Electron gun high-voltage parameter measuring device

CN117528996BActive Publication Date: 2026-10-16RES INST OF PHYSICAL & CHEM ENG OF NUCLEAR IND
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Patent Information

Application Number
CN202311484422.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-11-08
Publication Date
2026-10-16
Estimated Expiration
2043-11-08

AI Technical Summary

Technical Problem

[0005]有鉴于此,本申请实施例提供一种电子枪高压参数测量装置,至少部分解决现有技术中电子束关键参数的监测可靠性低的问题,填补了目前的技术空白,具有很高的应用及推广价值

Benefits of technology

[0021] The electron gun high-voltage parameter measuring device in this embodiment adopts a modular design, with the high-voltage divider assembly and signal acquisition box installed independently according to their functions. This design is simple and quick to operate, allowing for direct replacement and installation even under power-off conditions. By setting up the high-voltage divider assembly, and based on its voltage division acquisition, the low-voltage side voltage can be directly measured in conjunction with the signal acquisition box. By calculating the voltage division factor of the high-voltage divider itself, the electron gun sampling voltage value can be reconstructed, solving the problem of the inability to independently and directly measure the electron beam high voltage. By measuring in parallel with the electron gun's main circuit, the high voltage output of the electron gun itself is not affected, and the electron beam trajectory is not impacted, enabling accurate measurement of the electron gun signal. Simultaneously, the signal acquisition box can also measure signals such as the electron gun beam current and aperture current. Furthermore, the measuring device of this application has a simple and reliable structure, provides accurate measurements, and is easy to maintain, ensuring precise control of the electron beam state and safe operation of the system during electron gun operation.

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Abstract

The application provides an electron gun high-voltage parameter measuring device, and belongs to the technical field of high-voltage and current measuring equipment, and specifically comprises a high-voltage divider assembly and a signal acquisition patch panel for collecting the electron beam parameters of an electron gun. The high-voltage divider assembly comprises a high-voltage sampling point and a high-voltage divider body. One end of the high-voltage divider body is a high-voltage end of the high-voltage divider, and the other end of the high-voltage divider body is a low-voltage end of the high-voltage divider. The high-voltage sampling point is connected with the electron gun, an electron gun power supply and the high-voltage end of the high-voltage divider through an electron gun high-voltage line respectively. The low-voltage end of the high-voltage divider is connected with the signal acquisition patch panel. The signal acquisition patch panel is further connected with the electron gun power supply, the electron gun, a diaphragm and a crucible respectively. Through the processing scheme, the problem that the high voltage of the electron beam cannot be directly and independently measured is solved, and the accuracy of the measurement of the electron beam parameters is improved.
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