Shifting diaphragm

Abstract

This application belongs to the field of semiconductor testing equipment technology, and in particular relates to a movable aperture. The movable aperture includes an aperture assembly, a heat-conducting element, and a temperature-sensing element; the aperture assembly includes an aperture, and the heat-conducting element and temperature-sensing element are both connected to the aperture assembly; the temperature-sensing element is configured to acquire the temperature of the aperture, and the heat-conducting element is configured to adjust the temperature of the aperture based on the temperature acquired by the temperature-sensing element. Therefore, by using the heat-conducting element and the temperature-sensing element in conjunction with a module with temperature control function to achieve closed-loop control, the aperture is kept at a suitable temperature to heat and evaporate particles, effectively preventing aperture deformation or even blockage caused by carbon buildup.

Description

Technical Field

[0001] This application belongs to the field of semiconductor testing equipment technology, and in particular relates to a movable aperture. Background Technology

[0002] An aperture is used in electron microscopes. The aperture has an aperture hole to filter and constrain the size and roundness of the electron beam spot, and is used to adjust the energy of the beam during scanning and change the resolution of the electron microscope.

[0003] However, with prolonged use, particles in the environment where the aperture is located will deposit in the aperture aperture, causing carbon buildup, which changes the shape of the aperture aperture and may even cause blockage, thus affecting the detection results. Summary of the Invention

[0004] This application provides a movable aperture to solve the technical problem of carbon buildup in the aperture hole of existing apertures.

[0005] The movable aperture provided in this application includes an aperture assembly, a heat conduction element, and a temperature sensing element; the aperture assembly includes an aperture, and the heat conduction element and the temperature sensing element are both connected to the aperture assembly; the temperature sensing element is configured to acquire the temperature of the aperture, and the heat conduction element is configured to adjust the temperature of the aperture based on the temperature acquired by the temperature sensing element.

[0006] In an optional embodiment of this application, the movable aperture also includes a position adjustment assembly, the aperture assembly being connected to the position adjustment assembly, and the position adjustment assembly being used to adjust the position of the aperture assembly.

[0007] In an optional embodiment of this application, the position adjustment assembly includes a support frame, a guide rod, and a drive module; the drive module is connected to the support frame, and the guide rod passes through the support frame along a first direction and is connected to the drive module; the aperture assembly is connected to the guide rod and is located on the side of the support frame away from the drive module in the first direction; the drive module is used to drive the guide rod to adjust the position of the aperture assembly.

[0008] In an optional embodiment of this application, the driving module includes a first driving module and a second driving module; the second driving module is connected to the first driving module, and the guide rod is connected to the second driving module; the first driving module is used to drive the second driving module and drive the aperture assembly to move along a first direction through the guide rod; the second driving module is used to drive the guide rod to drive the aperture assembly to move along a second direction; wherein, the first direction is perpendicular to the second direction.

[0009] In an optional embodiment of this application, the first drive module includes a first power component, a first guide rail, a first slider, and a guide seat; the first guide rail extends along a first direction and is connected to a support frame, the first slider is movably connected to the first guide rail, and the guide seat is connected to the first slider; the first power component is connected to the support frame and is located on the side of the support frame away from the aperture assembly in the first direction; the first power component is configured to drive the guide seat and drive the first slider to move along the first guide rail.

[0010] In an optional embodiment of this application, the second drive module includes a second power component, a second guide rail, a second slider, and a movable frame; the second guide rail extends along a second direction and is connected to a guide seat, the second slider is movably connected to the second guide rail, the movable frame is connected to the second slider, and the guide rod is connected to the movable frame; the second power component is connected to the movable frame to drive the movable frame to move the second slider along the second guide rail.

[0011] In an optional embodiment of this application, the first drive module further includes a first elastic element, which is arranged on both sides of the support frame in the second direction; the first elastic element extends along the first direction and is connected at one end to the guide seat and at the other end to the support frame.

