High-temperature-resistant and corrosion-resistant quartz boat and preparation method thereof

Abstract

The application relates to the technical field of quartz boat, and particularly discloses a high-temperature-resistant and corrosion-resistant quartz boat and a preparation method thereof. The application comprises the following operation steps: S1: quartz ore is sequentially subjected to heat explosion, drying, grinding, screening, HF acid soaking, magnetic separation, flotation, cleaning and drying treatment to obtain a crude product; the crude product is high-temperature calcined and directly transferred into mixed acid, and then subjected to room-temperature ultrasonic soaking, high-temperature ultrasonic soaking, cleaning, drying, high-temperature chlorination and quartz sand obtaining; S2: (1) the amino diamond and modified silicon nitride are ultrasonically dispersed in N,N-dimethylacetamide, pyromellitic dianhydride is added for reaction, and the composite material is purified and dried; (2) the lanthanum hexaboride and the iron sesquioxide are ball-mixed, and calcined to obtain lanthanum hexaboride-iron sesquioxide; S3: the quartz sand, chromium boride, aluminum oxide, composite material and lanthanum hexaboride-iron sesquioxide are uniformly mixed, sintered, and cooled and formed to obtain the quartz boat.

Description

Technical Field

[0001] This invention relates to the field of quartz boat technology, specifically to a high-temperature and corrosion-resistant quartz boat and its preparation method. Background Technology

[0002] Quartz boats, also known as quartz glass, are made by melting quartz at high temperatures and possess high heat resistance, finding applications in chemical, scientific research, and electrical engineering fields. Research has found that the strength, corrosion resistance, and high-temperature resistance of quartz boats are affected by gas-liquid inclusions and impurities within the quartz. Current technologies for removing gas-liquid inclusions from quartz include thermal detonation, mechanical crushing, acid etching, microwave methods, and high-temperature chlorination. With societal progress and technological advancements, increasing the purity of quartz sand to enhance the high-temperature and corrosion resistance of quartz boats has limited effectiveness and cannot meet societal demands.

[0003] In existing technologies, quartz boats are prepared using quartz sand and nanomaterials to improve their performance; however, nanomaterials are prone to agglomeration, which affects the strength, corrosion resistance, and high-temperature resistance of the quartz boat.

[0004] In conclusion, developing a high-temperature and corrosion-resistant quartz boat is of great significance in order to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a high-temperature and corrosion-resistant quartz boat and its preparation method, so as to solve the problems mentioned in the background art.

[0006] A method for preparing a high-temperature and corrosion-resistant quartz boat, characterized by comprising the following steps:

[0007] S1: Quartz ore is subjected to thermal cracking, drying, grinding, sieving, soaking in 10wt% HF solution for 40-50 minutes, magnetic separation, flotation, washing, and drying to obtain a crude product; the crude product is calcined at 900-950℃ for 2-3 hours, directly transferred to a mixed acid, ultrasonically soaked at room temperature for 30-50 minutes, heated to 90-110℃ and ultrasonically soaked for 1-2 hours, washed, and dried; it is then further chlorinated at high temperature to obtain quartz sand;

[0008] S2: (1) Aminated diamond and modified silicon nitride were ultrasonically dispersed in N,N-dimethylacetamide for 30-40 minutes, pyromellitic dianhydride was added and reacted for 3-4 hours, purified and dried to obtain the composite material; (2) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500-600℃ to obtain lanthanum hexaboride-ferric oxide;

[0009] S3: Quartz sand, chromium boride, alumina, composite material, and lanthanum hexaboride-ferric oxide are mixed evenly and sintered at 1800-2100℃ for 1-2.2 hours. After cooling and molding, a quartz boat is obtained.

[0010] In a more optimized form, in S1, the mixed acid comprises an HF solution, an H2SO4 solution, and an HNO3 solution in a volume ratio of 1:1:1; the concentration of the HF solution is 15-20 wt%, the concentration of the H2SO4 solution is 10-18 wt%, and the concentration of the HNO3 solution is 8-12 wt%.

[0011] In a more optimized version, the conditions for high-temperature chlorination in S1 are: the gas atmosphere is HCl gas, the flow rate is 2.5 to 3.5 L / min, and the temperature is 980 to 1010 °C.

