back end active components, semiconductor components, and semiconductor chips

CN116230715BActive Publication Date: 2026-10-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information

Application Number
CN202210426592.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2022-02-18
Filing Date
2022-04-22
Publication Date
2026-10-16
Estimated Expiration
2042-04-22

AI Technical Summary

Technical Problem

尽管有源组件逐渐微缩化,有限的晶片表面变得更加珍贵

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Abstract

Active components, semiconductor components, and semiconductor chips are provided. An active component includes a channel layer, a top source / drain electrode disposed on a top side of the channel layer, first and second bottom source / drain electrodes disposed on a bottom side of the channel layer, first and second gate structures between the top source / drain electrode and the first bottom source / drain electrode, wherein the first gate structure includes a non-ferroelectric dielectric layer and the second gate structure includes a ferroelectric layer, and third and fourth gate structures between the top source / drain electrode and the second bottom source / drain electrode, wherein the third gate structure includes a non-ferroelectric dielectric layer and the fourth gate structure includes a ferroelectric layer.
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