Substrate drying apparatus

Abstract

The application discloses a substrate drying device, which comprises a chamber main body, a driving mechanism, a sealing door and a quick opening mechanism; a drying cavity is arranged in the chamber main body; a sealing groove communicated with the drying cavity is formed in one side of the chamber main body; the driving end of the driving mechanism is in transmission connection with the sealing door; the sealing door is driven to rotate so that the sealing door has a closed state matched with the sealing groove and an opened state separated from the sealing groove; in the closed state, the locking structure of the quick opening mechanism is extruded against the outer side surface of the sealing door, so that the inner side surface of the sealing door is abutted against the sealing surface of the sealing groove, and the drying cavity is sealed. The substrate drying device drives the opening and closing of the sealing door through the driving mechanism, thereby improving the convenience of operation; the locking structure of the quick opening mechanism is extruded against the outer side surface of the sealing door, the sealing of the drying cavity under high pressure is realized by overcoming small friction, the sealing performance is improved, and the drying of the substrate in a sealed environment is ensured.

Description

Technical Field

[0001] This invention relates to the field of substrate drying equipment technology, and more specifically to a substrate drying apparatus. Background Technology

[0002] During the supercritical drying process of the substrate, the substrate drying chamber needs to be frequently pressurized and depressurized, and the high-pressure chamber door needs to be frequently opened and closed. This requires the high-pressure chamber door to ensure both sealing when closed and ease of opening and closing, as well as safety.

[0003] The sealing door of the existing substrate drying equipment requires manual operation to open and close. The manual operation process is cumbersome and takes a long time, which greatly increases the operating cost of the equipment. In addition, manual operation can easily lead to poor sealing of the sealing door, which affects the substrate drying process. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of the sealing door of the substrate drying device in the prior art, which requires manual opening and closing, is cumbersome to operate, and has a long opening and closing time, thereby providing a substrate drying device.

[0005] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0006] A substrate drying apparatus includes: a chamber body, a drive mechanism, a sealing door, and a quick-opening mechanism; the chamber body has a drying chamber inside, and a sealing groove communicating with the drying chamber is formed on one side of the chamber body; the drive mechanism is disposed on the chamber body; the drive end of the drive mechanism is kinetically connected to the sealing door, and the drive mechanism is adapted to drive the sealing door to rotate so that the sealing door has a closed state that cooperates with the sealing groove and an open state that is separated from the sealing groove; the quick-opening mechanism is disposed on the chamber body, and the quick-opening mechanism includes a locking structure, which is adapted to squeeze the outer surface of the sealing door in the closed state, so that the inner surface of the sealing door abuts against the sealing surface of the sealing groove to seal the drying chamber.

[0007] According to some embodiments of the present invention, the quick-opening mechanism further includes: a first driving member and a second driving member, both disposed on the chamber body, the driving end of the first driving member being connected to the locking structure in a transmission manner, the upper end face of the chamber body being provided with a mounting hole, and the first driving member driving the locking structure to reciprocate in a vertical direction, so that the locking structure has a pre-compression state in which one end passes through the mounting hole and extends to the outer side of the sealing door parallel to it;

[0008] The driving end of the second driving member is connected to the locking structure in a transmission manner. The second driving member is adapted to drive the locking structure to rotate about its own axis, so that the locking structure has a pressed state that abuts against the outer side of the sealing door in the pre-pressurized state.

[0009] According to some embodiments of the present invention, the locking structure includes: a mounting connecting plate, a transition member, a locking member, and a connecting member; the driving end of the first driving member is convexly connected to the mounting connecting plate to drive the mounting connecting plate to reciprocate in the vertical direction; the transition member is fixedly disposed on the mounting connecting plate; the connecting member is rotatably connected to the transition member, the transition member is vertically upper limiter of the connecting member, the transition member is adapted to drive the connecting member to slide in the vertical direction, the connecting member is convexly connected to the driving end of the second driving member to drive the connecting member to rotate in the axial direction; one end of the locking member is fixedly connected to the connecting member, the other end of the locking member is adapted to pass through the mounting hole and extend to be parallel to the outer surface of the sealing door to achieve the pre-pressurization state, and the locking member abuts against the outer surface of the sealing surface after rotating with the connecting member to achieve the pressing state.

[0010] According to some embodiments of the present invention, the locking member is a locking pin, and the locking member has a notch at one end near the sealing door. Under pre-compression, the notch is parallel to the outer surface of the sealing door, and the distance between the axis of the locking member and the notch is less than the radius of the locking member.

[0011] According to some embodiments of the present invention, in the pre-pressurized state, there is a first gap between the sealing surfaces of the sealing door and the sealing groove, and a second gap between the notched surface and the outer side of the sealing door, and a sealing element is provided in the first gap;

[0012] In the compressed state, the notch forms an angle with the outer side of the sealing door, and the distance between the axis of the locking member and the outer side of the sealing door is less than or equal to the radius of the locking member.

[0013] According to some embodiments of the present invention, in the compressed state, the direction of the force exerted by the sealing door on the locking member is perpendicular to the axis of the locking member.

[0014] According to some embodiments of the present invention, the mounting connecting plate is provided with a plurality of connecting holes evenly distributed along its length direction, and the locking member, the transition member and the adapter member are all provided with a plurality of locking members, one end of the plurality of locking members passing through the transition member into the connecting hole.