[0012] In an optional embodiment of this application, the second drive module further includes a second elastic element, which extends along a second direction and is sandwiched between the movable frame and the second power component.

[0013] In an optional embodiment of this application, the movable aperture further includes a deformable sleeve, and the guide rod is provided with an annular protrusion; the deformable sleeve is sleeved on the guide rod and located on the side of the support frame away from the drive module in the first direction; one end of the deformable sleeve is connected to the support frame and the other end is connected to the annular protrusion.

[0014] In an optional embodiment of this application, the movable aperture further includes an electrode, which is disposed in the position adjustment assembly and connected to the heat conduction element and the temperature sensing element.

[0015] In summary, the movable aperture provided in this application has at least the following beneficial effects:

[0016] The aperture assembly in this movable aperture integrates components with temperature regulation capabilities to adjust the aperture's temperature. Specifically, closed-loop control is achieved through heat conduction and temperature sensing elements in conjunction with a temperature control module, ensuring the aperture is at a suitable temperature to heat and evaporate volatile particles. This effectively prevents aperture deformation or even blockage caused by carbon buildup. Additionally, heating the aperture also causes electrons accumulated on it to dissipate, preventing the formation of a charge-growth effect. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application; those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0018] Figure 1 This is a simplified schematic diagram of the structure of a movable aperture according to one embodiment of this application;

[0019] Figure 2 This is a schematic diagram of a movable aperture according to one embodiment of this application;

[0020] Figure 3 Showed Figure 2 A schematic diagram of the moving aperture in the image from another perspective;

[0021] Figure 4 Showed Figure 2 Exploded view of the moving aperture in the image;

[0022] Figure 5 Showed Figure 2 A cross-sectional view of the movable aperture in the image.

[0023] The attached figures are labeled as follows:

[0024] 10. Position adjustment assembly; 11. Support frame; 111. First upright plate; 112. Second upright plate; 113. Base plate; 12. Guide rod; 121. Ring protrusion; 13. Drive module; 101. 102. Screws;

[0025] 131. First drive module; 1311. First power component; 1312. First guide rail; 1313. First slider; 1314. Guide seat; 1315. First elastic element; 1316. First photoelectric sensor; 1317. First light-blocking element;

[0026] 132. Second drive module; 1321. Second power component; 1322. Second guide rail; 1323. Second slider; 1324. Movable frame; 13241. Main body plate; 13242. Pressure plate; 1325. Second elastic element; 1326. Second photoelectric sensor; 1327. Second light blocking element; A. Limiting groove;

[0027] 20. Aperture assembly; 21. Aperture; 22. Mount; H. Aperture hole;

[0028] 30. Heat-conducting component; 40. Temperature-sensing component; 50. Deformation sleeve; 60. Electrode. Detailed Implementation

[0029] In the description of this application, it should be understood that the use of terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" to indicate orientation or positional relationship, unless otherwise specified, is understood to be based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0030] Furthermore, features specified with "first" or "second" for descriptive purposes only should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Features specified with "first" or "second" may explicitly or implicitly include at least one of the specified features. The description of "multiple" generally means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] In this application, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can be a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0032] In the description of this specification, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0033] Figure 1 This is a simplified schematic diagram of the structure of a movable aperture according to one embodiment of this application. Please refer to... Figure 1The movable aperture includes an aperture assembly 20, a heat conduction element 30, and a temperature sensing element 40. The aperture assembly 20 includes an aperture 21, and the heat conduction element 30 and the temperature sensing element 40 are both connected to the aperture assembly 20. The temperature sensing element 40 is configured to acquire the temperature of the aperture 21, and the heat conduction element 30 is configured to adjust the temperature of the aperture 21 based on the temperature acquired by the temperature sensing element 40.

[0034] It should be understood that the aperture 21 is provided with an aperture H, which is used to block stray electrons so as to allow the central beam of the electron beam to pass through the aperture H, and to limit the divergence angle of the focused electron beam through the aperture H, thereby limiting the size and shape of the beam spot.