[0012] In a more optimized form, in S2, the raw materials of the composite material include the following components: by weight, 2-3 parts of aminated diamond, 3-4 parts of modified silicon nitride, 2-3 parts of pyromellitic dianhydride, and 10-20 parts of N,N-dimethylacetamide.

[0013] In a more optimized version S3, the raw materials for the quartz boat include the following components: by weight, 100 parts quartz sand, 2-3 parts chromium boride, 1-2 parts alumina, 7-9 parts composite material, and 3-5 parts lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide is 1:(2-3).

[0014] In a more optimized manner, in S2, the preparation method of the aminated diamond is as follows: diamond is ultrasonically dispersed in NaOH aqueous solution and reacted at 90-100℃ for 4-5 hours; cooled to room temperature, purified, and dried to obtain an intermediate; the intermediate is stirred in an 80-90wt% ethanol aqueous solution for 25-35 minutes, aniline methyltriethoxysilane is added, and reacted at 70-85℃ for 4.5-6 hours; cooled to room temperature, purified, and dried to obtain aminated diamond.

[0015] More preferably, the concentration of the NaOH aqueous solution is 2.5–3.5 M; and the amount of aniline methyltriethoxysilane added is 2–3 wt% of the intermediate.

[0016] In a more optimized form, in S2, the modified silicon nitride is prepared by: adding 3-aminopropyltriethoxysilane to an 80-90 wt% aqueous ethanol solution and mixing uniformly to obtain a mixed solution; ultrasonically dispersing silicon nitride in anhydrous ethanol, adding the mixed solution, reacting at 75-85°C for 6-7 hours, cooling to room temperature, purifying, and obtaining modified silicon nitride.

[0017] In a more optimized manner, the amount of 3-aminopropyltriethoxysilane added accounts for 2 to 3 wt% of silicon nitride.

[0018] Compared with the prior art, the beneficial effects achieved by the present invention are: (1) The present invention releases most of the gas-liquid inclusions in the quartz ore from the cracks through thermal detonation, thereby improving the purity of the quartz sand and enhancing the strength, corrosion resistance, and high temperature resistance of the quartz boat. High-temperature chlorination can effectively remove metallic impurities from the quartz sand and is beneficial for removing hydroxyl groups from the quartz sand.

[0019] (2) In order to improve the overall performance of the quartz boat, the present invention adds chromium boride, aluminum oxide and composite materials to the quartz boat.

[0020] Chromium boride possesses high hardness, high-temperature stability, corrosion resistance, and wear resistance, maintaining its structure and properties even at high temperatures. Alumina exhibits excellent chemical stability, resisting the erosion and corrosion of many chemicals. Alumina also has relatively high thermal conductivity. Adding alumina and chromium boride to the quartz boat not only improves the material's thermal conductivity, helping to more effectively conduct and disperse heat and prevent the formation of localized hot spots, but also enhances the corrosion resistance and high-temperature resistance of the quartz boat.

[0021] To address the agglomeration problem between nanodiamond and nanosilicon nitride, this invention involves amination of diamond and silicon nitride, followed by reaction with the anhydride on pyromellitic dianhydride to obtain a composite material. This reduces the agglomeration of nanodiamond and nanosilicon nitride, thereby improving the dispersibility of nanodiamond and nanosilicon nitride in a quartz boat.

[0022] Silicon nitride and diamond possess excellent wear resistance, high-temperature resistance, and chemical inertness. Diamond can dissipate heat rapidly in high-temperature environments, while the stable crystal structure of silicon nitride allows them to maintain structural integrity even at high temperatures. Adding diamond and silicon nitride to quartz boats enhances their mechanical properties, corrosion resistance, and high-temperature resistance.

[0023] However, the modified diamond and silicon nitride introduce small molecule compounds, which generate amorphous carbon during pyrolysis. Although the sintering temperature reaches 1800-2100℃, the degree of graphitization is low, thus affecting the performance of the quartz boat. Therefore, to solve this problem, this invention adds ferric oxide. The iron atoms on the ferric oxide combine with the amorphous carbon atoms to generate FeC3. Accompanied by the breaking of Fe-C bonds and the generation of CC, the degree of carbon graphitization is increased. However, the degree of graphitization is still low at around 2000℃ under this catalyst. In order to achieve highly graphitized carbon at a lower graphitization temperature, this invention uses lanthanum hexaboride as a co-catalyst to reduce the activation energy of the reaction, thereby promoting the graphitization catalyzed by ferric oxide. In addition, lanthanum hexaboride itself has strong corrosion resistance and high temperature resistance, which is beneficial to improving the strength, corrosion resistance, and high temperature resistance of the quartz boat. Detailed Implementation

[0024] The following are preferred embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. For those skilled in the art, all other embodiments obtained by those skilled in the art without creative effort without departing from the principles of the embodiments of the present invention are within the scope of protection of the present invention.