[0015] According to some embodiments of the present invention, the quick-opening mechanism further includes a transmission assembly, and the driving end of the second driving member is connected to the locking structure via the transmission assembly.

[0016] According to some embodiments of the present invention, the transmission assembly includes: a transmission connecting plate, a sleeve rod, and a lever. One end of the transmission connecting plate is connected to the transmission end of the second driving member, and the second driving member drives the transmission connecting plate to reciprocate along the length direction of the mounting connecting plate. One end of the sleeve rod is fixedly mounted on the transmission connecting plate. One end of the lever is drively connected to the other end of the sleeve rod, and the other end of the lever is fixedly connected to an adapter. The transmission connecting plate drives the lever to rotate, so that the locking structure is in a pressed state.

[0017] According to some embodiments of the present invention, two quick-opening mechanisms are provided, and are respectively disposed on two opposite sides of the chamber body.

[0018] According to some embodiments of the present invention, the driving mechanism includes:

[0019] The floating structure includes a guide rail disposed on the main body of the chamber and a slider disposed on the guide rail. An adjustment component is fixedly provided at one end of the guide rail away from the sealing door. A floating base plate is fixedly installed on the slider. The adjustment component is throttledly connected to the floating base plate. The adjustment component pushes the floating base plate to reciprocate along the length direction of the guide rail.

[0020] The actuation structure includes a third drive member and a connector, both disposed on the floating base plate. The connector is adapted to install the sealing door. The drive end of the third drive member is connected to the connector via a pulley assembly to drive the sealing door to rotate.

[0021] According to some embodiments of the present invention, the adjustment assembly includes: an adjustment seat, a limiting plate, an elastic element, and a limiting element; the adjustment seat is disposed on the side wall of the chamber body and located at the end of the guide rail away from the sealing door; the limiting plate is fixedly connected to the floating base plate; the elastic element is disposed between the adjustment seat and the limiting plate; the limiting element passes through the adjustment seat and one end is threadedly connected to the limiting plate, and the limiting element rotates so that the elastic element pushes the limiting plate to move the floating base plate.

[0022] According to some embodiments of the present invention, the execution structure further includes a mounting plate disposed on the floating base plate, the third driving member is mounted on one side of the mounting plate, the connecting member is a hinge, the hinge is provided with a drive shaft, the drive shaft is connected to the sealing door in a transmission manner, and the driving end of the third driving member is connected to the drive shaft through the pulley assembly.

[0023] According to some embodiments of the present invention, the pulley assembly includes a first pulley disposed on the mounting plate, a second pulley disposed on the connector, and a drive belt adapted to connect the first pulley and the second pulley, wherein the first pulley is drive-connected to the drive end of the third drive member, and the second pulley is drive-connected to the drive shaft.

[0024] According to some embodiments of the present invention, the actuating structure further includes a tensioning plate, which is fixedly mounted on the floating base plate and located between the mounting plate and the transmission belt. The tensioning plate is adapted to adjust the tension of the transmission belt.

[0025] The technical solution of this invention has the following advantages:

[0026] 1. The substrate drying apparatus provided by this invention includes a drying chamber inside a main chamber body, suitable for drying substrates. A sealing groove communicating with the drying chamber is formed on one side of the main chamber body. The driving end of a driving mechanism is connected to a sealing door, driving the sealing door to rotate so that the sealing door has a closed state that cooperates with the sealing groove and an open state that is separated from the sealing groove. In the closed state, the locking structure of the quick-opening mechanism presses against the outer surface of the sealing door, thereby causing the inner surface of the sealing door to abut against the sealing surface of the sealing groove to seal the drying chamber. This substrate drying apparatus improves the ease of operation by driving the opening and closing of the sealing door through the driving mechanism. The locking structure of the quick-opening mechanism presses against the outer surface of the sealing door, overcoming small frictional forces to achieve a seal in the high-pressure drying chamber, improving sealing performance and ensuring that the substrate is dried in a sealed environment.

[0027] 2. The substrate drying apparatus provided by the present invention includes a first driving member driving a locking structure to move up and down, and a second driving member driving the locking structure to move around. The combination of the up and down movement and the rotational movement of the locking structure enables the sealing and quick opening of the drying chamber, thereby improving the ease of operation, reducing the difficulty of switching on and off, and improving the efficiency of switching on and off.

[0028] 3. The substrate drying apparatus provided by this invention features a notch that allows the locking member to extend to the outer side of the sealing door under pre-compression, forming a second gap between the sealing doors. When the locking member rotates, the notch forms an angle with the outer side of the sealing door, causing the locking member and the outer side of the sealing door to press against each other, resulting in a second gap of less than or equal to zero. At this time, the distance between the axis of the locking member and the outer side of the sealing door is less than or equal to the radius of the locking member. Through the pressing and pushing action of the locking member, the first gap between the inner side of the sealing door and the sealing surface of the sealing groove is less than or equal to zero, thus achieving a seal on the drying chamber. The notch design allows for sealing of the drying chamber under high pressure solely by overcoming the friction between the locking member and the outer side of the sealing surface, resulting in a simple and convenient sealing method.

[0029] 4. The substrate drying device provided by the present invention has multiple locking members, which are evenly arranged along the length direction of the mounting connecting plate. The length direction of the mounting connecting plate is consistent with the length direction of the sealing door. Multiple locking members simultaneously press the sealing surface to ensure force balance and sealing performance, while avoiding the impact on sealing performance when a single locking member fails.

