一种基于倾斜角度调制的低像素采样哈特曼波前传感器方法

By introducing a tilt modulator into the Shaker-Hartmann wavefront sensor for multi-angle modulation, the amount of information in the sub-spot image is increased, which solves the problem of insufficient wavefront detection accuracy under low pixel sampling and achieves higher wavefront detection accuracy.

CN117387754BActive Publication Date: 2026-07-17INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
Filing Date
2023-10-20
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The Shaker-Hartmann wavefront sensor has insufficient wavefront detection accuracy under low pixel sampling conditions. There is a contradiction between the number of pixels occupied by the sub-aperture and the wavefront detection accuracy, making it difficult to achieve high-precision wavefront detection in high sampling frequency scenarios.

Method used

By introducing a tilt modulator to perform multi-angle tilt modulation on the incident light wave, the amount of information in the sub-spot image is increased, and the accuracy of wavefront detection is improved by using centroid offset calculation and wavefront restoration algorithm.

Benefits of technology

The accuracy of wavefront detection was significantly improved under low-pixel sampling conditions, resulting in a higher wavefront reconstruction effect.

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Abstract

本发明公开了一种基于倾斜角度调制的低像素采样哈特曼波前传感器方法,该方法通过引入倾斜调制器件实现对入射光波多角度倾斜调制,从而增加了子光斑图像信息量,以提高波前探测精度。与传统夏克‑哈特曼波前传感器复原算法相比,本发明可以在子孔径低像素采样下以更高精度复原波前。
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