[0035] In this embodiment, the aperture assembly 20 also integrates components for temperature regulation to adjust the temperature of the aperture 21. Specifically, the aperture assembly 20 is provided with a heat conduction element 30 and a temperature sensing element 40, wherein the heat conduction element 30 can heat the aperture 21, and the temperature sensing element 40 can obtain the temperature of the aperture 21.

[0036] In an optional embodiment, the aperture assembly 20 also integrates a temperature control circuit connected to the temperature sensing element 40. The temperature control circuit controls the power supply to the heat conduction element 30 based on the signal output by the temperature sensing element 40, thereby controlling the operation of the heat conduction element 30 to achieve temperature regulation. For example, the temperature sensing element 40 is a temperature sensor that can output voltage. The temperature control circuit includes a comparator circuit and is designed with a threshold voltage. When the voltage output by the temperature sensor is higher or lower than the threshold, it compares the voltage and outputs a corresponding level signal to control the power supply to the heat conduction element 30 (e.g., through a relay, solenoid valve, etc. to achieve power supply on / off control).

[0037] In another alternative embodiment, the movable aperture is applied in a scanning electron microscope. The temperature sensing element 40 is connected to a control device (such as a programmable digital integrated circuit FPGA, digital signal processor DSP, etc.) in the scanning electron microscope. The control device can control the power supply of the heat conduction element 30 according to the signal sent by the temperature sensing element 40, thereby controlling the operation of the heat conduction element 30 to achieve temperature regulation.

[0038] In summary, closed-loop control is achieved by using the heat conduction element 30 and the temperature sensing element 40 in conjunction with a module with temperature control function, so that the aperture 21 is at a suitable temperature to heat the volatile particles, effectively preventing the aperture hole H from being deformed or even blocked due to carbon buildup. In addition, heating the aperture 21 can also cause the electrons accumulated on the aperture 21 to detach, preventing the formation of the charge effect.

[0039] In practical applications, the aperture 21 can be made of materials with high thermal conductivity, resistance to oxidation, and low electrical resistance, such as copper alloys and aluminum alloys. The heat conduction element 30 uses an electric heating element, such as an electric heating ceramic plate or an electric heating film. Of course, the temperature sensing element 40 is not limited to a temperature sensor, but may also include, for example, thermocouples and thermistors.

[0040] In some alternative embodiments, the movable aperture also includes a position adjustment assembly 10, to which the aperture assembly 20 is connected, and the position adjustment assembly 10 is used to adjust the position of the aperture assembly 20.

[0041] In this embodiment, the position of the aperture assembly 20 is adjusted by the position adjustment assembly 10, which in turn changes the position of the aperture 21 to adapt to different application scenarios.

[0042] In one optional embodiment, the aperture 21 has multiple aperture holes H, each with a different aperture size. Thus, depending on the application scenario, the position of the aperture 21 can be adjusted via the position adjustment assembly 10 to select an aperture hole H with a suitable aperture size to filter and confine the electron beam.

[0043] exist Figure 1 In the illustrated embodiment, the multiple apertures H are arranged in a rectangular array, with each aperture H in each row having a different diameter and each aperture H in each column having the same diameter. Of course, the arrangement of the multiple apertures H is not limited to this; the arrangement of the multiple apertures H can be matched with the adjustable orientation of the position adjustment assembly 10, for example, they can also be arranged in a fan-shaped array, etc.

[0044] It should be understood that even if one of the aperture holes H becomes clogged with carbon buildup due to long-term use, it can still be switched to another aperture hole H of the same diameter. Therefore, by having multiple aperture holes H of the same diameter on the aperture 21, alternative aperture positions are increased to extend the service life of the aperture 21.

