Electrostatic gyro and accelerometer device and system

Abstract

This application provides an electrostatic gyroscope and accelerometer device and system. The device includes an inertial sensing element, comprising a quartz sensing head and a gyroscope sensing element stacked above the quartz sensing head. When the device is subjected to an external force, the inertial sensing element precesses, and the capacitor formed between the inertial sensing element and the electrode plate deforms. This application solves the technical problems of traditional excitation methods for metal-shell resonant gyroscopes, which use piezoelectric excitation and detection, have piezoelectric electrodes that are tightly attached to the free end of the resonator, and whose adhesion greatly reduces the quality factor of the resonant gyroscope and increases the damping non-uniformity of the resonator.

Description

Technical Field

[0001] This application relates to the field of inertial navigation technology, and more specifically, to an electrostatic gyroscope and accelerometer device and system. Background Technology

[0002] Gyroscopes and accelerometers, as core measurement components in inertial systems, play an indispensable role in military fields such as missile guidance, flight control, and precision target strikes. Metal-cased resonant gyroscopes not only possess the inertial qualities of traditional vibrating gyroscopes but also feature high structural strength, strong environmental adaptability, and a wide dynamic range. Quartz flexible accelerometers offer advantages such as simple structure, ease of miniaturization, and high measurement accuracy.

[0003] Common excitation methods for inertial devices include electrostatic force, electromagnetic force, and piezoelectric actuation, while detection methods include capacitance, piezoelectric, and piezoresistive detection. Traditional excitation methods for metal-cased resonant gyroscopes use piezoelectric excitation and detection, with the piezoelectric electrodes tightly attached to the free end of the resonator. This close contact significantly reduces the gyroscope's quality factor and increases the damping inhomogeneity of the resonator. Traditional quartz flexural accelerometers use electromagnetic closed-loop systems, requiring the design of coils and permanent magnets, which increases size and introduces magnetic circuit instability.

[0004] There is currently no effective solution to the above problems.

[0005] Application content

[0006] This application provides an electrostatic gyroscope and accelerometer device and system to at least solve the technical problems of traditional excitation methods for metal-shell resonant gyroscopes, which use piezoelectric excitation and detection, have piezoelectric electrodes that are closely attached to the free end of the resonator, and whose adhesion greatly reduces the quality factor of the resonant gyroscope and increases the damping non-uniformity of the resonator.

[0007] According to one aspect of the embodiments of this application, an electrostatic gyroscope and accelerometer device is provided, comprising: an inertial sensing device including a quartz sensing head and a gyroscope sensing device stacked above the quartz sensing head; when the device is affected by an external force, the inertial sensing device precesses, and the capacitor formed between the inertial sensing device and the electrode plate deforms.

[0008] According to another aspect of the embodiments of this application, an electrostatic gyroscope and accelerometer system is also provided, including the electrostatic gyroscope and accelerometer device as described above.

[0009] In this embodiment, the inertial sensing device includes a quartz sensing head and a gyroscope sensing device stacked above the quartz sensing head. When the device is affected by an external force, the inertial sensing device precesses, and the capacitor formed between the inertial sensing device and the electrode plate deforms. This solves the technical problems of traditional excitation methods for metal-shell resonant gyroscopes, which use piezoelectric excitation and detection, have piezoelectric electrodes that are close to the free end of the resonator, and whose adhesion greatly reduces the quality factor of the resonant gyroscope and increases the damping non-uniformity of the resonator. Attached Figure Description

[0010] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0011] Electrostatic excitation and capacitance detection are non-contact excitation and detection methods, currently widely used in inertial devices. This application employs a vertically stacked structure consisting of a metal resonator, a common planar electrode, a quartz flexible pendulum, and a bottom electrode from top to bottom. The common planar electrode electrostatically excites the metal resonator, and together with the bottom electrode, drives the quartz pendulum. Changes in the sensitive device are detected through the formed capacitor. The detected signal is filtered and processed by a microcontroller, outputting angular rate and acceleration.

[0012] This application proposes an inertial device composed of a quartz flexible pendulum and a metal-shell resonator, and designs the peripheral circuit system of the device, which can ultimately output angular rate and acceleration.