[0030] 5. In the substrate drying device provided by the present invention, the driving end of the second driving member is connected to the locking structure through a transmission assembly. The transmission assembly realizes simultaneous control of multiple locking members to ensure that multiple locking members simultaneously squeeze the sealing door, ensuring the force balance of the sealing door, while reducing the complexity of the structure and reducing the operation and maintenance costs.

[0031] 6. The substrate drying device provided by the present invention has two quick-opening mechanisms, which are arranged opposite to each other and distributed on two opposite sides of the main body of the chamber, so as to simultaneously squeeze both ends of the sealing door to ensure force balance and improve sealing performance.

[0032] 7. The substrate drying apparatus provided by this invention includes an adjusting component that pushes a floating base plate, causing the floating base plate to slide along a guide rail with a slider. A third driving component and a connecting component are disposed on the floating base plate. The connecting component is used to connect and install a sealing door. The third driving component drives the sealing door to rotate via a pulley assembly, thereby realizing the open and closed states of the sealing door. The adjustability of the floating structure enhances the sealing performance between the sealing door and the sealing groove. Simultaneously, the use of electric drive improves driving efficiency and shortens the opening and closing time of the sealing door, thereby improving the substrate drying efficiency.

[0033] 8. The substrate drying device provided by the present invention has a limiting plate and a floating bottom plate fixedly connected. A limiting member is inserted into the adjusting seat and one end is threadedly connected to the limiting plate. Rotating the limiting member adjusts the limiting plate so that the floating bottom plate slides on the guide rail with the slider to achieve the adjustment function. An elastic member is provided between the mounting seat and the limiting plate to ensure that the sealing door can remain in a fixed position even when no force is applied, thereby improving the structural stability.

[0034] 9. The substrate drying device provided by the present invention has a tensioning plate fixedly installed on a floating base plate. By adjusting the tensioning plate and the mounting plate, the tension of the transmission belt can be adjusted to ensure the normal transmission of the pulley assembly and improve reliability. Attached Figure Description

[0035] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the substrate drying apparatus provided in some embodiments of the present invention;

[0037] Figure 2 This is a first partial schematic diagram of a substrate drying apparatus provided in some embodiments of the present invention;

[0038] Figure 3 This is a second partial schematic diagram of a substrate drying apparatus provided in some embodiments of the present invention;

[0039] Figure 4 This is a third partial schematic diagram of a substrate drying apparatus provided in some embodiments of the present invention;

[0040] Figure 5 for Figure 4 A partial schematic diagram of point A in the diagram;

[0041] Figure 6 This is a schematic diagram of a substrate drying apparatus under pre-pressure conditions provided in some embodiments of the present invention;

[0042] Figure 7 This is a schematic diagram of a substrate drying apparatus under a compressed state provided in some embodiments of the present invention.

[0043] Explanation of reference numerals in the attached drawings: 1. Chamber body; 2. Sealing door; 3. Drive mechanism; 4. Quick-opening mechanism; 11. Sealing groove; 12. Mounting hole; 21. Locking structure; 22. First drive component; 23. Second drive component; 24. Transmission structure; 31. Floating structure; 32. Actuating structure; 211. Mounting connecting plate; 212. Transition component; 213. Adapter component; 214. Locking component; 241. Transmission connecting plate; 242. 1. Sleeve rod; 243. Lever; 311. Guide rail; 312. Slider; 313. Adjustment assembly; 314. Floating base plate; 321. Third drive component; 322. Connector; 323. Mounting plate; 324. Tensioning plate; 325. First pulley; 326. Second pulley; 327. Transmission belt; 328. Drive shaft; 3131. Adjustment seat; 3132. Limiting component; 3133. Limiting plate; 3134. Elastic component. Detailed Implementation

[0044] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0046] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0047] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0048] Reference Figures 1 to 4 As shown, the present invention proposes a substrate drying device, comprising: a chamber body 1, a driving mechanism 3, a sealing door 2, and a quick-opening mechanism 4; the chamber body 1 is provided with a drying chamber, and a sealing groove 11 communicating with the drying chamber is provided on one side of the chamber body 1; the driving mechanism 3 is disposed on the chamber body 1; the driving end of the driving mechanism 3 is connected to the sealing door 2 in a transmission manner, and the driving mechanism 3 is adapted to drive the sealing door 2 to rotate so that the sealing door 2 has a closed state that cooperates with the sealing groove 11 and an open state that is separated from the sealing groove 11; the quick-opening mechanism 4 is disposed on the chamber body 1, and the quick-opening mechanism 4 includes a locking structure 21, which is adapted to squeeze the outer surface of the sealing door 2 in the closed state, so that the inner surface of the sealing door 2 abuts against the sealing surface of the sealing groove 11 to seal the drying chamber.

[0049] Specifically, a drying chamber is provided inside the main body 1 of the chamber. The drying chamber is suitable for drying substrates. The cross-section of the main body 1 of the chamber is square. Only one side of the main body 1 of the chamber has an opening. A sealing groove 11 is formed on the plane of the opening side. The sealing groove 11 is connected to the drying chamber through the opening. A sealing door 2 is provided on the adjacent side of the opening side. The sealing door 2 is adapted to cooperate with the sealing groove 11.