[0045] Figure 2 This is a schematic diagram of a movable aperture according to one embodiment of this application. Please refer to... Figure 2 In some optional embodiments, the aperture assembly 20 further includes a mounting bracket 22, an aperture 21, a heat-conducting element 30, and a temperature-sensing element 40. Figure 2 The temperature sensing element 40 (not shown) is mounted on the fixed frame 22. The temperature sensing element 40 is connected to the aperture 21 to obtain the temperature of the aperture 21.

[0046] In one optional embodiment, the mounting bracket 22 is made of a material with high thermal conductivity, and the heat conduction element 30 is mounted on the mounting bracket 22 and heats the aperture 21 by heating the mounting bracket 22. In another optional embodiment, the heat conduction element 30 is mounted on the mounting bracket 22 and connected to the aperture 21, and the heat conduction element 30 can directly heat the aperture 21.

[0047] Please continue reading. Figure 2 In some alternative embodiments, the position adjustment assembly 10 includes a support frame 11, a guide rod 12, and a drive module 13.

[0048] The drive module 13 is connected to the support frame 11, and the guide rod 12 passes through the support frame 11 along a first direction and is connected to the drive module 13. The aperture assembly 20 is connected to the guide rod 12 and is located on the side of the support frame 11 away from the drive module 13 in the first direction. The drive module 13 is used to drive the guide rod 12 to adjust the position of the aperture assembly 20.

[0049] In this embodiment, each component of the position adjustment assembly 10 is fixedly installed based on the support frame 11, and the drive module 13 is used to provide freedom of movement to drive the guide rod 12 to move, thereby driving the aperture assembly 20 to change the position of the aperture 21.

[0050] In a further optional embodiment, the drive module 13 includes a first drive module 131 and a second drive module 132. The second drive module 132 is connected to the first drive module 131, and the guide rod 12 is connected to the second drive module 132. The first drive module 131 drives the second drive module 132 and, through the guide rod 12, moves the aperture assembly 20 along a first direction. The second drive module 132 drives the guide rod 12 to move the aperture assembly 20 along a second direction. The first direction is perpendicular to the second direction.

[0051] In this embodiment, the drive module 13 provides two degrees of freedom of movement: the first degree of freedom is provided by the first drive module 131, and the second degree of freedom is provided by the second drive module 132. The first direction is the axial direction of the guide rod 12, and the second direction is the radial direction of the guide rod 12.

[0052] The first drive module 131 is mounted on the support frame 11, and the second drive module 132 is mounted on the first drive module 131, thus fixing the entire drive module 13 on the support frame 11.

[0053] The aperture assembly 20 is driven by the guide rod 12 to adjust its position in the first direction and the second direction. The movement of the guide rod 12 in the first direction is driven by the first drive module 131, and the movement of the guide rod 12 in the second direction is driven by the second drive module 132.

[0054] Specifically, since the guide rod 12 is connected to the second drive module 132, and the second drive module 132 is connected to the first drive module 131, the first drive module 131 can drive the second drive module 132 to move along the first direction, thereby driving the guide rod 12 to move along the first direction. The second drive module 132 can directly drive the guide rod 12 to move along the second direction.

[0055] As can be seen, in this embodiment, the first drive module 131 does not directly drive the guide rod 12, but indirectly drives the guide rod 12 through the second drive module 132. The cooperation of the first drive module 131 and the second drive module 132 provides the guide rod 12 with two degrees of freedom in order to adjust the position of the aperture 21.

[0056] Figure 3 Showed Figure 2 A schematic diagram of the moving aperture in the image from another perspective. Figure 4 Showed Figure 2 Exploded view of the moving aperture in the image. Figure 5 Showed Figure 2 A cross-sectional view of the movable aperture in the image. See also... Figures 3 to 5 In some optional embodiments, the first drive module 131 includes a first power component 1311, a first guide rail 1312, a first slider 1313, and a guide seat 1314.

[0057] The first guide rail 1312 extends along the first direction and is connected to the support frame 11, the first slider 1313 is movably connected to the first guide rail 1312, and the guide seat 1314 is connected to the first slider 1313.

