Resistivity measurement system reset device and method

Abstract

The present invention discloses a device and method for resetting a resistivity measurement system, which belongs to the field of resistivity measurement technology. The device includes a base plate, a sample, a first probe, a first distance detection device, a second distance detection device, a probe adjustment device, and a storage and calculation device; the first probe is vertically arranged above the base plate or the sample; the first distance detection device and the second distance detection device are arranged parallel to the first probe and fixed on the first probe, and are respectively used to measure the distance between the first distance detection device, the second distance detection device and the base plate or the sample; the second distance detection device is symmetrically arranged with the first distance detection device. The storage and calculation device compares the distance detection result with the preset standard distance. When the probe is tilted or offset, the probe is adjusted in position by the probe adjustment device to improve the accuracy of system reset. The device and method of the present invention are generally applicable to the measurement of resistivity of metals, semiconductors, thin film materials, and other fields.

Description

Technical Field

[0001] The present invention relates to the technical field of resistivity measurement, and in particular to a resistivity measurement system reset device and method. Background Art

[0002] Currently, there are two types of measurements for semiconductor resistivity: contact measurement and non-contact measurement.

[0003] Contact measurement is usually performed with the help of four probes, and there have been many studies based on the four-probe method. However, the four-probe method has the disadvantages of long test time and easy damage to the tested sample, and when the volume of the semiconductor part sample to be tested is small or the resistivity is very low, large errors will occur. On the other hand, the surface of the measuring electrode and the tested sample of the contact measurement is easily contaminated to form oxides, making it difficult for the tested sample and the electrode to have good contact, which will further increase the measurement error.

[0004] Non-contact measurement usually uses the eddy current method to detect the object being tested by calculating the feedback amount of eddy current induction. This method is widely used for resistivity measurement under non-contact conditions. Its principle is: when the detection coil carrying alternating current is close to the conductor being tested, due to the effect of the alternating magnetic field on the coil, the conductor being tested induces eddy currents and generates a magnetic field in the opposite direction of the original magnetic field, partially offsetting the original magnetic field, resulting in changes in the resistance and inductance of the detection coil.

[0005] The probe used in the eddy current method is used to excite the magnetic field and detect the magnetic field generated by the eddy current. Because the signal is usually very weak, the position of the reset probe of the resistivity measurement system needs to be fixed to minimize the influence of the outside world. If the probe position cannot be restored due to maintenance or external interference, it will have a great impact on the measurement results, and even make it impossible to measure data.

[0006] In the prior art, the probe is usually reset by using the reflection of a transparent reference plate and a sample. This is because when the ambient light is strong, the reflected light of the transparent reference plate may be too strong, which may lead to false detection, or affect the calculation results, resulting in large errors, and causing inaccurate reset of the resistivity measurement system. Summary of the invention

[0007] The purpose of the embodiments of the present invention is to provide a resistivity measurement system reset device and method to solve the problem in the prior art that the probe is usually reset by utilizing the reflection of a transparent reference plate and a sample. Because the transparent reference plate may cause excessive reflected light when the ambient light is strong, thereby causing false detection, or the calculation result is affected, resulting in a large error, resulting in inaccurate reset of the resistivity measurement system.

[0008] In order to solve the above technical problems, the present invention provides a resistivity measurement system reset device, which adopts the following technical solution, including: a base plate, a sample, a first probe, a first distance detection device, a second distance detection device, a probe adjustment device, and a storage and calculation device; wherein the base plate or the sample is used to assist the first distance detection device and the second distance detection device to complete distance detection, and the first probe is vertically arranged above the base plate; the first distance detection device is arranged in parallel with the first probe, fixed on the first probe, and used to measure the distance between the first distance detection device and the base plate; the second distance detection device is symmetrically arranged with the first distance detection device, fixed on the first probe, and used to measure the distance between the second distance detection device and the base plate; the probe adjustment device is arranged above the first probe; the storage and calculation device is connected to the distance detection device, the sample is arranged above the base plate and parallel to the base plate, and the sample has no contact with the base plate or the first probe.