[0025] In the following specific embodiments, the parts are by weight. In this embodiment, it should be noted that there are no special restrictions on the manufacturers of the raw materials involved in this invention. Exemplary examples include: diamond (DK-DC-500, 500nm particle size), silicon nitride (Si3N4-BY500, 500nm particle size), 3-aminopropyltriethoxysilane (CAS number 919-30-2), N,N-dimethylacetamide (CAS number 127-19-5), pyromellitic dianhydride (CAS number 89-32-7), chromium boride (CAS number 12007-16-8), alumina (DDFX002), lanthanum hexaboride (YM-LaB-N800, 800nm ​​particle size), and quartz sand (200 mesh, 99.99% purity).

[0026] The preparation method of aminated diamond is as follows: diamond is ultrasonically dispersed in 3M NaOH aqueous solution and reacted at 95℃ for 4 hours; cooled to room temperature, purified, and dried to obtain an intermediate; the intermediate is stirred in 90wt% ethanol aqueous solution for 30 minutes, aniline methyltriethoxysilane is added, reacted at 80℃ for 4.5 hours, cooled to room temperature, purified, and dried to obtain aminated diamond; the amount of aniline methyltriethoxysilane added accounts for 2.5wt% of the intermediate.

[0027] Example 1: A method for preparing a high-temperature and corrosion-resistant quartz boat, comprising the following steps:

[0028] S1: Quartz ore was subjected to a series of treatments, including high-temperature calcination at 1500℃, cold water quenching, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying, to obtain a crude product. The crude product was then roasted at 920℃ for 2 hours and directly transferred to a mixed acid solution (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, in a volume ratio of 1:1:1). It was ultrasonically soaked at room temperature for 40 minutes, then heated to 100℃ and ultrasonically soaked for 1.2 hours, followed by washing and drying. It was then further chlorinated at high temperature to obtain quartz sand. The conditions for high-temperature chlorination were: a flow rate of HCl gas of 3.5 L / min and a temperature of 1000℃.

[0029] S2: (1) 3-aminopropyltriethoxysilane was added to an 85wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride was ultrasonically dispersed in anhydrous ethanol, the mixed solution was added, and the mixture was reacted at 75℃ for 6.5 hours. After cooling to room temperature, it was purified to obtain modified silicon nitride; the amount of 3-aminopropyltriethoxysilane added accounted for 2.5wt% of silicon nitride; (2) 3 parts of aminated diamond and 4 parts of modified silicon nitride were ultrasonically dispersed in 15 parts of N,N-dimethylacetamide for 30 minutes, 3 parts of pyromellitic dianhydride were added and reacted for 3.5 hours. After purification and drying, a composite material was obtained; (3) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500℃ to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide was 1:2;

[0030] S3: Mix 100 parts of quartz sand, 2.5 parts of chromium boride, 1 part of alumina, 7 parts of composite material, and 3 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0031] Example 2: A method for preparing a high-temperature and corrosion-resistant quartz boat, comprising the following steps:

[0032] S1: Quartz ore was subjected to a series of treatments, including high-temperature calcination at 1500℃, cold water quenching, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying, to obtain a crude product. The crude product was then roasted at 900℃ for 2 hours and directly transferred to a mixed acid solution (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, in a volume ratio of 1:1:1). It was ultrasonically soaked at room temperature for 40 minutes, then heated to 100℃ and ultrasonically soaked for 1.2 hours, followed by washing and drying. It was then further chlorinated at high temperature to obtain quartz sand. The conditions for high-temperature chlorination were: a flow rate of HCl gas of 3.5 L / min and a temperature of 1000℃.