[0058] The first power component 1311 is connected to the support frame 11 and is located on the side of the support frame 11 away from the aperture assembly 20 in a first direction. The first power component 1311 is configured to drive the guide seat 1314 and drive the first slider 1313 to move along the first guide rail 1312.

[0059] In this embodiment, the first drive module 131 is a linear slider guide rail module, and the first power component 1311 is a power source to provide power to drive the guide seat 1314 to move along the first direction, thereby driving the first slider 1313 to move along the first guide rail 1312. The cooperation between the first slider 1313 and the first guide rail 1312 ensures the reliability of the movement of the guide seat 1314 in the first direction.

[0060] In one alternative embodiment, the first power component 1311 and the guide seat 1314 can be connected by a threaded connection such as a ball screw or screw drive to achieve linear transmission. However, threaded connections have gaps, making it difficult to guarantee repeatability and positioning accuracy.

[0061] In the case of linear transmission using threaded engagement, to ensure repeatability, in a further optional embodiment, the first drive module 131 further includes a first elastic element 1315, which is arranged on both sides of the support frame 11 in the second direction. The first elastic element 1315 extends along the first direction and is connected at one end to the guide seat 1314 and at the other end to the support frame 11.

[0062] In this embodiment, the first elastic element 1315 is always in a stretched state. Regardless of the position of the guide seat 1314 relative to the support frame 11 in the first direction, the first elastic element 1315 always provides tension to achieve the purpose of eliminating gaps, thereby ensuring the repeatability of the first drive module 131 in the first direction.

[0063] In addition, the support frame 11 is provided with first elastic elements 1315 on both sides in the second direction, thus ensuring that the tension exerted by each first elastic element 1315 on the guide seat 1314 will not cause the guide seat 1314 to be biased. In the illustrated embodiment, the number of first elastic elements 1315 is 2, but it is not limited to this, as long as the number of first elastic elements 1315 is even.

[0064] In some optional embodiments, the first drive module 131 further includes a first photoelectric sensor 1316 and a first light-blocking element 1317. The first photoelectric sensor 1316 is connected to the guide seat 1314, and the first light-blocking element 1317 is connected to the support frame 11. The first photoelectric sensor 1316 and the first light-blocking element 1317 cooperate to determine the reset position of the guide seat 1314 in a first direction.

[0065] In this embodiment, the position of the first light-blocking component 1317 is fixed, and the guide seat 1314 can move along the first direction. Through the cooperation of the first photoelectric sensor 1316 and the first light-blocking component 1317, the first photoelectric sensor 1316 sends a signal to determine whether the guide seat 1314 is in the reset position in the first direction.

[0066] In the illustrated embodiment, the first photoelectric sensor 1316 is a slotted photoelectric switch. When the guide seat 1314 is in the reset position in the first direction, the first light-blocking member 1317 extends into the slot of the slotted photoelectric switch to block the light, thereby causing the slotted photoelectric switch to emit a switching signal. Of course, the first photoelectric sensor 1316 is not limited to a slotted photoelectric switch; for example, it can also be a photoelectric proximity switch.

[0067] In some alternative embodiments, the second drive module 132 includes a second power component 1321, a second guide rail 1322, a second slider 1323, and a movable frame 1324.

[0068] The second guide rail 1322 extends along the second direction and is connected to the guide seat 1314. The second slider 1323 is movably connected to the second guide rail 1322. The movable frame 1324 is connected to the second slider 1323. The guide rod 12 is connected to the movable frame 1324.

[0069] The second power component 1321 is connected to the movable frame 1324 to drive the movable frame 1324 to move the second slider 1323 along the second guide rail 1322.

[0070] In this embodiment, the second drive module 132 is a slider guide rail linear module, the second power component 1321 is a power source, the second slider 1323 can move along the second guide rail 1322, the second power component 1321 provides power to drive the movable frame 1324 to move in the second direction, and the second slider 1323 cooperates with the second guide rail 1322 to ensure the stability of the movable frame 1324 in the second direction.