[0009] Preferably, the resistivity measurement system reset device further comprises: a second probe vertically mounted on the bottom plate and in a straight line with the center of the first probe.

[0010] Preferably, the distance detection device comprises a laser rangefinder, and a laser emission direction of the laser rangefinder is parallel to a direction of the first probe and perpendicular to the sample or the base plate.

[0011] Preferably, the resistivity measurement system reset device further comprises: an alignment receiving device, disposed on the bottom plate, for aligning the first probe with the second probe.

[0012] Preferably, the resistivity measurement system resetting device further comprises: a transmission and support device, which is disposed below the sample and is used to adjust the sample when the sample is tilted or offset.

[0013] Preferably, the transmission and support device is provided in plurality, and the plurality of transmission and support devices are evenly arranged below the sample.

[0014] Preferably, the probe adjustment device includes an adjustment mechanism, which includes a second motor, a reducer, a transmission shaft, and a sensor. The second motor is used to drive the reducer to rotate, and the reducer is used to drive the transmission shaft to rotate, thereby realizing the movement and rotation of the first probe. The sensor is used to monitor the position of the first probe in real time to ensure the accuracy of the adjustment.

[0015] In order to solve the above technical problems, the present invention also provides a resistivity measurement system reset method, which adopts the following technical solution and is applied to the above resistivity measurement system reset device, and adjusts the position of the first probe according to the distance measurement result. The method comprises the following steps:

[0016] Step S1, calculating the average value of the real-time measurement result d1 of the first distance detection device and the real-time measurement result d2 of the second distance detection device If the average is not equal to the preset standard distance d, jump to step S2; if the average value If it is equal to the preset standard distance d, jump to step S3;

[0017] Step S2, if the average value When the distance is greater than the preset standard distance d, the first probe is moved away from the base plate or the sample. If the average When the distance is less than the preset standard distance d, the first probe is moved toward the direction close to the base plate or the sample. Then re-measure the distance and jump to step S1;

[0018] Step S3, calculate the first distance deviation a1=d1-d; if the absolute value of the first distance deviation a1 is less than or equal to the preset maximum error γ, the adjustment is completed; otherwise, if the first distance deviation a1 is greater than the preset maximum error γ, rotate the first probe counterclockwise; if the first distance deviation a1 is less than the negative of the preset maximum error γ, rotate the first probe clockwise; then re-measure the distance and jump to step S1.

[0019] Preferably, in step S3, when the first probe is rotated counterclockwise and clockwise, the rotation angle is arc tan a1 / d1 or a multiple of arc tan a1 / d1 or a minimum rotation angle supported by the probe adjustment device.

[0020] Preferably, the method further comprises: during the adjustment process, counting the number of adjustments, and ending the adjustment process when the value of the number of adjustments exceeds a preset maximum number of adjustments.

[0021] Compared with the prior art, the present invention has the following beneficial effects: when the probe is tilted or offset, the position of the probe is adjusted to improve the accuracy of system reset. The device and method of the present invention can be widely used in the fields of resistivity measurement of metals, semiconductors, thin film materials, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the scheme in the present invention, a brief introduction is given below to the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a structural schematic diagram of an embodiment of a resistivity measurement system reset device of the present invention;

[0024] FIG2( a ) is a schematic diagram of the correct configuration of the first probe in the resistivity measurement system reset device of the present invention;

[0025] FIG2( b ) is a schematic diagram of the tilt configuration of the first probe in the resistivity measurement system reset device of the present invention;

[0026] FIG2( c ) is a schematic diagram of the tilted configuration of the bottom plate or the sample in the reset device of the resistivity measurement system of the present invention;

[0027] Figure 3 It is a structural schematic diagram of another embodiment of the resistivity measurement system reset device of the present invention, in which an alignment receiving device is installed on a bottom plate;

[0028] Figure 4 It is a structural schematic diagram of a transmission and support device provided in another embodiment of a resistivity measurement system reset device of the present invention;

[0029] Figure 5 It is a schematic diagram of an adjustment transmission and support device of another embodiment of a resistivity measurement system reset device of the present invention;

[0030] Figure 6 is a flow chart of an embodiment of a method for resetting a resistivity measurement system of the present invention;

[0031] Figure 7 It is a schematic structural diagram of an embodiment of a computer device of the present invention.

