A low-noise AC control method for inspection quality

Abstract

The present invention discloses a low-noise AC control method for a test mass, comprising: placing parallel metal plates around the test mass, the parallel metal plates are parallel to the test mass and are equidistant from the test mass; converting the displacement signal of the test mass into a voltage signal; inputting the voltage signal into a PID controller to calculate the control torque; outputting the optimal maximum torque and compensation voltage according to the control torque; generating the amplitude of the AC voltage according to the control torque and the maximum torque; converting the amplitude into an AC voltage, and combining it with a DC compensation voltage to generate a feedback voltage, and then applying the feedback voltage to the parallel metal plates, and finally controlling the test mass in a balanced position. The present invention can realize the motion control of the test mass without applying a DC bias voltage to the test mass, effectively reducing the interference to the low-frequency signal of the inertial sensor, and effectively reducing the acceleration noise of the test mass, and has a wide range of application prospects.

Description

Technical Field

[0001] The invention relates to the field of high-precision inertial sensors, and in particular to a low-noise proof mass AC control method. Background Art

[0002] In the field of high-precision inertial sensors, it is usually necessary to control the test mass in a balanced position so as to measure and study the laws and phenomena of space physics through its position change. The sensitive probe of the inertial sensor consists of a test mass and surrounding plates. The test mass is connected to the power supply voltage using a gold wire with extremely small torsional stiffness, so that a DC feedback voltage is applied without affecting the movement of the test mass. At the same time, the controller calculates and outputs the corresponding DC feedback control voltage and applies it to the plates around the test mass, thereby achieving high-precision control of the test mass position. However, for inertial sensors in higher-precision space missions, the gold wire connection structure used to apply the DC bias voltage will introduce additional acceleration noise, affecting the accuracy of scientific detection. Therefore, it is necessary to replace the DC voltage control scheme with an AC voltage control scheme.

[0003] Taking the AC feedback control scheme used in LISAPathfinder as an example, it only measures and analyzes the rounding errors of the AC feedback voltage output DAC, and does not optimize the maximum torque and DC compensation voltage in the AC feedback voltage, which leads to the introduction of additional acceleration noise, posing a huge challenge to practical applications. Summary of the invention

[0004] In view of the deficiencies of the prior art, the object of the present invention is to provide a low-noise inspection quality AC control method, aiming to solve the problem of excessive noise generated by the existing feedback control scheme.

[0005] The object of the present invention is achieved through the following technical solution: a low-noise inspection quality communication control method, comprising the following steps:

[0006] Placing parallel metal plates around the inspection mass; wherein the parallel metal plates are parallel to the inspection mass and are equidistant from each other, and the number of parallel metal plates placed on both sides of the inspection mass is the same;

[0007] The inspection mass is subjected to external disturbance signals, thereby deviating from the equilibrium position to generate a displacement signal, and the displacement signal is converted into a voltage signal through a sensor circuit;

[0008] Calculating the control torque required to move the proof mass to an initial position using a PID control algorithm based on the voltage signal;

[0009] According to the control torque, a parameter optimization algorithm is used to calculate the maximum torque and the compensation voltage so as to minimize the torque noise;

[0010] Generate an amplitude of an AC voltage through the control torque and the maximum torque, and convert the amplitude into a corresponding AC voltage;

[0011] Combining the AC voltage and the compensation voltage to obtain a feedback voltage;

[0012] The feedback voltage is applied to the parallel metal plates, and the electrostatic force generated between the parallel metal plates and the proof mass eventually controls the proof mass to be in an equilibrium position.

[0013] Furthermore, the number of the parallel metal plates is 4, namely the first parallel metal plate, the second parallel metal plate, the third parallel metal plate and the fourth parallel metal plate; wherein, the first parallel metal plate and the third parallel metal plate are located on one side of the inspection mass; the second parallel metal plate and the fourth parallel metal plate are located on the other side of the inspection mass; when the inspection mass is in a balanced position, the first, second, third and fourth parallel metal plates are at the same distance from the inspection mass; the first parallel metal plate is directly opposite to and parallel to the second parallel metal plate; the third parallel metal plate is directly opposite to and parallel to the fourth parallel metal plate.