[0013] Figure 1 This is a schematic diagram of the structure of an electrostatic gyroscope and accelerometer system according to an embodiment of this application;

[0014] Figure 2 This is a three-dimensional structural schematic diagram of an electrostatic gyroscope and accelerometer device according to an embodiment of this application;

[0015] Figure 3 This is a front view of an electrostatic gyroscope and accelerometer device according to an embodiment of this application;

[0016] Figure 4 This is a cross-sectional view of a metal resonator according to an embodiment of this application;

[0017] Figure 5 This is a schematic diagram of a quartz clock head according to an embodiment of this application;

[0018] Figure 6 This is a schematic diagram of the electrostatic force driving principle of the electrostatic driving circuit according to an embodiment of this application;

[0019] Figure 7This is a circuit diagram of an electrostatic drive circuit according to an embodiment of this application;

[0020] Figure 8 This is a schematic diagram of the electrostatic feedback voltage according to an embodiment of this application;

[0021] Figure 9 This is a circuit diagram of a capacitance detection circuit according to an embodiment of this application. Detailed Implementation

[0022] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0023] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0024] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0025] This application provides an embodiment of an electrostatic gyroscope and accelerometer system, such as Figure 1 As shown, the system mainly includes an inertial sensing device 10 and peripheral circuits 20. The inertial sensing device 10 includes a gyroscope sensing device and a quartz sensing meter; the peripheral circuits 20 include a capacitance detection circuit, a signal modulation circuit, an A / D conversion circuit, a D / A conversion circuit, an electrostatic drive circuit, and a calculation control chip.

[0026] When the device is subjected to external forces, the gyroscope and accelerometer sensing elements precess, causing deformation of the capacitor formed between the sensing elements and the electrode plates. This capacitor deformation is converted into a voltage change by capacitance detection. The converted voltage signal is relatively weak and is modulated by a signal modulation circuit. After A / D conversion, the voltage signal enters the calculation and control chip. After demodulation and low-pass filtering to remove high-frequency noise, the low-frequency capacitance difference information is output. This information is then processed by the calculation and control circuit to calculate the angle and acceleration outputs, and to output a drive control signal. The control signal, after D / A conversion, controls the electrostatic drive circuit to adjust the drive voltage, ensuring stable resonance of the gyroscope; it also controls the electrostatic force feedback loop to apply an electrostatic voltage to the upper and lower electrode plates, causing the electrostatic force to return the quartz sensing pendulum to its equilibrium position.

[0027] The following section provides a detailed explanation of the device structure, electrostatic drive, detection, and modulation circuits.

[0028] The sensing elements of the metal gyroscope and quartz accelerometer are arranged in a stacked structure, with the metal gyroscope on top and the quartz accelerometer below, such as... Figures 2 to 5 As shown. Both devices are electrostatically driven, so they can be stacked together to share a common electrode plate. Electrostatic forces can be generated on both sides of the electrode plate, improving space utilization efficiency.

[0029] The aforementioned structure improves space utilization efficiency. The metal gyroscope and quartz accelerometer employ a stacked structure, sharing a single electrode plate. This allows for better use of space resources and reduces overall size, particularly beneficial in space-constrained applications such as small devices and embedded systems. Furthermore, it reduces manufacturing costs. The stacked structure enables the metal gyroscope and quartz accelerometer to be manufactured on the same electrode plate, reducing the materials and process steps required and thus lowering manufacturing costs. It also simplifies assembly and integration. Because of the stacked structure, the metal gyroscope and quartz accelerometer can be assembled simultaneously during manufacturing, reducing assembly steps and integration complexity, and improving production efficiency. Finally, since both the metal gyroscope and quartz accelerometer use electrostatic actuation and share a single electrode plate, electrostatic force can be applied to the same plate, reducing system complexity and energy consumption, and improving overall system efficiency and stability.

[0030] The metal gyroscope sensing device consists of a metal resonator 101 and electrode plates 102. The metal resonator 101 is made of a high-strength alloy material, and the planar electrodes are made of chemically stable quartz material, with both upper and lower surfaces precision-metallized. Sixteen electrode plates are evenly distributed on the circular electrode plates 102, and the metal resonator has 48 lips 1012 corresponding to the electrode plates at each angle. The metal resonator and electrode plates are assembled via an internal support rod 1011. Adjusting the height of the support rod 1011 precisely controls the distance between the lips 1012 and the electrodes, ensuring a small gap between the lips 1012 and the planar electrodes, forming a planar capacitance to drive and detect the metal resonator.