[0050] Understandably, by connecting the drive end of the drive mechanism 3 to the sealing door 2, the sealing door 2 is driven to rotate so that it has a closed state that engages with the sealing groove 11 and an open state that is separated from the sealing groove 11. In the closed state, the locking structure 21 of the quick-opening mechanism 4 presses against the outer surface of the sealing door 2, thereby causing the inner surface of the sealing door 2 to abut against the sealing surface of the sealing groove 11 to seal the drying chamber.

[0051] The substrate drying device drives the opening and closing of the sealing door 2 through the drive mechanism 3, thereby improving the ease of operation. The locking structure 21 of the quick-opening mechanism 4 squeezes the outer side of the sealing door 2, and achieves the sealing of the drying chamber under high pressure by overcoming small frictional force, thereby improving the sealing performance and ensuring that the substrate is dried in a sealed environment.

[0052] Reference Figure 2 As shown, in some embodiments of the present invention, the quick-opening mechanism 4 further includes: a first driving member 22 and a second driving member 23, both disposed on the chamber body 1. The driving end of the first driving member 22 is connected to the locking structure 21 in a transmission manner. A mounting hole 12 is provided on the upper end surface of the chamber body 1. The first driving member 22 drives the locking structure 21 to reciprocate in the vertical direction, so that the locking structure 21 has a pre-compression state in which one end passes through the mounting hole 12 and extends to be parallel to the outer surface of the sealing door 2. Figure 6 As shown;

[0053] The driving end of the second driving member 23 is connected to the locking structure 21 via a transmission connection. The second driving member 23 is adapted to drive the locking structure 21 to rotate around its own axis, so that the locking structure 21 has a pressed state in which it abuts against the outer surface of the sealing door 2 under pre-pressure conditions, such as... Figure 7 As shown.

[0054] Specifically, the first driving member 22 is a linear driving member. The driving end of the first driving member 22 is connected to the locking structure 21. When the sealing door 2 is in the closed state, the sealing door 2 and the sealing groove 11 cooperate with each other. The locking structure 21 is set above the sealing groove 11. The main body of the chamber 1 has a mounting hole 12 that communicates with the sealing groove 11. One end of the locking structure 21 moves down vertically under the drive of the first driving member 22, passes through the mounting hole 12 and extends to be parallel to the outer side of the sealing door 2, realizing the pre-compression state. When the sealing door 2 needs to be in the open state, the first driving mechanism 3 drives the locking structure 21 to move vertically, so that one end of the locking structure 21 is located inside or above the mounting hole 12, thereby allowing the sealing door 2 to be separated from the sealing groove 11.

[0055] In the pre-pressurized state, in order to ensure that the inner side of the sealing door 2 is tightly connected to the sealing surface of the sealing groove 11, the driving end of the second driving member 23 drives the locking structure 21 to rotate around its own axis, so that the side wall of one end of the locking structure 21 abuts against the sealing surface, thereby achieving the pressing state of the locking structure 21.

[0056] In some embodiments of the present invention, the locking structure 21 includes: a mounting connecting plate 211, a transition member 212, a locking member 214, and a connecting member 213. The driving end of the first driving member 22 is connected to the mounting connecting plate 211 to drive the mounting connecting plate 211 to reciprocate in the vertical direction. The transition member 212 is fixedly mounted on the mounting connecting plate 211. The connecting member 213 is rotatably connected to the transition member 212, and the transition member 212 upper limites the connecting member 213 in the vertical direction. 12 is adapted to drive the adapter 213 to slide in the vertical direction. The adapter 213 is connected to the drive end of the second drive member 23 to drive the adapter 213 to rotate in the axial direction. One end of the locking member 214 is fixedly connected to the adapter 213. The other end of the locking member 214 is adapted to pass through the mounting hole 12 and extend to be parallel to the outer side of the sealing door 2 to achieve a pre-pressurized state. After the locking member 214 rotates with the adapter 213, it abuts against the outer side of the sealing door 2 to achieve a pressed state.

[0057] Specifically, the locking structure 21 includes: a mounting connecting plate 211, a transition piece 212, a locking piece 214, and a connecting piece 213. The first driving member 22 is a lifting cylinder. The first driving member 22 drives the mounting connecting plate 211 to slide vertically, causing the transition piece 212, which is fixed on the mounting connecting plate 211, to move vertically. The transition piece 212 and the connecting piece 213 are fixed at the upper limit in the vertical direction and rotate relative to each other in the axial direction. It can be understood that the specific structure is: the transition piece 212 is provided with an annular limiting groove, and the connecting piece 213 is provided with an annular limiting groove. A limiting block is provided, which slides circumferentially in an annular limiting groove, thereby achieving a fixed connection between the transition piece 212 and the adapter piece 213 in the vertical direction. When the transition piece 212 moves in the vertical direction, it drives the adapter piece 213 and the locking piece 214 to slide in the vertical direction. The locking piece 214 is coaxially arranged with the mounting hole 12. When the adapter piece 213 slides in the vertical direction, it drives the locking piece 214 to slide in the mounting hole 12, thereby achieving a pre-compression state. In the pre-compression state, the other end of the locking piece 214 passes through the mounting hole 12 and extends to the outer side of the sealing door 2.

[0058] In the pre-pressurized state, the second driving member 23 can be a rotary driving mechanism 3. The driving end of the second driving member 23 is connected to the adapter 213, thereby driving the adapter 213 to rotate, which in turn drives the locking member 214 to rotate to achieve the pressing state. In the pressing state, the outer periphery of the locking member 214 abuts against the outer side of the sealing door 2, so that the inner side of the sealing door 2 and the sealing surface of the sealing groove 11 are pressed against each other to achieve the sealing of the drying chamber.