[0032] Figure markings: 1-base plate, 2-first probe, 3-first distance detection device, 4-second distance detection device, 5-second probe, 6-storage and computing device, 7-probe adjustment device, 8-alignment and receiving device, 9-sample, 10-first transmission and support device, 11-second transmission and support device, 12-support adjustment device. DETAILED DESCRIPTION

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of the present invention; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention; the terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of the present invention or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0034] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0035] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.

[0036] Embodiment 1

[0037] Please refer to Figure 1 The present invention provides an embodiment of a resistivity measurement system reset device, which can be specifically applied to various electronic devices.

[0038] like Figure 1 As shown, a resistivity measurement system reset device at least includes: a base plate 1, a first probe 2, a first distance detection device 3, a second distance detection device 4, a storage and calculation device 6, a probe adjustment device 7, and a sample 9; wherein the base plate 1 or the sample 9 is used to assist the first distance detection device 3 and the second distance detection device 4 to complete distance detection, and the first probe 2 is vertically arranged above the base plate 1; the first distance detection device 3 is arranged in parallel with the first probe 2, fixed on the first probe 2, and used to measure the distance between the first distance detection device 3 and the base plate 1, the second distance detection device 4 is symmetrically arranged in parallel with the first distance detection device 3, fixed on the first probe 2, and used to measure the distance between the second distance detection device 4 and the base plate 1, the probe adjustment device 7 is arranged above the first probe 2, the sample 9 is arranged above the base plate 1, and is parallel to the base plate 1, and the sample 9 has no contact with the base plate 1 or the first probe 2.

[0039] In specific implementation, the probe adjustment device 7 may include an adjustment mechanism, which includes a second motor, a reducer, a transmission shaft, and a sensor. The second motor is used to drive the reducer to rotate, and the reducer is used to drive the transmission shaft to rotate, thereby realizing the movement and rotation of the first probe 2. The sensor is used to monitor the position of the first probe 2 in real time to ensure the accuracy of the adjustment.

[0040] The storage and computing device 6 is connected to the distance detection device. The storage device has the core purpose of storing, managing and retrieving data. It can include a hard disk, a solid state hard disk, a random access memory, etc. The hard disk uses magnetic media to store data and can store a large amount of data. The solid state hard disk uses flash memory chips as storage media, which has higher read and write speeds and lower energy consumption than traditional hard disks. Random access memory is a temporary storage device used to store data that the CPU is processing or about to process. The read and write speed of RAM is very fast, but the data will be lost after power failure. Therefore, RAM is mainly used to store temporary data, such as intermediate calculation results. The computing device is responsible for performing various computing tasks. The computing device may include a central processing unit, a memory, etc. The storage device is connected to the computing device via a data bus to provide the computing device with necessary data support. During the calculation process, the computing device reads data from the storage device and writes the processing results back to the storage device.

[0041] The first distance detection device 3 and the first probe 2 can be physically fixed, such as by glue, welding, etc. The second distance detection device 4 and the first probe 2 can also be physically fixed, such as by glue, welding, etc.

[0042] Generally, the detection range of the first distance detection device 3 and the second distance detection device 4 is limited, usually within 500 mm. Therefore, the base plate 1 can assist the first distance detection device 3 and the second distance detection device 4 to complete the distance detection. The base plate 1 is not limited in material and can be composed of metal, plastic or composite materials. Metal materials such as aluminum alloy and stainless steel have high mechanical strength and strong corrosion resistance. Plastic materials such as nylon and polycarbonate have good insulation and strong processing performance. Composite materials combine the advantages of metal and plastic, and have the characteristics of high strength, light weight and corrosion resistance. When selecting the material of the base plate 1, it is also necessary to pay attention to its compatibility and matching accuracy with other components of the resistivity measurement system reset device to ensure the stable performance and reliability of the entire device.