[0071] As can be seen from the foregoing, the guide seat 1314 in the first drive module 131 can move along the first direction, and the movable frame 1324 is connected to the guide seat 1314 through the second guide rail 1322 and the second slider 1323. The movable frame 1324 can move along the guide seat 1314 in the first direction.

[0072] Therefore, the movable frame 1324 has a first degree of freedom of movement and a second degree of freedom of movement. Correspondingly, the guide rod 12 connected to the movable frame 1324 also has a first degree of freedom of movement and a second degree of freedom of movement, thereby changing the position of the aperture assembly 20 in the first and second directions.

[0073] In the illustrated embodiment, the movable frame 1324 includes a main plate 13241 and a pressure plate 13242. The main plate 13241 and the pressure plate 13242 are connected by screws to clamp and fix one end of the guide rod 12. In addition, the main plate 13241 is an irregularly shaped plate and an interface is formed on one side of the plate in the second direction. Furthermore, the movable frame 1324, the guide seat 1314, the first slider 1313, and the support frame 11 together form a limiting groove A. The second power component 1321 is fixedly installed at the interface of the main plate 13241 and received in the limiting groove A.

[0074] In one optional embodiment, the second power component 1321 and the movable frame 1324 can be connected by a threaded connection such as a ball screw or screw drive to achieve linear transmission. In the case of a threaded connection transmission, to ensure repeatability and positioning accuracy, in a further optional embodiment, the second drive module 132 further includes a second elastic element 1325, which extends along a second direction and is sandwiched between the movable frame 1324 and the second power component 1321.

[0075] In this embodiment, the second elastic element 1325 is always in a compressed state. Regardless of the position of the movable frame 1324 relative to the second power member 1321 in the second direction, the second elastic element 1325 always provides pressure to the movable frame 1324 to eliminate the threaded fit clearance, thereby ensuring the repeatability of the movable frame 1324 in the second direction.

[0076] In the illustrated embodiment, there are two second elastic elements 1325, which are spaced apart in the first direction. One end of each second elastic element 1325 abuts against the movable frame 1324, and the other end abuts against the second power member 1321. Of course, the number of second elastic elements 1325 is not limited to this, as long as multiple second elastic elements 1325 are arranged symmetrically about the output shaft of the second power member 1321.

[0077] In specific applications, both the first elastic element 1315 and the second elastic element 1325 are springs, but they are not limited to this. For example, elastic rubber pads can also be used.

[0078] In a further optional embodiment, the second drive module 132 further includes a second photoelectric sensor 1326 and a second light-blocking element 1327. The second photoelectric sensor 1326 is connected to the guide seat 1314, and the second light-blocking element 1327 is connected to the movable frame 1324. The second photoelectric sensor 1326 and the second light-blocking element 1327 cooperate to determine the reset position of the movable frame 1324 in the second direction.

[0079] In this embodiment, the second light-blocking element 1327, the second photoelectric sensor 1326, and the movable frame 1324 can all move along the guide seat 1314 in the first direction. If the movement only occurs in the first direction, the relative positions of the second light-blocking element 1327 and the second photoelectric sensor 1326 will not change. When the movement occurs in the second direction, the relative positions of the second light-blocking element 1327 and the second photoelectric sensor 1326 in the second direction will change.

[0080] Therefore, the second photoelectric sensor 1326 can cooperate with the second light-blocking element 1327 to make the second photoelectric sensor 1326 send a signal to determine whether the movable frame 1324 is in the reset position in the second direction.

[0081] In the illustrated embodiment, the second photoelectric sensor 1326 is also a slotted photoelectric switch. When the movable frame 1324 is in the reset position in the second direction, the second light-blocking member 1327 extends into the slot of the slotted photoelectric switch to block the light, thereby causing the slotted photoelectric switch to emit a switching signal. Of course, the second photoelectric sensor 1326 is not limited to a slotted photoelectric switch; for example, it can also be a photoelectric proximity switch.