[0014] Furthermore, the process of calculating the maximum torque using the parameter optimization algorithm is specifically as follows:

[0015] The voltage signal converted from the displacement signal is input into the PID controller, which outputs the control torque required to move the inspection mass to the initial position; the maximum value of the AC voltage output according to the voltage signal and the control torque output by the controller , get the maximum value of the maximum torque ; Then generate a sequence with 0 as the lower limit and the maximum value of the maximum moment as the upper limit. The amount of data contained in the sequence is N+1, and the interval is ;

[0016] The maximum torque sequence is converted into a corresponding voltage amplitude sequence using an amplitude algorithm, and a corresponding feedback voltage sequence is generated according to an amplitude modulation algorithm to control the inspection quality respectively. Under the inspection quality control state, the closed-loop control performance and robustness of the inspection quality are observed;

[0017] Based on the maximum torque-torque noise model of the inspection mass, the maximum torque that minimizes the torque noise of the inspection mass is selected from the sequence, which is the optimal value; the maximum torque is expressed as:

[0018]

[0019] in, represents the electrostatic negative stiffness required to control the test mass back to the equilibrium position; It represents the distance between the centers of parallel metal plates on the same side of the test mass; It indicates the distance from the parallel metal plates when the test mass is in equilibrium position.

[0020] Furthermore, the maximum torque-torque noise model is:

[0021]

[0022] in, represents the capacitance between the test mass and the plates; represents angular displacement; Represents the voltage amplitude noise on each parallel metal plate.

[0023] Furthermore, the process of calculating the compensation voltage using the parameter optimization algorithm is specifically as follows:

[0024] According to the maximum output voltage value of the compensation voltage , generate a maximum voltage sequence with 0 as the lower limit and the maximum output voltage value as the upper limit, the amount of data contained in the maximum voltage sequence is N+1, and the interval is ;

[0025] The maximum voltage sequence is sequentially combined with the AC voltage to obtain a feedback voltage sequence, and the inspection quality is controlled respectively. Under the inspection quality control state, the inspection quality closed-loop control performance and robustness are observed;

[0026] Based on the compensation voltage-torque noise model of the proof mass, the compensation voltage value that minimizes the proof mass torque noise is selected from the sequence, which is the optimal value.

[0027] Furthermore, the compensation voltage-torque noise model is:

[0028]

[0029] in, , , and Respectively represent the compensation voltages applied to the first, second, third and fourth parallel metal plates, Represents the compensation voltage noise on each parallel metal plate.

[0030] Furthermore, the method for generating the amplitude of the AC voltage is specifically as follows:

[0031] According to the control torque and the maximum torque, an amplitude algorithm is used to generate an AC voltage amplitude; the amplitude of the AC voltage is:

[0032]

[0033] in, , , and Respectively represent the amplitude of the AC voltage on the first, second, third and fourth plates; It represents the capacitance between each plate and the test mass when the test mass is in the equilibrium position; It represents the control torque output by the controller; Indicates the maximum torque.

[0034] Furthermore, the method for converting the AC voltage is specifically as follows:

[0035] Using an amplitude modulation algorithm, the amplitude is converted into a corresponding AC voltage based on an amplitude lookup table. The AC voltage is:

[0036]

[0037] in, , , and denote the AC voltages on the first, second, third and fourth parallel plates respectively, Indicates the frequency of the applied AC voltage.

[0038] Furthermore, the method for obtaining the feedback voltage is specifically as follows:

[0039] The AC voltage is combined with the compensation voltage to obtain the feedback voltage:

[0040]

[0041] in, , , and Represent the AC feedback voltage on the first, second, third and fourth parallel plates respectively.

[0042] The present invention also provides a computer-readable storage medium on which a computer program is stored. When the program is executed by a processor, the low-noise inspection quality AC control method is implemented.

[0043] Compared with the existing technology, the present invention has the following beneficial effects: the present invention uses a displacement sensor to detect the displacement of the inspection mass, and then calculates the control torque when the inspection mass is controlled in the equilibrium position, and then calculates the feedback voltage based on the maximum torque value and the control torque, and applies the feedback voltage to the corresponding parallel metal plates to keep the inspection mass in the equilibrium position, thereby realizing the use of AC feedback voltage to control the movement of the inspection mass, and avoiding the problem of additional acceleration noise introduced by the gold wire connection structure used in the DC bias voltage control scheme. In addition, the maximum torque and compensation voltage are optimized to reduce the torque noise to the inspection mass during the AC feedback control process, which has a wide range of application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0045] Figure 1 A flowchart of a low-noise inspection quality communication control method provided by an embodiment of the present invention;