[0059] It is understandable that the first driving component 22 drives the locking structure 21 to move up and down, and the second driving component 23 drives the locking structure 21 to move around. The combined action of the lifting and rotating motion of the locking structure 21 achieves the sealing and quick opening of the drying chamber, improving the convenience of operation, reducing the difficulty of switching, and improving the efficiency of switching.

[0060] In some embodiments of the present invention, the locking member 214 is a locking pin. The locking member 214 has a notch at one end near the sealing door 2. In the pre-tightened state, the notch is parallel to the outer surface of the sealing door 2. The distance between the axis of the locking member 214 and the notch is less than the radius of the locking member 214.

[0061] Specifically, in the pre-compression state, the notch is positioned opposite to and parallel to the outer surface of the sealing door 2. The distance between the axis of the locking member 214 and the notch is less than the radius of the locking member 214. This allows the notch to extend to the outer surface of the sealing door 2 when the first driving member 22 drives the locking member 214 to press down, preventing interference between the locking member 214 and the sealing door 2. The second driving member 23 drives the locking member 214 to rotate, causing the notch to move away from the outer surface of the sealing door 2. This allows the convex surface of the locking member 214 to press against the outer surface of the sealing door 2, achieving a compressed state.

[0062] When the sealing door 2 needs to be opened, the second driving member 23 drives the adapter 213 to rotate, so that the notch of the locking member 214 faces the outer side of the sealing door 2. Then the first driving member 22 drives the mounting connecting plate 211 to rise, so that the locking member 214 enters the mounting hole 12 or makes the locking member 214 above the mounting hole 12. The driving mechanism 3 drives the sealing door 2 to rotate and separate from the sealing groove 11, realizing the open state of the sealing door 2.

[0063] It is understood that in another embodiment of the present invention, the locking member 214 is provided with a cam structure at one end near the sealing door 2. In the pre-pressurized state, the convex surface of the cam is away from the outer side of the sealing door 2. When the second driving member 23 drives the adapter 213 to rotate, the convex surface of the cam abuts against the outer side of the sealing door 2 to achieve the pressing state.

[0064] It should be noted that a bushing is installed in the mounting hole 12, and the locking element 214 passes through the bushing. The bushing and the locking element 214 are clearance fit or interference fit. The bushing serves to guide and bear the lateral force of the locking element 214, thereby preventing the locking element 214 from deflecting and affecting the sealing performance.

[0065] In some embodiments of the present invention, under the pressed state, the direction of the force exerted by the sealing door 2 on the locking member 214 is perpendicular to the axis of the locking member 214.

[0066] Specifically, when in the compressed state, the outer side of the sealing door 2 abuts against the convex side of the locking member 214. At this time, the force exerted by the sealing door 2 on the locking member 214 passes through the axis of the locking member 214, reducing the deflection torque received by the locking member 214 and improving the reliability and operational safety of the equipment.

[0067] In some embodiments of the present invention, under pre-pressure conditions, there is a first gap between the sealing surfaces of the sealing door 2 and the sealing groove 11, and a second gap between the notch and the outer side of the sealing door 2, and a sealing element is provided in the first gap;

[0068] When pressed, the notch forms an angle with the outer side of the sealing door 2, and the distance between the axis of the locking member 214 and the outer side of the sealing door 2 is less than or equal to the radius of the locking member 214.

[0069] Specifically, the notch design allows the locking element 214 to extend to the outer surface of the sealing door 2 under pre-compression, forming a second gap between the sealing door 2 and the sealing door 2. This second gap prevents interference between the locking element 214 and the sealing door 2 when the locking element 214 is pressed down, thus avoiding affecting the service life of the locking element 214. When the locking element 214 rotates, the notch forms an angle with the sealing door 2, specifically, this angle is 90°. This causes the convex side of the locking element 214 to press against the outer surface of the sealing door 2, and the second gap is less than or equal to zero. At this time, the distance between the axis of the locking element 214 and the outer surface of the sealing door 2 is less than or equal to the radius of the locking element 214.

[0070] Understandably, a sealing element is installed within the sealing groove 11. Under pre-pressure conditions, the sealing element is either free or pre-pressurized. Through the squeezing and pushing action of the locking element 214, the first gap between the inner side of the sealing door 2 and the sealing surface of the sealing groove 11 is less than or equal to the thickness of the sealing element, thus sealing the drying chamber. The missing surface design allows for sealing of the drying chamber under high pressure solely by overcoming the friction between the locking element 214 and the outer side of the sealing surface. This sealing method is simple and easy to operate.

[0071] In some embodiments of the present invention, the mounting connecting plate 211 is provided with a plurality of connecting holes evenly distributed along its length direction, and a plurality of locking members 214, transition members 212 and adapter members 213 are provided, with one end of the plurality of locking members 214 passing through the transition members 212 into the connecting holes.

[0072] Specifically, the locking element 214, transition element 212, and adapter element 213 are set in a one-to-one correspondence, that is, the number of locking elements 214, transition elements 212, and adapter elements 213 is the same. There are multiple locking elements 214, which are evenly arranged along the length direction of the mounting connecting plate 211. The length direction of the mounting connecting plate 211 is consistent with the length direction of the sealing door 2. Multiple locking elements 214 simultaneously compress the sealing surface to ensure force balance and seal performance, while avoiding the impact on sealing performance when a single locking element 214 fails.

