A MEMS three-dimensional force sensor and its preparation method

By designing an adjustable elastic layer in the MEMS three-dimensional force sensor, the problem of fixed sensitivity of traditional MEMS three-dimensional force sensors is solved, and the adjustable sensitivity and the improvement of measurement accuracy are achieved.

CN117906801BActive Publication Date: 2025-03-25SUZHOU UNIV
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Patent Information

Application Number
CN202410093704.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-01-23
Publication Date
2025-03-25
Estimated Expiration
2044-01-23

AI Technical Summary

Technical Problem

Traditional MEMS three-dimensional force sensors have fixed sensitivity and cannot be adjusted according to actual needs, and cannot meet the differences in the sensitivity requirements of force sensors in different application scenarios.

Method used

A MEMS three-dimensional force sensor is designed, which includes an elastic layer, a force transfer layer and a force sensitive layer. By controlling the phase state of the liquid metal layer, the Young's modulus of the elastic layer is adjusted, thereby adjusting the sensitivity of the sensor.

Benefits of technology

The sensor sensitivity is adjustable, and more accurate measurements can be achieved in different measurement ranges, adapting to the signal strength and noise levels of different application environments, and improving measurement accuracy.

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Abstract

The present invention relates to a MEMS three-dimensional force sensor and a preparation method thereof, wherein the MEMS three-dimensional force sensor comprises: an elastic layer, comprising a surface layer, a liquid metal layer and a first substrate; the liquid metal layer is arranged between the surface layer and the first substrate, and the liquid metal layer is provided with a resistance wire; wherein the Young's modulus of the elastic layer is controlled by controlling the phase state of the liquid metal layer; a force transmission layer, comprising a second substrate bonded to the first substrate, the second substrate being provided with a plurality of micro-contact units; the resistance wire is connected to the second substrate; a force sensitive layer, comprising a third substrate bonded to the second substrate, the third substrate being provided with a plurality of cantilever beams; wherein the plurality of cantilever beams are arranged relative to at least some of the micro-contact units. The present invention can be freely adjusted according to requirements to adapt to different force measurement ranges and accuracy requirements.
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