[0046] Figure 2 A flow chart of a method for optimizing the maximum torque in a low-noise AC control method for inspection quality provided by an embodiment of the present invention;

[0047] Figure 3 A flow chart of a method for optimizing compensation voltage in a low-noise AC control method for quality inspection provided by an embodiment of the present invention;

[0048] Figure 4 A schematic diagram of the mechanical structure of a device in a low-noise AC control method for quality inspection provided by an embodiment of the present invention;

[0049] Figure 5 A schematic diagram of a device for a low-noise inspection quality AC control method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0050] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Instead, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0051] The terms used in the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The singular forms "a", "the" and "the" used in the present invention and the appended claims are also intended to include plural forms unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0052] It should be understood that although the terms first, second, third, etc. may be used in the present invention to describe various information, these information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Depending on the context, the word "if" as used herein may be interpreted as "at the time of" or "when" or "in response to determining".

[0053] The present invention is described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments and implementations can be combined with each other.

[0054] In order to solve the problem that the gold wire connection structure used to apply the DC bias voltage in the inertial sensor will introduce additional acceleration noise, and also to improve the accuracy of the AC feedback control system, the present application discloses a low-noise AC control method for inspection quality through the following implementation.

[0055] like Figure 4 As shown, the mechanical structure of a device used in a low-noise AC control method for inspecting quality provided by an embodiment of the present invention.

[0056] The parallel metal plates are placed on both sides of the inspection mass, wherein the parallel metal plates are parallel to the surface of the inspection mass, and the distances between the parallel metal plates on both sides and the inspection mass are the same; the four output terminals of the parallel metal plates , , and Connected to the displacement sensor; the four input ends of the parallel metal plates are connected to the actuator module.

[0057] like Figure 5 As shown, a low-noise inspection quality AC control device provided by an embodiment of the present invention includes: a mechanical mechanism, a displacement sensor, a control module and an electrostatic actuator module.

[0058] The four output terminals of the mechanical structure , , and The displacement sensor is connected; the output end of the displacement sensor is connected to the control module, the control module is connected to the electrostatic actuator module; the output of the electrostatic actuator module is connected to the mechanical structure.

[0059] The control module includes a PID controller, an amplitude calculation module, an amplitude modulation module, a parameter optimization module and a lookup table module.

[0060] The electrostatic actuator module includes four modules, namely the first actuator module, the second actuator module, the third actuator module and the fourth actuator module; wherein the input ends of the first, second, third and fourth actuator modules are connected to the amplitude modulation module, and the output ends are respectively connected to the corresponding parallel metal plates.

[0061] The specific working principle of the device is as follows: the inspection mass is freely rotated by external force to generate angular displacement, and the displacement sensor realizes the conversion of displacement signal into voltage signal; then the voltage signal is input into the PID controller of the control module, and the PID controller calculates the control torque that keeps the inspection mass in the equilibrium position according to the input voltage signal. ; The parameter optimization module calculates the corresponding maximum torque according to the optimization algorithm and compensation voltage ; The amplitude calculation module receives the control torque output by the PID controller And the maximum output torque output by the parameter optimization module , calculate the amplitude of the AC voltage The amplitude modulation module receives the calculated amplitude and calculates the AC voltage corresponding to each parallel metal plate based on the lookup table module, and then compares it with the compensation voltage output by the parameter optimization module. The feedback voltage is then applied to the corresponding parallel metal plates by the first to fourth actuator modules, and the inspection mass is kept in a balanced position through the action of electrostatic force.

[0062] like Figure 1 As shown, a low-noise inspection quality AC control method provided by an embodiment of the present invention adopts the above-mentioned device and includes the following steps:

[0063] 1. Place parallel metal plates around the test mass, where the parallel metal plates are parallel to the test mass and are equidistant from the test mass; the number of plates placed on both sides of the test mass is the same.

[0064] Among them, the number of parallel metal plates is 4, namely the first parallel metal plate, the second parallel metal plate, the third parallel metal plate and the fourth parallel metal plate; among them, the first parallel metal plate and the third parallel metal plate are located on one side of the inspection mass; the second parallel metal plate and the fourth parallel metal plate are located on the other side of the inspection mass; when the inspection mass is in a balanced position, the first, second, third and fourth parallel metal plates are at the same distance from the inspection mass; the first parallel metal plate is directly parallel to the second parallel metal plate; the third parallel metal plate is directly parallel to the fourth parallel metal plate.