[0073] Reference Figure 3 As shown, in some embodiments of the present invention, the quick-opening mechanism 4 further includes a transmission assembly, and the driving end of the second driving member 23 is connected to the locking structure 21 through the transmission assembly.

[0074] Understandably, the second driving component 23 is a translation cylinder, which is connected to the locking structure 21 and the second driving component 23 via a transmission assembly to realize the rotational movement of the locking structure 21. The driving end of the second driving component 23 is connected to the locking structure 21 via the transmission assembly. The transmission assembly enables simultaneous control of multiple locking components 214 to ensure that multiple locking components simultaneously compress the sealing door 2, ensuring the force balance of the sealing door 2, while reducing the complexity of the structure and lowering the operation and maintenance costs.

[0075] In some embodiments of the present invention, the transmission assembly includes: a transmission connecting plate 241, a sleeve rod 242, and a lever 243. One end of the transmission connecting plate 241 is connected to the transmission end of the second driving member 23, and the second driving member 23 drives the transmission connecting plate 241 to slide back and forth along the length direction of the mounting connecting plate 211. One end of the sleeve rod 242 is fixedly mounted on the transmission connecting plate 241. One end of the lever 243 is drivenly connected to the other end of the sleeve rod 242, and the other end of the lever 243 is fixedly connected to the adapter 213. The transmission connecting plate 241 drives the lever 243 to rotate so that the locking structure 21 is in a pressed state.

[0076] Specifically, the length direction of the transmission connecting plate 241 is consistent with the length direction of the mounting connecting plate 211. The number of sleeve rods 242 and lever rods 243 is consistent with the number of adapters 213, so that the adapters 213, sleeve rods 242 and lever rods 243 are set in a one-to-one correspondence. The second driving member 23 is a translation cylinder. The second driving member 23 drives the transmission connecting plate 241 to slide back and forth along the length direction of the mounting connecting plate 211. Multiple sleeve rods 242 and lever rods 243 are provided. Multiple sleeve rods 242 are spaced apart along the length direction of the transmission connecting plate 241. One end of the sleeve rod 242 is fixedly installed on the transmission connecting plate 241. One end of the lever rod 243 is connected to the other end of the sleeve rod 242. When the transmission connecting plate 241 slides in the horizontal direction, the sleeve rod 242 pushes the lever rod 243 to rotate. The other end of the lever rod 243 is fixedly connected to the adapter 213, so that the adapter 213 drives the locking member 214 to rotate, realizing the pressing state.

[0077] In some embodiments of the present invention, two quick-opening mechanisms 4 are provided, and are respectively disposed on two opposite sides of the chamber body 1.

[0078] Specifically, in this embodiment of the invention, two quick-opening mechanisms 4 are respectively arranged on the upper and lower sides of the chamber body 1 to pressurize the upper and lower ends of the sealing door 2, thereby achieving a tight seal of the drying chamber. Two quick-opening mechanisms 4 are provided, arranged opposite each other and distributed on two opposite sides of the chamber body 1, so as to simultaneously squeeze both ends of the sealing door 2, ensuring force balance and improving sealing performance.

[0079] It is understandable that, in order to provide installation space for the quick-opening mechanism 4 on the lower surface of the chamber body 1, four support members are installed on the lower surface of the chamber body 1, and these support members are arranged along the four apex corners of the lower surface of the chamber body 1.

[0080] Reference Figure 4 and Figure 5 As shown, in some embodiments of the present invention, the driving mechanism 3 includes: a floating structure 31 and an execution structure 32;

[0081] The floating structure 31 includes a guide rail 311 on the main body 1 of the chamber and a slider 312 on the guide rail 311. An adjustment component 313 is fixedly provided at one end of the guide rail 311 away from the sealing door 2. A floating base plate 314 is fixedly installed on the slider 312. The adjustment component 313 is connected to the floating base plate 314 in a transmission manner. The adjustment component 313 pushes the floating base plate 314 to reciprocate along the length direction of the guide rail 311.

[0082] The execution structure 32 includes a third drive member 321 and a connector 322, both of which are disposed on the floating base plate 314. The connector 322 is adapted to install the sealing door 2. The drive end of the third drive member 321 is connected to the connector 322 via a pulley assembly to drive the sealing door 2 to rotate.

[0083] Specifically, the adjusting component 313 pushes the floating base plate 314, causing it to slide along the guide rail 311 with the slider 312. The third driving component 321 and the connecting component 322 are mounted on the floating base plate 314. The connecting component 322 is used to connect and install the sealing door 2. The third driving component 321 drives the sealing door 2 to rotate via the pulley assembly, thereby realizing the open and closed states of the sealing door 2. The adjustability of the floating structure 31 enhances the sealing performance between the sealing door 2 and the sealing groove 11. Furthermore, the use of electric drive improves driving efficiency, shortens the opening and closing time of the sealing door 2, and thus improves the substrate drying efficiency.

[0084] Reference Figure 5 As shown, in some embodiments of the present invention, the adjustment assembly 313 includes: an adjustment seat 3131, a limiting plate 3133, an elastic element 3134, and a limiting element 3132; the adjustment seat 3131 is disposed on the side wall of the chamber body 1 and is located at the end of the guide rail 311 away from the sealing door 2; the elastic element 3134 is disposed between the adjustment seat 3131 and the limiting plate 3133; the limiting plate 3133 is fixedly connected to the floating bottom plate 314; the limiting element 3132 passes through the adjustment seat 3131 and one end is threadedly connected to the limiting plate 3133, and the limiting element 3132 rotates so that the elastic element 3134 pushes the limiting plate 3133 to move the floating bottom plate 314.