[0033] S2: (1) 3-aminopropyltriethoxysilane was added to an 85wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride was ultrasonically dispersed in anhydrous ethanol, the mixed solution was added, and the mixture was reacted at 75℃ for 6.5 hours. After cooling to room temperature, it was purified to obtain modified silicon nitride; the amount of 3-aminopropyltriethoxysilane added accounted for 2.5wt% of silicon nitride; (2) 3 parts of aminated diamond and 4 parts of modified silicon nitride were ultrasonically dispersed in 15 parts of N,N-dimethylacetamide for 30 minutes, 3 parts of pyromellitic dianhydride were added and reacted for 3.5 hours. After purification and drying, a composite material was obtained; (3) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500℃ to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide was 1:2;

[0034] S3: Mix 100 parts of quartz sand, 3 parts of chromium boride, 1.5 parts of alumina, 9 parts of composite material, and 4 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0035] Example 3: A method for preparing a high-temperature and corrosion-resistant quartz boat, comprising the following steps:

[0036] S1: Quartz ore was subjected to a series of treatments, including high-temperature calcination at 1500℃, cold water quenching, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying, to obtain a crude product. The crude product was then roasted at 900℃ for 2 hours and directly transferred to a mixed acid solution (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, in a volume ratio of 1:1:1). It was ultrasonically soaked at room temperature for 30 minutes, then heated to 100℃ and ultrasonically soaked for 1.2 hours, followed by washing and drying. It was then further chlorinated at high temperature to obtain quartz sand. The conditions for high-temperature chlorination were: a flow rate of HCl gas of 3.5 L / min and a temperature of 1000℃.

[0037] S2: (1) 3-aminopropyltriethoxysilane was added to an 85wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride was ultrasonically dispersed in anhydrous ethanol, the mixed solution was added, and the mixture was reacted at 75℃ for 6.5 hours. After cooling to room temperature, it was purified to obtain modified silicon nitride; the amount of 3-aminopropyltriethoxysilane added accounted for 2.5wt% of silicon nitride; (2) 3 parts of aminated diamond and 4 parts of modified silicon nitride were ultrasonically dispersed in 15 parts of N,N-dimethylacetamide for 30 minutes, 3 parts of pyromellitic dianhydride were added and reacted for 3.5 hours. After purification and drying, a composite material was obtained; (3) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500℃ to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide was 1:2;

[0038] S3: Mix 100 parts of quartz sand, 3 parts of chromium boride, 1.5 parts of alumina, 7 parts of composite material, and 3.5 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0039] Based on Example 2, the following control experiments were conducted, specifically Comparative Examples 1 to 4, as described below:

[0040] Comparative Example 1 is based on Example 2, but without thermal bursting and high-temperature chlorination treatment.

[0041] S1: Quartz ore is subjected to mechanical crushing, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying to obtain crude product; the crude product is calcined at 900℃ for 2 hours, and directly transferred to a mixed acid (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, volume ratio 1:1:1), ultrasonically soaked at room temperature for 40 minutes, heated to 100℃ and ultrasonically soaked for 1.2 hours, washed, and dried to obtain quartz sand;

[0042] S2: (1) 3-aminopropyltriethoxysilane was added to an 85wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride was ultrasonically dispersed in anhydrous ethanol, the mixed solution was added, and the mixture was reacted at 75℃ for 6.5 hours. After cooling to room temperature, it was purified to obtain modified silicon nitride; the amount of 3-aminopropyltriethoxysilane added accounted for 2.5wt% of silicon nitride; (2) 3 parts of aminated diamond and 4 parts of modified silicon nitride were ultrasonically dispersed in 15 parts of N,N-dimethylacetamide for 30 minutes, 3 parts of pyromellitic dianhydride were added and reacted for 3.5 hours. After purification and drying, a composite material was obtained; (3) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500℃ to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide was 1:2;

[0043] S3: Mix 100 parts of quartz sand, 3 parts of chromium boride, 1.5 parts of alumina, 9 parts of composite material, and 4 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0044] Comparative Example 3 is based on Example 2, but introduces modified silicon nitride alone.

[0045] S1: Quartz ore was subjected to a series of treatments, including high-temperature calcination at 1500℃, cold water quenching, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying, to obtain a crude product. The crude product was then roasted at 900℃ for 2 hours and directly transferred to a mixed acid solution (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, in a volume ratio of 1:1:1). It was ultrasonically soaked at room temperature for 40 minutes, then heated to 100℃ and ultrasonically soaked for 1.2 hours, followed by washing and drying. It was then further chlorinated at high temperature to obtain quartz sand. The conditions for high-temperature chlorination were: a flow rate of HCl gas of 3.5 L / min and a temperature of 1000℃.