[0031] In this embodiment, the metal resonator is made of a high-strength alloy material, which provides excellent structural rigidity and durability, giving the gyroscope sensor higher mechanical stability and vibration resistance. Furthermore, the planar electrodes are processed from chemically stable quartz material. Quartz has excellent chemical and thermal stability, ensuring the stability and reliability of the electrodes under different environmental conditions. Additionally, the upper and lower surfaces of the electrode plates undergo precision metallization, improving the electrodes' conductivity and corrosion resistance, and ensuring good electrical connection and signal transmission between the electrodes and the metal resonator. Moreover, 16 electrode plates are evenly distributed at angles on the circular electrode plates, and the metal resonator has 48 lips 1012 corresponding to the electrode plates at each angle. This design provides more measurement points, increasing the sensor's sensitivity and accuracy to rotation angles. Finally, the metal resonator and electrode plates are assembled using an internal support rod 1011. The height of the support rod 1011 can be adjusted to precisely control the distance between the lips 1012 and the electrodes, optimizing the driving and detection effects and ensuring stable capacitance signals and accurate measurement results.

[0032] The quartz accelerometer's sensing head consists of a quartz sensing plate and two electrode plates, one upper and one lower. The upper electrode plate is the common plate with the gyroscope, while the lower plate is the bottom plate. The sensing plate is formed from fused silica, which helps improve stability. Both the upper and lower surfaces of the plate are plated with metal coatings for driving and detecting the plate. The plating positions of the electrode plates correspond to those of the plate, forming a ring-shaped driving electrode and a circular differential detection electrode, respectively. Figure 4 and 5 As shown, the device uses a single-ended lead for signal transmission, forming a complete system with the peripheral circuitry.

[0033] In this embodiment, the quartz accelerometer's sensing head consists of a sensing pendulum made of fused silica material and two electrode plates, one above the other. The sensing pendulum has high stability and is plated with metal layers on both sides for driving and detection. The metal layers on the electrode plates correspond to the pendulum, forming a ring-shaped driving electrode and a circular differential detection electrode. This design helps improve the accelerometer's stability, driving and detection accuracy, and allows for signal transmission to external circuits via single-ended leads, forming a complete system.

[0034] Both metal oscillators and quartz pendulums are electrostatically excited. Although their driving principles differ, they can use two identical driving circuits, with different control voltages generating different driving signals. The metal resonator, located on top, experiences damping losses during actual operation and requires electrostatic force to maintain resonance. The lip 1012 of the metal resonator and the planar electrode can be considered as a pair of parallel electrode plates, such as... Figure 6 As shown. A voltage is applied through the excitation circuit, and the voltage generates an electrostatic force to maintain resonance. Figure 6 In the equation, d is the current distance between the plates, S is the corresponding area of ​​the plates, x is the initial distance between the plates, and Δx is the deformation of the 1012mm lip of the harmonic oscillator.

[0035] The charge energy E between the parallel plates is:

[0036]

[0037] In the formula, C is the capacitance between the parallel plates, U is the driving voltage of the planar electrode, and the electrostatic force F is:

[0038]

[0039] In the formula, the electrostatic force is a downward attractive force, therefore it is negative. Substituting U = U d +U a sinω a t and Substituting into equation (3), we get:

[0040]

[0041] In the formula, U d U is the DC voltage amplitude. a ω represents the amplitude of the AC voltage. a Let be the frequency of the AC voltage. To generate electrostatic force to drive the metal resonator, an electrostatic drive circuit is designed. As shown in the above equation, the electrostatic drive circuit needs to generate a sinusoidal drive voltage. Experiments have determined that a drive voltage with an amplitude of 100V is required. Therefore, three OPA454 operational amplifiers are used in combination for amplification. This amplifier has a wide power supply range (100V) and a wide output voltage swing characteristic, such as... Figure 7 As shown. Figure 7U1 and U2 are voltage followers, mainly providing positive and negative input voltages for intermediate U3. in The control signal output by the solution chip is amplified by U3 in the forward direction. Based on the "virtual short and virtual open" principle, the following can be obtained:

[0042]

[0043] In the formula, V in To control the voltage, R5 is the resistor at the inverting input of the op-amp, and R6 is the feedback resistor of the op-amp. out This is the output drive voltage. Since the OPA454 amplifier's power supply range is 100V, to generate a sinusoidal voltage ranging from -100V to +100V, four equal resistors R1, R2, R3, and R4 are designed to drive the +100V, -100V, and V voltages across them. out Voltage division is performed. Based on the voltage division principle, the input voltages of U1 and U2 can be dynamically adjusted, thereby adjusting the positive and negative input voltages of U3 to keep them within the 100V range. This ensures that the device will not burn out, while outputting a sinusoidal drive voltage with an amplitude of 100V.