[0043] In order to accurately measure and facilitate installation, the first probe 2 is vertically arranged above the base plate 1 .

[0044] The probe adjustment device 7 can be directly physically connected to the first probe 2, for example, fixed by a rotating shaft, gears, etc., to control the first probe 2 to translate and rotate with a small amplitude (for example, less than 100 microns), or it can be controlled by a motor. In specific implementation, it can be controlled by a four-axis adjustable fixture, a five-axis adjustable fixture, a six-axis adjustable fixture, etc.

[0045] The storage and calculation device 6 can be connected to the first distance detection device 3 and the second distance detection device 4 through wires. The storage and calculation device 6 is provided with a storage device and a calculation device, wherein the storage device stores the initial value, set value and current value of the first distance detection device 3 and the second distance detection device 4, and the calculation device calculates according to relevant steps.

[0046] In some optional implementations of this embodiment, the resistivity measurement system reset device of this embodiment further includes: a second probe 5 vertically mounted on the bottom plate 1 and in a straight line with the center of the first probe 2 .

[0047] The purpose of setting the second probe 5 is to strengthen the signal of the first probe 2. When setting, it is set concentrically with the first probe 2.

[0048] In some implementations of this embodiment, only the base plate 1 is used as a reference surface to adjust the position of the first probe 2 .

[0049] In some other optional implementations of this embodiment, the position of the first probe 2 is adjusted using only the sample 9 as a reference surface.

[0050] In some other optional implementations of this embodiment, the sample 9 is arranged above the bottom plate 1 and is parallel to the bottom plate 1. In an actual application environment, the sample 9 is usually sent into the detection range of the first probe 2 in sequence through a transmission device to detect the sample 9 one by one. Because the sample 9 is periodically sent under the first probe 2, when the sample 9 is under the first probe 2, the first distance detection device 3 and the second distance detection device 4 detect the distance to the sample 9. At this time, the storage and calculation device 6 adjusts the position of the first probe 2 according to the distance detection value and the standard distance from the distance detection device to the sample 9; when there is no sample 9 but only the bottom plate 1 under the first probe 2, the storage and calculation device 6 adjusts the position of the first probe 2 according to the distance detection value and the standard distance from the distance detection device to the bottom plate 1.

[0051] The sample 9 is an object to be detected and is located between the first probe 2 and the second probe 5 , and is not in direct contact with the first probe 2 , the second probe 5 or the bottom plate 1 .

[0052] In some optional implementations of this embodiment, the resistivity measurement system reset device also includes a third distance detection device, which is arranged parallel to the first probe 2 and fixed on the first probe 2, and is used to measure the distance between the third distance detection device and the base plate 1.

[0053] If the distance to be measured is a single point, at least two distance detection devices are used; if the distance to be measured is a multi-point (line) distance, a single distance detection device can be used. In this case, the single distance detection device can theoretically be equivalent to a distance detection device for multiple single-point distance detections.

[0054] In a specific implementation, the distance detection device includes a laser rangefinder, and the laser emission direction of the laser rangefinder is parallel to the direction of the first probe 2 and perpendicular to the sample 9 or the base plate 1. Because the laser rangefinder emits a visible light beam, it is convenient to observe the working condition and is easy to install, so it is preferred to use a laser rangefinder for distance detection. The laser rangefinder uses triangulation or time of flight method to measure the distance between the base plate 1 and the distance detection device.

[0055] Triangulation is a measurement method based on geometric relationships. The laser rangefinder emits a laser beam to the target object, and captures the spot formed by the laser on the target object through a built-in camera or photodetector. By measuring the angle change between the laser emitter and the photodetector, and the known laser beam emission angle, the distance between the rangefinder and the target object can be calculated using trigonometric function relationships. This method has high accuracy for measuring close distances and objects with rough surfaces.