[0085] Specifically, the limiting plate 3133 is fixedly connected to the floating base plate 314. The limiting member 3132 passes through the adjusting seat 3131 and one end is threadedly connected to the limiting plate 3133. Rotating the limiting member 3132 adjusts the limiting plate 3133, so that the floating base plate 314 slides on the guide rail 311 with the slider 312, thereby realizing the adjustment function. An elastic member 3134 is provided between the mounting seat and the limiting plate 3133. Specifically, the elastic member 3134 is a compression spring, which ensures that the sealing door 2 can remain in a fixed position even when it is not under force, thereby improving the structural stability.

[0086] In some embodiments of the present invention, the execution structure 32 further includes a mounting plate 323 disposed on the floating base plate 314. A third driving member 321 is mounted on one side of the mounting plate 323. The connecting member 322 is a hinge. A driving shaft 328 is provided on the hinge. The driving shaft 328 is connected to the sealing door 2 in a transmission manner. The driving end of the third driving member 321 is connected to the driving shaft 328 through a pulley assembly.

[0087] In some embodiments of the present invention, the pulley assembly includes a first pulley 325 disposed on a mounting plate 323, a second pulley 326 disposed on a connector 322, and a transmission belt 327 adapted to connect the first pulley 325 and the second pulley 326. The first pulley 325 is drivenly connected to the drive end of the third drive member 321, and the second pulley 326 is drivenly connected to the drive shaft 328.

[0088] Specifically, the mounting plate 323 provides the mounting base for the third drive component 321. The first pulley 325 is connected to the third drive component 321, and the second pulley 326 is connected to the drive shaft 328. The sealing door 2 is mounted on the drive shaft 328. The first pulley 325 and the second pulley 326 are connected by a transmission belt 327. The diameter of the first pulley 325 is smaller than the diameter of the second pulley 326, thereby achieving labor-saving transmission. Since the sealing door 2 is relatively heavy, the first pulley 325 drives the second pulley 326 to achieve a large working load and improve the stability of the device.

[0089] It is understandable that the third drive component 321 is a servo motor, which achieves automated operation through electric drive and shortens the closing time of the sealing door 2. When the third drive component 321 drives the sealing door 2 to rotate, the connecting component 322 remains stationary. The connecting component 322 is fixedly installed on the floating base plate 314, so that the connecting component 322 bears the weight of the sealing door 2.

[0090] In some embodiments of the present invention, the execution structure 32 further includes a tensioning plate 324, which is fixedly mounted on the floating base plate 314. The tensioning plate 324 is located between the mounting plate 323 and the transmission belt 327, and is adapted to adjust the tension of the transmission belt 327.

[0091] Specifically, the tensioning plate 324 is fixedly installed on the floating base plate 314. By adjusting the tensioning plate 324 and the mounting plate 323, the tension of the transmission belt 327 can be adjusted to ensure the normal transmission of the pulley assembly and improve reliability.

[0092] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A substrate drying apparatus, characterized in that, include: The chamber body (1) has a drying chamber inside, and a sealing groove (11) communicating with the drying chamber is opened on one side of the chamber body (1). A drive mechanism (3) is provided on the main body of the chamber (1); The sealing door (2) is connected to the driving end of the driving mechanism (3) in a transmission connection. The driving mechanism (3) is adapted to drive the sealing door (2) to rotate so that the sealing door (2) has a closed state that cooperates with the sealing groove (11) and an open state that is separated from the sealing groove (11). A quick-opening mechanism (4) is provided on the main body of the chamber (1). The quick-opening mechanism (4) includes a locking structure (21). The locking structure (21) is adapted to press the outer side of the sealing door (2) in the closed state, so that the inner side of the sealing door (2) abuts against the sealing surface of the sealing groove (11) to seal the drying chamber. The quick-opening mechanism (4) further includes: a first driving member (22) and a second driving member (23) both disposed on the chamber body (1). The driving end of the first driving member (22) is connected to the locking structure (21) in a transmission manner. The upper end face of the chamber body (1) is provided with a mounting hole (12). The first driving member (22) drives the locking structure (21) to reciprocate in the vertical direction, so that the locking structure (21) has a pre-compression state in which one end passes through the mounting hole (12) and extends to be parallel to the outer side of the sealing door (2). The driving end of the second driving member (23) is connected to the locking structure (21) in a transmission manner. The second driving member (23) is adapted to drive the locking structure (21) to rotate around its own axis, so that the locking structure (21) has a pressing state in which it abuts against the outer side of the sealing door (2) in the pre-pressurized state. The locking structure (21) includes: Mounting connection plate (211), the driving end of the first driving member (22) is connected to the mounting connection plate (211) in a transmission connection, so as to drive the mounting connection plate (211) to reciprocate in the vertical direction; Transition piece (212), which is fixedly mounted on the mounting connection plate (211); The adapter (213) is rotatably connected to the transition member (212). The transition member (212) is positioned vertically above the adapter (213). The transition member (212) is adapted to drive the adapter (213) to slide vertically. The adapter (213) is connected to the driving end of the second driving member (23) to drive the adapter (213) to rotate along the axial direction. A locking member (214) is fixedly connected at one end to the adapter (213), and the other end of the locking member (214) is adapted to pass through the mounting hole (12) and extend to the outer side of the sealing door (2) to achieve the pre-pressurization state. After the locking member (214) rotates with the adapter (213), it abuts against the outer side of the sealing surface to achieve the pressing state. The locking element (214) is a locking pin. The locking element (214) has a notch at one end near the sealing door (2). Under pre-compression, the notch is parallel to the outer surface of the sealing door (2). The distance between the axis of the locking element (214) and the notch is less than the radius of the locking element (214). Under the pre-pressure state, there is a first gap between the sealing surface of the sealing door (2) and the sealing groove (11), and there is a second gap between the notch and the outer side of the sealing door (2). A sealing element is provided in the first gap. In the pressed state, the notch forms an angle with the outer side of the sealing door (2), and the distance between the axis of the locking member (214) and the outer side of the sealing door (2) is less than or equal to the radius of the locking member (214); Multiple locking elements (214) are provided and are evenly arranged along the length direction of the mounting connecting plate (211), and the length direction of the mounting connecting plate (211) is consistent with the length direction of the sealing door (2).