[0044] The quartz pendulum located below, for stable acceleration measurement over a long period, uses an electrostatic drive circuit to generate a feedback voltage applied to the plate when external factors affect the distance between the pendulum and the planar electrode. This causes the pendulum to be pulled back to the center of the sensitive probe under the influence of electrostatic force. The electrostatic excitation process is as follows: Figure 8 As shown.

[0045] A parallel-plate capacitor is formed between the circular electrodes and plates on the quartz pendulum. From the capacitor model, the potential energy E between the capacitor plates can be obtained. a for:

[0046]

[0047] In the above formula, ΔV represents the potential difference between the parallel capacitor plates, and S a Let d represent the area of ​​the pendulum electrode and the plate electrode facing each other, and d0 be the distance between the parallel capacitor plates. The electrostatic force F between the plates can be obtained by calculating the gradient of the potential energy. a for:

[0048]

[0049] In the above formula, the negative sign indicates the attractive force. A schematic diagram of the electrostatic feedback voltage is shown below. Figure 8 As shown, the feedback control circuit outputs a pair of voltages V that are equal in magnitude but opposite in direction. f x a V represents the displacement of the quartz pendulum electrode relative to the lower plate. b This represents the bias voltage of the quartz pendulum electrode. According to equation (2), the electrostatic forces and resultant forces exerted by the upper and lower plates on the quartz pendulum are respectively:

[0050]

[0051]

[0052]

[0053] In the above formula, F1 represents the electrostatic force of the upper plate, F2 represents the electrostatic force of the lower plate, and F3 represents the resultant electrostatic force. The electrostatic drive circuit of the accelerometer is the same as that of the gyroscope, except that the control voltage output by the calculation chip is different, so it will not be described in detail.

[0054] When subjected to external forces, the metal oscillator and quartz pendulum deform, causing a change Δx in the distance between the sensing element and the electrode plates. This can be equivalent to a variable capacitance C + ΔC. The detection circuit uses the OPA2188 operational amplifier, which features low noise, rail-to-rail output, and low temperature drift. It can implement both capacitance detection and signal modulation circuitry. Figure 9 The carrier signal loads the capacitance change signal into the capacitance detection circuit. From Kirchhoff's voltage law and current law, we can derive:

[0055]

[0056] In the formula: V5 is the carrier amplitude, V6 is the voltage at the detection inverting input terminal, V7 is the detection output voltage, C1 is the feedback capacitor, and R9 is the feedback resistor. Since R9 is a megaohm level resistor, the term (V6-V7) / R9 can be ignored. Therefore, equation (6) simplifies to:

[0057]

[0058] From the above formula, it can be seen that the generated voltage V7 is directly proportional to ΔC. After passing through the back-end signal modulation circuit, we can obtain:

[0059]

[0060] In the formula: V8 is the voltage at the modulation inverting input terminal, V o To modulate the output voltage, R 10 R is the inverting input resistor. 12 R is a current-limiting resistor. 13 This is the feedback resistor. When R 10 =R 12 =R 13 Substituting equation (7) into equation (8) and simplifying, we get:

[0061]

[0062] Output V oThe capacitance change is converted into a voltage change, which is then input to the AD conversion circuit for analog-to-digital conversion. The analog signal is converted into a digital signal and input to the calculation control chip for calculation. After calculation, the rotation angle and the applied acceleration can be output.

[0063] In this embodiment, both the metal oscillator and the quartz pendulum employ electrostatic excitation, sharing a single electrode plate for driving and detection, thus improving space utilization efficiency. Although the metal oscillator and quartz pendulum have different driving principles, they can utilize the same driving circuit. By adjusting the control voltage, different driving signals can be generated, enhancing the control capability of the device. Furthermore, the metal oscillator exhibits damping losses, requiring electrostatic force to maintain resonance during practical operation. By designing an electrostatic driving circuit, electrostatic force can be generated to drive the metal oscillator and maintain its resonant state. Finally, when the quartz pendulum is used for long-term stable acceleration measurement, if external influences cause a change in the distance between the quartz pendulum and the electrode plate, the electrostatic driving circuit can generate a feedback voltage, returning the quartz pendulum to the center position of the sensitive probe, improving measurement stability. Moreover, by employing a capacitance detection circuit and a signal modulation circuit, the deformation generated by the metal oscillator and quartz pendulum can be converted into voltage changes, which are then converted from analog to digital and finally input into the calculation control chip for calculation. This enables accurate measurement and output of rotation angle and acceleration.

