively eliminate static electricity present on the substrate during both suspension and transport. The discharge electrode 171 may include an anode and a cathode.

[0086] Furthermore, the present invention is not limited thereto; the anode of the discharge electrode may be disposed on the lower inlet 111, and the first flow guiding member 150 made of conductive material may be used as the cathode of the discharge electrode.

[0087] Figure 6 This is a cross-sectional schematic diagram of a substrate floating device according to a fifth embodiment of the present invention.

[0088] Reference Figure 6 According to this embodiment, the substrate levitation device proposes a static removal unit 270 according to another embodiment for eliminating static electricity present on the substrate.

[0089] Specifically, firstly, the first flow guiding member 150 according to this embodiment can be made of a non-conductive material. The remaining structure of this first flow guiding member 150 can be arranged in the same way as the first flow guiding member 150 described above.

[0090] Furthermore, according to this embodiment, a second flow guiding member 250 may be included, disposed below the first flow guiding member 150. In this case, the second flow guiding member 250 may be made of a conductive material. The remaining structure of this second flow guiding member 250 may be configured similarly to that of the first flow guiding member 150.

[0091] Furthermore, according to this embodiment, a third flow guiding member 350 may be included, disposed above the first flow guiding member 150. In this case, the third flow guiding member 350 may be made of a conductive material. The remaining structure of this third flow guiding member 350 may be configured similarly to that of the first flow guiding member 150.

[0092] Therefore, voltage can be applied to the second flow guide member 250 and the third flow guide member 350 from the outside. At this time, the first flow guide member 150 disposed between the second flow guide member 250 and the third flow guide member 350 can also function as a separator membrane to isolate the second flow guide member 250 and the third flow guide member 350 which are subjected to different polarities.

[0093] In addition, the power removal unit 270 according to this embodiment may include a power supply unit, which can supply power of different polarities to the second flow guide member 252 and the third flow guide member 253.

[0094] That is, when power supplies of different polarities are applied to the second flow guiding member 250 and the third flow guiding member 350, a magnetic field is generated in the internal space 112, which can ionize the fluid molecules filling the internal space 112 and induce corona discharge. This eliminates static electricity present on the substrate in contact with the fluid ejected through the injection hole 131. As a result, static electricity present on the transported substrate can be effectively eliminated while ensuring uniform injection pressure of the fluid ejected through the injection hole 131 using the flow guiding member.

[0095] As described above, preferred embodiments of the present invention have been illustrated with reference to the accompanying drawings. However, those skilled in the art can make various modifications or alterations to the present invention without departing from the concept and scope of the invention as set forth in the claims.

Claims

1. A substrate levitation device, characterized in that, include: The main body, whose internal space is filled with fluid flowing in through the lower inlet; A levitation plate, disposed at the upper part of the internal space, has a plurality of injection holes for allowing fluid filling the internal space to pass through and for using the injection pressure of the injection fluid to levitate a substrate placed on the upper side. as well as A flow guiding component, disposed within the internal space, disperses the fluid flowing into the internal space through the lower inlet and ensures uniform injection pressure of the fluid ejected from the plurality of injection holes. The flow guiding component includes: The first flow guiding component is made of a non-conductive material; A second flow guiding component, made of a conductive material, is disposed below the first flow guiding component; and The third flow guiding component, made of a conductive material, is disposed above the first flow guiding component. It also includes a static electricity removal unit with a power supply section that supplies power of different polarities to the second flow guiding member and the third flow guiding member to induce corona discharge caused by the ionization of the fluid flowing into the internal space and eliminate static electricity on the substrate in contact with the fluid ejected from the injection hole.

2. The substrate floating device according to claim 1, characterized in that, The flow guiding component includes: A first component extends along a first direction in the internal space and is separately configured along a second direction intersecting the first direction, thereby dispersing fluid moving toward the buoyancy plate in the second direction; A second component, extending in the internal space along the second direction and separately arranged along a first direction intersecting the second direction, disperses fluid moving toward the buoyancy plate in the first direction; and Multiple first flow paths connect a first lower surface toward the lower inlet and a first upper surface toward the buoyancy plate, and have a size smaller than the diameter of the injection hole.

3. The substrate floating device according to claim 2, characterized in that, The lower inlet is located in the bottom center region of the interior space. The flow guiding component has a central region facing the lower inlet and an edge region separated from the central region. The cross-sectional area of ​​the first flow path gradually increases from the central region toward the edge region.

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