2. The substrate drying apparatus according to claim 1, characterized in that, In the compressed state, the direction of the force exerted by the sealing door (2) on the locking member (214) is perpendicular to the axis of the locking member (214).

3. The substrate drying apparatus according to claim 1, characterized in that, The mounting connecting plate (211) has a plurality of connecting holes evenly provided along its length direction. The locking member (214), the transition member (212) and the adapter (213) are all provided in a plurality of manner. One end of the plurality of locking members (214) passes through the transition member (212) into the connecting hole.

4. The substrate drying apparatus according to claim 1, characterized in that, The quick-opening mechanism (4) also includes a transmission assembly, and the driving end of the second driving member (23) is connected to the locking structure (21) through the transmission assembly.

5. The substrate drying apparatus according to claim 4, characterized in that, The transmission assembly includes: A transmission connecting plate (241) is provided, one end of which is connected to the transmission end of the second driving member (23). The second driving member (23) drives the transmission connecting plate (241) to slide back and forth along the length direction of the mounting connecting plate (211). A sleeve rod (242), one end of which is fixedly mounted on the transmission connecting plate (241); A lever (243) is driven to the other end of the sleeve (242), and the other end of the lever (243) is fixedly connected to the adapter (213). The transmission connecting plate (241) drives the lever (243) to rotate so that the locking structure (21) is in a pressed state.

6. The substrate drying apparatus according to any one of claims 1 to 4, characterized in that, Two quick-opening mechanisms (4) are provided, and are respectively arranged on two opposite sides of the chamber body (1).

7. The substrate drying apparatus according to any one of claims 1 to 4, characterized in that, The drive mechanism (3) includes: The floating structure (31) includes a guide rail (311) on the main body of the chamber (1) and a slider (312) on the guide rail (311). An adjustment component (313) is fixedly provided at one end of the guide rail (311) away from the sealing door (2). A floating base plate (314) is fixedly installed on the slider (312). The adjustment component (313) is connected to the floating base plate (314) in a transmission manner. The adjustment component (313) pushes the floating base plate (314) to reciprocate along the length direction of the guide rail (311). The execution structure (32) includes a third drive member (321) and a connector (322) both disposed on the floating base plate (314). The connector (322) is adapted to install the sealing door (2). The drive end of the third drive member (321) is connected to the connector (322) via a pulley assembly to drive the sealing door (2) to rotate.

8. The substrate drying apparatus according to claim 7, characterized in that, The adjustment component (313) includes An adjustment seat (3131) is provided on the side wall of the chamber body (1) and is located at the end of the guide rail (311) away from the sealing door (2); A limiting plate (3133) is fixedly connected to the floating base plate (314); The elastic element (3134) is disposed between the adjusting seat (3131) and the limiting plate (3133). A limiting member (3132) is inserted through the adjusting seat (3131) and one end is threadedly connected to the limiting plate (3133). The limiting member (3132) rotates so that the elastic member (3134) pushes the limiting plate (3133) to move the floating base plate (314).

9. The substrate drying apparatus according to claim 7, characterized in that, The execution structure (32) further includes a mounting plate (323) disposed on the floating base plate (314). The third drive member (321) is mounted on one side of the mounting plate (323). The connecting member (322) is a hinge. The hinge is provided with a drive shaft (328). The drive shaft (328) is connected to the sealing door (2) in a transmission manner. The drive end of the third drive member (321) is connected to the drive shaft (328) through the pulley assembly.

10. The substrate drying apparatus according to claim 9, characterized in that, The pulley assembly includes a first pulley (325) disposed on the mounting plate (323), a second pulley (326) disposed on the connector (322), and a drive belt (327) adapted to connect the first pulley (325) and the second pulley (326). The first pulley (325) is drivenly connected to the drive end of the third drive member (321), and the second pulley (326) is drivenly connected to the drive shaft (328).

11. The substrate drying apparatus according to claim 10, characterized in that, The execution structure (32) further includes a tension plate (324), which is fixedly installed on the floating base plate (314). The tension plate (324) is located between the mounting plate (323) and the transmission belt (327), and the tension plate (324) is adapted to adjust the tension of the transmission belt (327).

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