[0046] S2: (1) 3-aminopropyltriethoxysilane was added to an 85wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride was ultrasonically dispersed in anhydrous ethanol, the mixed solution was added, and the mixture was reacted at 75℃ for 6.5 hours. After cooling to room temperature, the mixture was purified to obtain modified silicon nitride; the amount of 3-aminopropyltriethoxysilane added accounted for 2.5wt% of silicon nitride; (2) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500℃ to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide was 1:2;

[0047] S3: Mix 100 parts of quartz sand, 3 parts of chromium boride, 1.5 parts of alumina, 9 parts of modified silicon nitride, and 4 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0048] Comparative Example 4 is based on Example 2, without modification of diamond and silicon nitride.

[0049] S1: Quartz ore was subjected to a series of treatments, including high-temperature calcination at 1500℃, cold water quenching, drying, grinding, sieving, soaking in 10wt% HF solution for 45 minutes, magnetic separation, flotation, washing, and drying, to obtain a crude product. The crude product was then roasted at 900℃ for 2 hours and directly transferred to a mixed acid solution (15wt% HF solution, 10wt% H2SO4 solution, and 10wt% HNO3 solution, in a volume ratio of 1:1:1). It was ultrasonically soaked at room temperature for 40 minutes, then heated to 100℃ and ultrasonically soaked for 1.2 hours, followed by washing and drying. It was then further chlorinated at high temperature to obtain quartz sand. The conditions for high-temperature chlorination were: a flow rate of HCl gas of 3.5 L / min and a temperature of 1000℃.

[0050] S2: (1) Lanthanum hexaboride and ferric oxide are ball-milled and mixed, and then calcined at 500°C to obtain lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide is 1:2;

[0051] S3: Mix 100 parts of quartz sand, 3 parts of chromium boride, 1.5 parts of alumina, 9 parts of composite material, and 4 parts of lanthanum hexaboride-ferric oxide evenly, sinter at 2000℃ for 1.8 hours, cool and shape to obtain a quartz boat.

[0052] Test Experiment 1: (1) Corrosion test: Weigh and record the initial weight of Examples 1-3 and Comparative Examples 1-4, then soak them in 12% HF solution for 24 hours. Every 2 hours, take them out, clean them, dry them, weigh them, and calculate their average corrosion rate.

[0053] (2) Coefficient of thermal expansion: The specimens of Examples 1-3 and Comparative Examples 1-4 were placed at 1200℃, and their lengths before and after heating were measured. The coefficient of thermal expansion (×10) was then calculated. -7 As shown in Table 1.

[0054] Example 1 0.268 4.93 Example 2 0.264 4.87 Example 3 0.272 4.95 Comparative Example 1 0.287 5.15 Comparative Example 2 0.304 5.26 Comparative Example 3 0.323 5.61 Comparative Example 4 0.315 5.48

[0055] Table 1

[0056] Conclusions: Comparative Example 1, based on Example 2, did not undergo thermal cracking and high-temperature chlorination treatment, resulting in inadequate removal of metallic impurities, non-metallic impurities, and hydroxyl groups from the quartz sand, thus reducing the corrosion resistance and high-temperature resistance of the quartz boat. The lack of thermal cracking treatment also prevented most of the gas-liquid inclusions in the quartz ore from being released from the cracks, further reducing the corrosion resistance and high-temperature resistance of the quartz boat. Comparative Example 2, based on Example 2, introduced modified silicon nitride alone, resulting in a decrease in corrosion resistance and high-temperature resistance. Diamond possesses excellent chemical stability, resisting corrosion from acids and alkalis, and maintaining its shape and performance even at high temperatures.