[0056] The time-of-flight method is a time-based measurement method. The laser rangefinder emits a laser pulse and records the emission time. When the laser pulse hits the target object and reflects back, the rangefinder records the reception time again. By measuring the time required from the emission to the reception of the laser pulse, combined with the known value of the speed of light, the total round-trip distance of the laser pulse can be calculated. Then, by dividing by 2, the actual distance between the rangefinder and the target object can be obtained. This method is suitable for measuring objects at long distances and high speeds, and has a high measurement range and response speed.

[0057] In the resistivity measurement system reset device, the laser rangefinder accurately measures the distance between the base plate 1 and the distance detection device through these two methods. According to the actual application scenario and requirements, a suitable measurement method can be selected to achieve fast and accurate distance measurement.

[0058] The correct configuration of the first probe 2 is shown in FIG2(a), where the first probe 2 is vertically arranged above the base plate 1 or the sample 9; the tilted configuration of the first probe 2 is shown in FIG2(b), where the first probe 2 is tilted relative to the vertical direction; the tilted configuration of the base plate 1 or the sample 9 is shown in FIG2(c), where the base plate 1 or the sample 9 is tilted relative to the horizontal plane. In practical applications, the situations shown in FIG2(b) and FIG2(c) may both occur. Because the relationship between the first probe 2 and the base plate 1 or the sample 9 is relative, for the situations in FIG2(b) and FIG2(c), the position of the first probe 2 can be adjusted to make the first probe 2 vertically arranged relative to the base plate 1 or the sample 9.

[0059] When the resistivity measurement system reset device is working, the adjusted standard distance data of each distance detection device is recorded and stored by the storage and calculation device 6. In some implementations of this embodiment, the base plate 1 is used as a reference surface to adjust the position of the first probe 2, and the standard distance data is the distance between the distance detection device and the base plate 1; in other implementations of this embodiment, the sample 9 is used as a reference surface to adjust the position of the first probe 2, and the standard distance data is the distance between the distance detection device and the sample 9. When it is necessary to adjust the position of the first probe 2, the first distance detection device 3 and the second distance detection device 4 are turned on to obtain each measured distance data, and the standard distance data of each record is read at the same time, and the data are compared and calculated to obtain the position of the first probe 2 that should be adjusted, and the probe adjustment device 7 is used to adjust the position of the first probe 2. This is a real-time adjustment process. Since the distance of the first probe 2 changes in real time, it will be calculated in real time.

[0060] like Figure 6 As shown, this embodiment also provides a resistivity measurement system reset method, which is applied to the resistivity measurement system reset device mentioned above, and adjusts the position of the first probe according to the distance measurement result. The method includes the following steps:

[0061] Step S1, calculating the average value of the real-time measurement result d1 of the first distance detection device and the real-time measurement result d2 of the second distance detection device If the average is not equal to the preset standard distance d, jump to step S2; if the average value If it is equal to the preset standard distance d, jump to step S3;

[0062] Step S2, if the average value When the distance is greater than the preset standard distance d, the first probe is moved away from the base plate or the sample. If the average When the distance is less than the preset standard distance d, the first probe is moved toward the direction close to the base plate or the sample. Then re-measure the distance and jump to step S1;

[0063] In the step S2, after the first probe is moved, the position of the first probe from the bottom plate or the sample changes, so it is necessary to jump to step S1 to recalculate and compare the average value.

[0064] Step S3, calculate the first distance deviation a1=d1-d; if the absolute value of the first distance deviation a1 is less than or equal to the preset maximum error γ, the adjustment is completed; otherwise, if the first distance deviation a1 is greater than the preset maximum error γ, rotate the first probe counterclockwise; if the first distance deviation a1 is less than the negative of the preset maximum error γ, rotate the first probe clockwise; then re-measure the distance and jump to step S1.

[0065] In step S3, because the first distance detection device and the second distance detection device are symmetrically arranged relative to the first probe, during the rotation process, the adjustment process can be quickly converged by rotating only according to the first distance deviation. After the first probe is rotated, the position of the first probe from the base plate or the sample changes, so it is necessary to jump to step S1 and recalculate and compare the average value.