[0082] It should be understood that when the guide seat 1314 is in the reset position in the first direction, the movable frame 1324 moves with the guide seat 1314 in the first direction, and accordingly, the movable frame 1324 is in the corresponding reset position in the first direction.

[0083] As can be seen, the reset position of the movable frame 1324 in the first direction and the reset position in the second direction are determined by the cooperation of the first photoelectric sensor 1316 with the first light blocking component 1317 and the cooperation of the second photoelectric sensor 1326 with the second light blocking component 1327.

[0084] In an optional embodiment, both the first power component 1311 and the second power component 1321 are servo motors driven by an incremental encoder. Those skilled in the art will understand that servo motors driven by an incremental encoder require a zero-return operation. As can be seen from the above embodiments, the reset position in the first direction is the zero position in the first direction, and the reset position in the second direction is the zero position in the second direction. The displacement of the movable frame 1324 in the first direction and the displacement in the second direction are both referenced to the corresponding zero position.

[0085] It should be understood that the first power component 1311 and the second power component 1321 may also be driven by a servo motor in conjunction with an absolute encoder. Since no zero-return operation is required, the corresponding photoelectric sensor and light-blocking component can be eliminated.

[0086] In the illustrated embodiment, the first power component 1311 and the second power component 1321 are servo motors with manual adjustment functions. These servo motors are equipped with knobs to achieve manual adjustment. Accordingly, the movable aperture has two operating modes: manual mode and automatic mode.

[0087] In manual mode, the position of the aperture assembly 20 is adjusted by manually operating the corresponding power components. In automatic mode, the position of the aperture assembly 20 is adjusted by driving the corresponding power components through a preset control signal. In practical applications, manual mode can be used for aperture testing, while automatic mode can be used in actual production.

[0088] As can be seen from the above, through two vertically intersecting linear drive modules, the drive guide rod 12 drives the aperture assembly 20 to move in the first direction and the second direction.

[0089] In some alternative embodiments, the movable aperture further includes a deformable sleeve 50, and the guide rod 12 is provided with an annular protrusion 121. The deformable sleeve 50 is fitted over the guide rod 12 and located on the side of the support frame 11 away from the drive module 13 in a first direction. One end of the deformable sleeve 50 is connected to the support frame 11, and the other end is connected to the annular protrusion 121.

[0090] It should be noted that the aperture 21 needs to be placed in a sealed chamber, where a vacuum environment can be formed. In this embodiment, both ends of the deformable sleeve 50 are sealed by the support frame 11 and the annular protrusion 121, respectively. The deformable sleeve 50 is mainly used to isolate the sealed chamber and protect the vacuum environment formed in the sealed chamber.

[0091] In addition, the deformation sleeve 50 can deform to accommodate the movement of the guide rod 12 in the first and second directions. In specific applications, the deformation sleeve 50 is made of a bellows, but it is not limited to this; for example, a rubber tube can also be used.

[0092] In some alternative embodiments, the support frame 11 includes a first upright plate 111, a second upright plate 112, and a base plate 113, wherein the first upright plate 111 and the second upright plate 112 are spaced apart in a first direction and connected to the base plate 113.

[0093] The first power component 1311 and the first light-blocking component 1317 are both fixedly installed on the first upright plate 111, the first guide rail 1312 is fixedly installed on the base plate 113, and the second upright plate 112 is provided with a through hole to allow the guide rod 12 to pass through. The through hole on the second upright plate 112 is clearance-fitted with the guide rod 12 to ensure the degree of freedom of movement of the guide rod 12 in the first direction and the second direction.

[0094] In addition, in this embodiment, the deformable sleeve 50 is connected to the second vertical plate 112 to cover the through hole on the second vertical plate 112, and the other end is sealed by the annular protrusion 121 to prevent particles from flowing into the sealed chamber from the through hole on the second vertical plate 112.