[0065] 2. The inspection mass is subjected to external disturbance signals, thereby deviating from the equilibrium position to generate a displacement signal, which is then converted into a voltage signal through a displacement sensor.

[0066] 3. Input the voltage signal output by the displacement sensor into the PID controller, calculate and output the control torque that keeps the inspection mass in the equilibrium position; at the same time, the parameter optimization module outputs the optimized maximum torque, such as Figure 2 As shown, the specific optimization method is:

[0067] (3.1) Output the maximum value according to the feedback voltage and the control torque output by the controller , get the maximum value of the maximum torque .

[0068] (3.2) Generate a sequence with 0 as the lower limit and the maximum value of the maximum moment as the upper limit. The amount of data contained in the sequence is N+1, and the interval is .

[0069] (3.3) The maximum torque sequence is input into the amplitude calculation module in sequence, and the quality closed-loop control performance and robustness are observed and tested.

[0070] (3.4) If the control performance meets the requirements and all data in the sequence have been calculated, go to step (3.5); otherwise, go to step (3.3).

[0071] (3.5) Based on the maximum torque-torque noise model of the test mass, calculate the torque noise to which the test mass is subjected.

[0072] (3.6) The maximum torque that minimizes the test mass torque noise is selected from the sequence, which is the optimal value.

[0073] Among them, the process of establishing the maximum moment-torque noise model of the inspection mass is:

[0074] After applying the feedback voltage to the plate, assuming no compensation voltage is applied, the torque on the test mass can be expressed as:

[0075] (1)

[0076] in, It represents the torque on the test mass after the feedback voltage is applied; , , and Respectively represent the amplitude of the AC voltage on the first, second, third and fourth plates; represents the capacitance between the test mass and the plates; Represents angular displacement.

[0077] From the moment model of the test mass, the moment noise of the test mass can be obtained as:

[0078] (2)

[0079] in, represents the voltage amplitude noise on the i-th flat metal plate; Represents the amplitude of the AC voltage on the i-th plate.

[0080] From formula (1), we can see that the four partial derivatives can be expressed as:

[0081] (3)

[0082] in, It represents the control torque output by the controller; Indicates the maximum torque.

[0083] Assume that the voltage amplitude noise on the first, second, third and fourth metal plates is the same, that is, , Substituting (3) into (2), the maximum torque-torque noise model of the inspection mass is obtained as:

[0084]

[0085] 4. Input the control torque and maximum torque into the amplitude calculation module to generate the AC voltage amplitude. Then the amplitude modulation module converts the input amplitude into the corresponding AC voltage based on the lookup table; the amplitude of the feedback voltage is specifically:

[0086]

[0087] in, It represents the capacitance between each plate and the test mass when the test mass is in the equilibrium position; Represents the distance between the centers of parallel metal plates on the same side of the test mass; It indicates the distance from the parallel metal plates when the test mass is in equilibrium position. It represents the control torque output by the controller; Represents the maximum torque. The maximum torque can be expressed as:

[0088]

[0089] in, Represents the electrostatic negative stiffness required to control the proof mass back to the equilibrium position.

[0090] 5. Convert the amplitude into the corresponding AC voltage based on the amplitude lookup table; the AC voltage is:

[0091]

[0092] in, , , and denote the AC voltages on the first, second, third and fourth parallel plates respectively, Indicates the frequency of the applied AC voltage.

[0093] 6. Combine the AC voltage and the optimized compensation voltage into a feedback voltage, and the feedback voltage is:

[0094]

[0095] in, , , and represent the feedback voltages on the first, second, third and fourth parallel plates respectively; , , and Respectively represent the magnitude of the compensation voltage on the first, second, third and fourth plates; represents the frequency of the applied feedback voltage, , , and Respectively represent the amplitude of the AC voltage on the first, second, third and fourth plates.

[0096] Among them, Figure 3 As shown, the optimization method of the compensation voltage in the present invention is specifically as follows:

[0097] (6.1) According to the maximum output voltage value of the actuator, determine the maximum output voltage value of the compensation voltage .

[0098] (6.2) Generate a sequence with 0 as the lower limit and the maximum output voltage value as the upper limit. The amount of data contained in the sequence is N+1, and the interval is .

[0099] (6.3) The sequence is sequentially input into the amplitude modulation module, and the closed-loop control performance and robustness of the inspection quality are observed under the inspection quality control state.

[0100] (6.4) If the control performance meets the requirements and all data in the sequence have been calculated, go to step (5.5); otherwise, go to step (6.3).