[0064] Another type of solution control chip will be described in detail below.

[0065] The control chip first demodulates the input digital signal. Demodulation is the process of restoring the modulated signal to the original signal, allowing the information contained within the signal to be extracted. In this system, the purpose of demodulation is to extract capacitance difference information, that is, the deformation of the capacitor formed between the sensitive device and the electrode plates.

[0066] After demodulation, the signal is processed by a low-pass filter. The purpose of the low-pass filter is to remove high-frequency noise while retaining low-frequency capacitance difference information. This eliminates interference components in the signal, improving the accuracy and stability of the calculation.

[0067] The control chip utilizes the demodulated and filtered low-frequency capacitance difference information for calculation and control. The calculation section uses the input capacitance difference information to calculate the gyroscope's angle and acceleration output. This process involves computation and algorithms to extract the required angle and acceleration information from the input signal.

[0068] Simultaneously, the calculation and control chip also outputs drive control signals, which, after D / A conversion, are used to control the electrostatic drive circuit. The function of the drive control signals is to adjust the drive voltage to maintain the stable resonance of the gyroscope. By controlling the magnitude and waveform of the drive voltage, the motion state and resonance characteristics of the gyroscope can be precisely controlled.

[0069] The control signal is used not only to control the drive circuit but also to control the electrostatic feedback loop. The electrostatic feedback loop applies an electrostatic voltage to the upper and lower plates, causing the quartz pendulum to return to its equilibrium position. By controlling the magnitude and direction of the electrostatic force, fine-tuning and stability control of the quartz pendulum can be achieved, keeping it in its equilibrium position.

[0070] The main difference between the solution control chip in this embodiment and the solution control chip formula 13 and subsequent solution methods is that it is different from the solution control chip above.

[0071]

[0072] In this embodiment, a bias factor b is introduced to affect the voltage v. o Compensation will be provided.

[0073] Because a bias factor is introduced, the subsequent calculation method differs from the above embodiment. The specific formula for calculating the rotation angle (attitude calculation) is as follows:

[0074]

[0075] Where, θ fusion This is the final estimated rotation angle, where 'a' is a weighting coefficient used to balance the measurements from the gyroscope and accelerometer, and θ is the angle. gyro It is the rotation angle measured by the gyroscope, ω gyro It is the angular velocity measured by the gyroscope, θ acc Δt is the rotation angle measured by the accelerometer, acc(t) is the function of the accelerometer's output signal changing with time, Δt is the sampling time interval, t is time, θ0 is the initial angle, and k1 and k2 are the first constant coefficient and the second constant coefficient, respectively.

[0076] In this embodiment, a bias factor b is introduced to compensate for the voltage V0. This has the beneficial effect of correcting measurement errors and deviations from the gyroscope and accelerometer. The introduction of the bias factor b can reduce system errors and improve the accuracy and stability of the solution by correcting the voltage v0.

[0077] In the formula for calculating the rotation angle, a weighting coefficient α is introduced to balance the measurements from the gyroscope and accelerometer. This weighting coefficient can be adjusted according to actual needs and application scenarios to obtain the optimal attitude calculation results under different conditions.

[0078] Meanwhile, the constant coefficients k1 and k2 in the formula can be used to adjust the weights and response characteristics of the gyroscope and accelerometer to suit specific sensor performance and system requirements.

[0079] By introducing bias factors and weighting coefficients, the measurements from the gyroscope and accelerometer can be corrected and adjusted, thereby improving the accuracy and stability of the solution. This is of great significance for achieving accurate attitude calculation and control in many application areas, such as navigation, motion tracking, and flight control.

[0080] This embodiment uses gyroscope angular velocity measurement to update the rate of change of rotation angle, and uses accelerometer measurement to correct long-term stable rotation angle.

[0081] Solving the problem using the above method has the following beneficial effects:

[0082] 1) Improve the accuracy of attitude estimation. Using a complementary filter method combines measurements from both the accelerometer and gyroscope. By balancing the contributions of each, a more accurate attitude estimation result can be obtained. The gyroscope provides fast-response angular velocity information, while the accelerometer provides a long-term stable gravity reference. By comprehensively utilizing the advantages of both, the error in attitude estimation can be effectively reduced.