[0095] exist Figure 4 In the embodiment shown, the guide seat 1314 is provided with screw 101, the base plate 113 is provided with screw 102, and the two ends of the first elastic member 1315 are respectively fixed on screw 101 and screw 102.

[0096] In some alternative embodiments, the movable aperture also includes an electrode 60, which is disposed on the position adjustment assembly 10 and connected to the heat conduction element 30 and the temperature sensing element 40.

[0097] In this embodiment, electrode 60 is used to connect to a power source and transmit electrical signals, thereby connecting the heat conduction element 30 to the power source and the temperature sensing element 40 to the control device.

[0098] In one alternative embodiment, electrode 60 is fixedly mounted on the second upright plate 112. In specific applications, electrode 60 may be a vacuum electrode.

[0099] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A movable aperture, characterized in that, The movable aperture includes an aperture assembly, a heat conduction element, a temperature sensing element, and a position adjustment assembly; The aperture assembly includes an aperture and a mounting frame. The aperture, the heat conduction element, and the temperature sensing element are all connected to the mounting frame of the aperture assembly. The aperture assembly is connected to the position adjustment assembly, which is used to adjust the position of the aperture assembly. The heat conduction element heats the bracket to raise the temperature of the aperture; the temperature sensing element is configured to acquire the temperature of the aperture; and the heat conduction element is configured to adjust the temperature of the aperture based on the temperature acquired by the temperature sensing element. The position adjustment assembly includes a support frame, a guide rod, and a drive module. The drive module is connected to the support frame. The guide rod passes through the support frame along a first direction and is connected to the drive module. The aperture assembly is connected to the guide rod and is located on the side of the support frame away from the drive module in the first direction. The drive module includes a first drive module and a second drive module. The first drive module includes a guide seat and a first elastic element. The second drive module includes a second power component, a movable frame, and a second elastic element. The first elastic element is arranged on both sides of the support frame in the second direction. The first elastic element extends along the first direction and is connected at one end to the guide seat and at the other end to the support frame. The second elastic element extends along the second direction and is sandwiched between the movable frame and the second power component. The first direction is perpendicular to the second direction.

2. The movable aperture according to claim 1, characterized in that, The second drive module is connected to the first drive module, and the guide rod is connected to the second drive module; The first drive module is used to drive the second drive module and drive the aperture assembly to move along the first direction through the guide rod; The second drive module is used to drive the guide rod to move the aperture assembly along the second direction.

3. The movable aperture according to claim 1, characterized in that, The first drive module also includes a first power component, a first guide rail, and a first slider; The first guide rail extends along the first direction and is connected to the support frame, the first slider is movably connected to the first guide rail, and the guide seat is connected to the first slider; The first power component is connected to the support frame and is located on the side of the support frame away from the aperture assembly in the first direction; the first power component is configured to drive the guide seat and drive the first slider to move along the first guide rail.

4. The movable aperture according to claim 1, characterized in that, The second drive module also includes a second guide rail and a second slider; The second guide rail extends along the second direction and is connected to the guide seat; the second slider is movably connected to the second guide rail; the movable frame is connected to the second slider; and the guide rod is connected to the movable frame. The second power component is connected to the movable frame to drive the movable frame to move the second slider along the second guide rail.

5. The movable aperture according to claim 1, characterized in that, The movable aperture also includes a deformable sleeve, and the guide rod is provided with an annular protrusion; The deformable sleeve is fitted over the guide rod and is located on the side of the support frame away from the drive module in the first direction; One end of the deformable sleeve is connected to the support frame, and the other end is connected to the annular protrusion.

6. The movable aperture according to any one of claims 1 to 5, characterized in that, The movable aperture also includes an electrode, which is disposed in the position adjustment assembly and connected to the heat conduction element and the temperature sensing element.

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