[0101] (6.5) Based on the compensated voltage-torque noise model of the proof mass, calculate the torque noise experienced by the proof mass.

[0102] (6.6) The compensation voltage value that minimizes the test mass torque noise is selected from the sequence, which is the optimal value.

[0103] Among them, the process of establishing the inspection mass torque-compensation voltage noise model is:

[0104] After applying the feedback voltage to the plates, assuming no AC voltage is applied, the torque on the test mass can be expressed as:

[0105] (4)

[0106] in, It indicates the torque on the test mass after the compensation voltage is applied; , , and Respectively represent the magnitude of the compensation voltage on the first, second, third and fourth plates; represents the capacitance between the test mass and the plates; Represents angular displacement.

[0107] From the moment model of the test mass, the moment noise of the test mass can be obtained as:

[0108] (5)

[0109] in, Represents the compensation voltage noise on each parallel metal plate.

[0110] From formula (4), we can see that the four partial derivatives can be expressed as:

[0111] (6)

[0112] in, It represents the control torque output by the controller; , , and Respectively represent the compensation voltage on the first, second, third and fourth plates.

[0113] Assume that the compensation voltage noise on the first, second, third and fourth metal plates is the same, that is, , substituting (6) into (5), the compensation voltage-torque noise model of the inspection mass is obtained as follows:

[0114]

[0115] 7. The electrostatic actuator module applies feedback voltage to the parallel metal plates. The electrostatic force generated between the parallel metal plates and the test mass eventually controls the test mass in a balanced position. The magnitude of the electrostatic force can be expressed as:

[0116]

[0117] An embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, wherein when the program is executed by a processor, the low-noise inspection quality AC control method described in any embodiment is implemented.

[0118] The computer-readable storage medium may be an internal storage unit of any device with data processing capability described in any of the aforementioned embodiments, such as a hard disk or a memory. The computer-readable storage medium may also be any device with data processing capability, such as a plug-in hard disk, a smart media card (SMC), an SD card, a flash card, etc. equipped on the device. Furthermore, the computer-readable storage medium may also include both an internal storage unit of any device with data processing capability and an external storage device. The computer-readable storage medium is used to store the computer program and other programs and data required by any device with data processing capability, and may also be used to temporarily store data that has been output or is to be output.

[0119] Those skilled in the art will readily appreciate other embodiments of the present application after considering the description and practicing the contents disclosed herein. The present application is intended to cover any variations, uses or adaptations of the present application, which follow the general principles of the present application and include common knowledge or customary technical means in the art that are not disclosed in the present application. The description and examples are intended to be exemplary only.

[0120] It should be understood that the present application is not limited to the exact construction that has been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof.

Claims

1. A low-noise inspection quality AC control method, characterized in that: The following steps are involved: Placing parallel metal plates around the inspection mass; wherein the parallel metal plates are parallel to the inspection mass and are equidistant from each other, and the number of parallel metal plates placed on both sides of the inspection mass is the same; The inspection mass is subjected to external disturbance signals, thereby deviating from the equilibrium position to generate a displacement signal, and the displacement signal is converted into a voltage signal through a sensor circuit; Calculating the control torque required to move the proof mass to an initial position using a PID control algorithm based on the voltage signal; According to the control torque, a parameter optimization algorithm is used to calculate the maximum torque and compensation voltage so as to minimize the torque noise; Generate an amplitude of an AC voltage through the control torque and the maximum torque, and convert the amplitude into a corresponding AC voltage; The method for generating the amplitude of the AC voltage is specifically as follows: According to the control torque and the maximum torque, an amplitude algorithm is used to generate an AC voltage amplitude; the amplitude of the AC voltage is: in, and Respectively represent the amplitude of the AC voltage on the first, second, third and fourth plates; C0 represents the capacitance between each plate and the test mass when the test mass is in the equilibrium position; Represents the control torque output by the controller; T max represents the maximum moment; b represents the distance between the centers of the parallel metal plates on the same side of the test mass; d0 represents the distance from the parallel metal plates when the test mass is in equilibrium; Combining the AC voltage and the compensation voltage to obtain a feedback voltage; The feedback voltage is applied to the parallel metal plates, and the electrostatic force generated between the parallel metal plates and the proof mass eventually controls the proof mass to be in an equilibrium position.

