A thermal conductivity gas sensor, preparation method and gas thermal conductivity detection method

By designing non-equidistant temperature measuring units and thermal gas sensors with constant temperature heat sources, the problem of low detection accuracy caused by ambient temperature interference in the prior art is solved, and higher detection sensitivity and accuracy are achieved.

CN118583914BActive Publication Date: 2025-03-28SUZHOU INNOMIC ELECTRONIC TECH CO LTD
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Patent Information

Application Number
CN202411051939.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-08-01
Publication Date
2025-03-28
Estimated Expiration
2044-08-01

AI Technical Summary

Technical Problem

The existing devices that measure the thermal conductivity of gases by thermal wire method are susceptible to ambient temperature interference, resulting in low detection sensitivity and accuracy.

Method used

A thermal gas sensor is designed, including a suspended tank, a temperature field layer and a temperature measuring unit. The temperature field layer consists of a constant temperature heat source arranged at intervals and at least two temperature measuring units that are not equidistantly arranged. The temperature field is measured by the temperature measuring unit arranged at non-equidistantly arranged to calculate the thermal conductivity of the gas.

Benefits of technology

Effectively eliminate ambient temperature interference, improve detection sensitivity and accuracy, and no temperature compensation is required.

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Abstract

The present application discloses a thermal conductivity gas sensor, a preparation method and a method for detecting thermal conductivity of gas, comprising a substrate with a suspended groove and a temperature field layer at least partially suspended on the suspended groove, wherein the temperature field layer comprises a constant temperature heat source and at least two temperature measuring units arranged at intervals; the suspended groove is used to accommodate the gas to be measured, and the distance between at least some of the at least two temperature measuring units and the constant temperature heat source is arranged at non-equidistant intervals. The present application adopts an asymmetric temperature field measurement technology, by arranging at least two temperature measuring units and the constant temperature heat source at non-equidistant intervals in the suspended temperature field layer, to measure the temperature field of the gas to be measured in the suspended groove, and can calculate the thermal conductivity of the gas to be measured through the drift of each isotherm in the temperature field, effectively eliminating the interference caused by the ambient temperature, without the need for temperature compensation, and can greatly improve the detection sensitivity and detection accuracy of the thermal conductivity gas sensor.
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