[0057] Comparative Example 3 is based on Example 2, without modification of diamond and silicon nitride. In this invention, a composite material is obtained by reacting pyromellitic dianhydride with the modified diamond and the amino groups on the modified silicon nitride, reducing the agglomeration of diamond and silicon nitride, thus allowing them to be uniformly dispersed in the quartz boat, thereby improving the corrosion resistance and high-temperature resistance of the quartz boat. Comparative Example 4 is based on Example 2, without the addition of lanthanum hexaboride-ferric oxide, which would have led to amorphous carbonization and reduced the performance of the quartz boat. In this invention, the generated amorphous carbon is graphitized using ferric oxide, and lanthanum hexaboride not only promotes graphitization but also possesses strong corrosion resistance and high-temperature resistance, thus improving the corrosion resistance and high-temperature resistance of the quartz boat.

[0058] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the spirit and principles of the present invention and within the technical scope disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features described in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for preparing a high-temperature and corrosion-resistant quartz boat, characterized in that: The following steps are included: S1: Quartz ore is subjected to thermal cracking, drying, grinding, sieving, soaking in 10wt% HF acid for 40-50 minutes, magnetic separation, flotation, washing, and drying to obtain a crude product; the crude product is calcined at 900-950℃ for 2-3 hours, directly transferred to a mixed acid, ultrasonically soaked at room temperature for 30-50 minutes, heated to 90-110℃ and ultrasonically soaked for 1-2 hours, washed, and dried; it is then further chlorinated at high temperature to obtain quartz sand; S2: (1) Aminated diamond and aminated silicon nitride were ultrasonically dispersed in N,N-dimethylacetamide for 30-40 minutes, pyromellitic dianhydride was added and reacted for 3-4 hours, purified and dried to obtain the composite material; (2) Lanthanum hexaboride and ferric oxide were ball-milled and mixed, and calcined at 500-600℃ to obtain lanthanum hexaboride-ferric oxide; S3: Quartz sand, chromium boride, alumina, composite material, and lanthanum hexaboride-ferric oxide are mixed evenly and sintered at 1800~2100℃ for 1~2.2 hours, then cooled and shaped to obtain a quartz boat.

2. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S1, the mixed acid comprises an HF solution and an H2SO4 solution in a volume ratio of 1:1:

1. 、 The concentrations of HNO3 solution, HF solution, H2SO4 solution, and HNO3 solution are 15-20 wt%, 10-18 wt%, and 8-12 wt%, respectively.

3. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S1, the conditions for high-temperature chlorination are: the gas atmosphere is HCl gas, the flow rate is 2.5~3.5L / min, and the temperature is 980~1010℃.

4. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S2, the raw materials of the composite material include the following components: by weight, 2-3 parts of aminated diamond, 3-4 parts of aminated silicon nitride, 2-3 parts of pyromellitic dianhydride, and 10-20 parts of N,N-dimethylacetamide.

5. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S3, the raw materials of the quartz boat include the following components: by weight, 100 parts quartz sand, 2-3 parts chromium boride, 1-2 parts alumina, 7-9 parts composite material, and 3-5 parts lanthanum hexaboride-ferric oxide; the mass ratio of lanthanum hexaboride to ferric oxide is 1:(2-3).

6. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S2, the preparation method of the aminated diamond is as follows: diamond is ultrasonically dispersed in NaOH aqueous solution and reacted at 90~100℃ for 4~5 hours; cooled to room temperature, purified and dried to obtain an intermediate; the intermediate is stirred in an 80~90wt% ethanol aqueous solution for 25~35 minutes, aniline methyltriethoxysilane is added, reacted at 70~85℃ for 4.5~6 hours, cooled to room temperature, purified and dried to obtain aminated diamond.

7. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 6, characterized in that: The concentration of the NaOH aqueous solution is 2.5~3.5M; the amount of aniline methyltriethoxysilane added is 2~3wt% of the intermediate.

8. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 1, characterized in that: In S2, the preparation method of the amino-modified silicon nitride is as follows: 3-aminopropyltriethoxysilane is added to an 80-90 wt% aqueous ethanol solution and mixed evenly to obtain a mixed solution; silicon nitride is ultrasonically dispersed in anhydrous ethanol, the mixed solution is added, and the mixture is reacted at 75-85℃ for 6-7 hours, cooled to room temperature, and purified to obtain amino-modified silicon nitride.

9. The method for preparing a high-temperature and corrosion-resistant quartz boat according to claim 8, characterized in that: The amount of 3-aminopropyltriethoxysilane added is 2-3 wt% of silicon nitride.

10. A high-temperature and corrosion-resistant quartz boat is prepared by a method according to any one of claims 1 to 9.