2. A low-noise inspection quality AC control method according to claim 1, characterized in that: The number of the parallel metal plates is 4, namely the first parallel metal plate, the second parallel metal plate, the third parallel metal plate and the fourth parallel metal plate; wherein, the first parallel metal plate and the third parallel metal plate are located on one side of the inspection mass; the second parallel metal plate and the fourth parallel metal plate are located on the other side of the inspection mass; when the inspection mass is in a balanced position, the first, second, third and fourth parallel metal plates are at the same distance from the inspection mass; the first parallel metal plate is directly parallel to the second parallel metal plate; the third parallel metal plate is directly parallel to the fourth parallel metal plate.

3. A low-noise inspection quality AC control method according to claim 1, characterized in that: The process of calculating the maximum torque using the parameter optimization algorithm is specifically as follows: The voltage signal converted from the displacement signal is input into the PID controller, which outputs the control torque required to move the inspection mass to the initial position; the maximum value V of the AC voltage output according to the voltage signal max and the control torque output by the controller Get the maximum value of the maximum torque MAX_Torque; generate a maximum torque sequence with 0 as the lower limit and the maximum value of the maximum torque as the upper limit. The amount of data contained in the maximum torque sequence is N+1, and the interval is The maximum torque sequence is converted into a corresponding voltage amplitude sequence using an amplitude algorithm, and a corresponding feedback voltage sequence is generated according to an amplitude modulation algorithm to control the inspection quality respectively. Under the inspection quality control state, the closed-loop control performance and robustness of the inspection quality are observed; Based on the maximum moment-torque noise model of the proof mass, selecting the maximum moment that minimizes the moment noise of the proof mass from the maximum moment sequence; The maximum moment is expressed as: in, It represents the electrostatic negative stiffness required to control the test mass back to the equilibrium position; b represents the distance between the centers of the parallel metal plates on the same side of the test mass; d0 represents the distance from the parallel metal plates when the test mass is in the equilibrium position.

4. A low-noise inspection quality AC control method according to claim 3, characterized in that: The maximum torque-torque noise model is: Among them, C x represents the capacitance between the test mass and the plates; represents angular displacement; Represents the voltage amplitude noise on each parallel metal plate.

5. A low-noise AC control method for inspection quality according to claim 1, characterized in that: The process of calculating the compensation voltage using the parameter optimization algorithm is specifically as follows: According to the maximum output voltage value MAX_Voltage of the compensation voltage, a maximum voltage sequence with 0 as the lower limit and the maximum output voltage value as the upper limit is generated. The amount of data contained in the maximum voltage sequence is N+1, and the interval is The maximum voltage sequence is sequentially combined with the AC voltage to obtain a feedback voltage sequence, and the inspection quality is controlled respectively. Under the inspection quality control state, the inspection quality closed-loop control performance and robustness are observed; Based on the compensation voltage-torque noise model of the proof mass, a compensation voltage value that minimizes the proof mass torque noise is selected from the maximum voltage sequence.

6. A low-noise AC control method for inspection quality according to claim 5, characterized in that: The compensation voltage-torque noise model is: Among them, V DC1 、V DC2 、V DC3 and V DC4 Respectively represent the compensation voltages applied to the first, second, third and fourth parallel metal plates, represents the compensation voltage noise on each parallel metal plate, C x represents the capacitance between the test mass and the plates; Represents angular displacement.

7. A low-noise AC control method for inspection quality according to claim 1, characterized in that: The method of converting into the corresponding AC voltage is specifically: Using an amplitude modulation algorithm, the amplitude is converted into a corresponding AC voltage based on an amplitude lookup table. The AC voltage is: Among them, V ac1 、V ac2 、V ac3 and V ac4 represent the AC voltages on the first, second, third and fourth parallel plates respectively, f represents the frequency of the applied AC voltage, and Respectively represent the amplitude of the AC voltage on the first, second, third and fourth plates.

8. A low-noise AC control method for inspection quality according to claim 1, characterized in that: The method for obtaining the feedback voltage is specifically as follows: The AC voltage is combined with the compensation voltage to obtain the feedback voltage: Wherein, V1, V2, V3 and V4 represent the AC feedback voltages on the first, second, third and fourth parallel plates respectively, V ac1 、V ac2 、V ac3 and V ac4 Represent the AC voltage on the first, second, third and fourth parallel plates, V DC1 、V DC2 、V DC3 and V DC4 Respectively represent the compensation voltages applied to the first, second, third and fourth parallel metal plates.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, a low-noise inspection quality AC control method as described in any one of claims 1-8 is implemented.

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