[0083] 2) Reduce the impact of gyroscope drift: Gyroscopes may drift during prolonged use, leading to accumulated errors in attitude estimation. By introducing accelerometer measurements, gyroscope drift can be compensated for, thereby improving the accuracy and stability of attitude calculation.

[0084] 3) Accelerometers provide reference gravity information. Accelerometers measure the gravitational acceleration experienced by a device. By analyzing and processing this gravitational acceleration, the device's attitude information can be obtained. This is crucial for many applications, such as navigation systems, motion tracking, and posture recognition. By combining the measurements from accelerometers and gyroscopes, the device's rotation angle can be estimated more accurately.

[0085] 4) Improved real-time performance and responsiveness. Complementary filter methods offer good real-time performance and responsiveness, enabling attitude updates and corrections in a short time. This is crucial for applications requiring real-time attitude information, such as virtual reality, augmented reality, and flight control.

[0086] In summary, the application of the above formulas can improve the accuracy, stability, and real-time performance of attitude calculation, enabling devices to more accurately estimate rotation angles and accelerations, thereby providing more accurate and reliable data and control information for various applications.

[0087] If the integrated units in the above embodiments are implemented as software functional units and sold or used as independent products, they can be stored in the aforementioned computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause one or more computer devices (which may be personal computers, servers, or network devices, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application.

[0088] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0089] In the several embodiments provided in this application, it should be understood that the disclosed terminal device can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling or direct coupling or communication connection may be through some interfaces, or indirect coupling or communication connection between units or modules, and may be electrical or other forms.

[0090] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0091] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0092] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. An electrostatic gyroscope and accelerometer system, characterized in that, include An electrostatic gyroscope and accelerometer device includes an inertial sensing device, which comprises a quartz sensing head and a gyroscope sensing device stacked on top of the quartz sensing head. When the device is subjected to an external force, the inertial sensing device precesses, and the capacitor formed between the inertial sensing device and the electrode plate deforms. The peripheral circuit is configured to detect the deformation of the capacitor, convert the deformation into a voltage change, calculate the angle and acceleration of the inertial sensing device based on the voltage change, and output a drive control signal to control the resonance of the gyroscope sensing device. The peripheral circuit includes: a capacitance detection circuit configured to detect the deformation of the capacitor and convert the deformation into a voltage change to obtain a voltage signal; a signal modulation circuit configured to demodulate the voltage signal and filter out noise with a frequency greater than a preset frequency threshold in the voltage signal to obtain capacitance difference information; and a calculation control chip configured to calculate the angle and acceleration of the inertial sensing device based on the capacitance difference information and output the drive control signal. The calculation control chip is configured to: compensate the voltage signal based on the bias factor to obtain the compensated voltage signal; and calculate the rotation angle based on the compensated voltage signal, the weighting coefficients used to balance the measured values ​​of the gyroscope and accelerometer, and the constant coefficients used to adjust the weights and response characteristics of the gyroscope and accelerometer. The stacked quartz sensor head and the gyroscope sensor share a common electrode plate, and both the quartz sensor head and the gyroscope sensor are electrostatically driven.

2. The system according to claim 1, characterized in that, The peripheral circuit also includes: A digital-to-analog converter circuit is configured to convert the drive control signal into an analog form of the drive control signal; An electrostatic drive circuit is configured to adjust the drive voltage under the control of the drive control signal to control the resonance of the gyroscope sensing device.

3. The system according to claim 2, characterized in that, The electrostatic drive circuit includes: A first operational amplifier and a second operational amplifier, wherein the first operational amplifier and the second operational amplifier are voltage followers and are configured to provide positive and negative input voltages to a third operational amplifier; The third operational amplifier is configured to amplify the drive control signal.

4. The system according to claim 1, characterized in that, The gyroscope sensing device also includes a metal resonator located above the common electrode plate and configured to precess when subjected to an external force in order to measure and sense rotational motion.

5. The system according to claim 1, characterized in that, The quartz sensor head includes an upper electrode plate, a lower electrode plate, and a quartz pendulum located between the upper electrode plate and the lower electrode plate, wherein the upper electrode plate is the common electrode plate.

6. The system according to claim 4, characterized in that, The metal resonator includes a semi-hollow spherical shell and a support rod located at the central axis of the shell, wherein the edge of the shell has a lip.

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