[0066] The preset maximum error γ is set to take into account the adjustment and measurement accuracy errors to achieve rapid convergence of the probe adjustment process. The value of the preset maximum error γ can be set according to actual application requirements. In some implementations of the embodiments of the present invention, the value of the preset maximum error γ is set to 1 to 5 μm. Only when it is equal to the preset standard distance d, will it jump to the step S3, and the first distance detection device and the second distance detection device are symmetrically arranged relative to the first probe, so the first distance deviation a1 and the second distance deviation a2=d2-d are reciprocal numbers, and the absolute values ​​of the first distance deviation a1 and the second distance deviation a2 are equal. If the absolute value of the first distance deviation a1 is less than or equal to the preset maximum error γ, then the absolute value of the second distance deviation a2 must also be less than or equal to the preset maximum error γ. Therefore, it can be regarded as the end of adjustment.

[0067] In the step S3, when the first probe is rotated counterclockwise and clockwise, the rotation angle is arc tan a1 / d1 or a multiple of arc tan a1 / d1 or a minimum rotation angle supported by the probe adjustment device.

[0068] In some other implementations of this embodiment, the method further includes: during the adjustment process, counting the number of adjustments, and ending the adjustment process when the value of the number of adjustments exceeds a preset maximum number of adjustments. By setting the preset maximum number of adjustments and ending the adjustment process after the number of adjustments exceeds the preset maximum number of adjustments, system oscillation can be avoided and rapid convergence of the probe adjustment process can be achieved.

[0069] Refer to the following Figure 1 , the above-mentioned resistivity measurement system reset method is explained by taking the left and right laser rangefinders as examples. Assume that the distance between the bottom plate 1 or the sample 9 and the left laser rangefinder and the right laser rangefinder is the preset standard distance d, at this time, the reading d1 of the left laser rangefinder and the reading d2 of the right laser rangefinder are both equal to the preset standard distance d. When assembling the left and right laser rangefinders, the height difference between the transmitter heads of the left and right laser rangefinders and the first probe is measured to be △, then the height difference between the first probe 2 and the bottom plate 1 can be calculated as D=d-△. If the height of the second probe 5 is l2, the distance difference between the first probe 2 and the second probe 5 is δ=D-l2=d-△-l2. In practice, the range of δ value can be set to 300~600μm. In practical applications, for the case where there are two probes, the preset standard distance d can be reasonably set according to the distance between the two probes.

[0070] Let n be the number of adjustments, with the initial value being 0.

[0071] In the first step, when working, the left and right laser rangefinders transmit the real-time readings d1 and d2 to the storage and calculation device 6 in real time. When the storage and calculation device 6 detects that the real-time readings d1 and d2 are not equal to the standard distance d, the calculation device calculates the average distance , let n=n+1, when n is greater than the preset maximum adjustment times, the adjustment is ended.

[0072] Step 2: Determine the average distance Is it equal to the preset standard distance d? If they are equal, jump to the third step to rotate the probe; otherwise, if the average distance If the distance is greater than the preset standard distance d, it indicates that the first probe is too high as a whole, and the probe adjustment device 7 is used to move the first probe downward. Otherwise, it moves upwards Then, re-measure the values ​​of real-time reading d1 and real-time reading d2 and jump to the first step.

[0073] The third step is to calculate the first distance deviation a1=d1-d. If the absolute value of the first distance deviation a1 is greater than the preset maximum error γ, the result is sent as the adjustment signal a1 to the probe adjustment device 7; if the absolute value of the first distance deviation a1 is less than or equal to the preset maximum error γ, the adjustment is completed. After receiving the adjustment signal, the probe adjustment device 7 first determines which side should be adjusted. Since the signal a1 represents the left laser rangefinder, the left laser rangefinder is adjusted. Then, according to the positive or negative value of a1, it is determined whether the distance between the first probe and the bottom plate 1 should be increased or decreased. If a1 is positive, it means that d1 exceeds d, then the current distance is greater than the standard distance, and the distance between the probe and the bottom plate 1 needs to be reduced; if a1 is negative, the opposite is true. Finally, keep the height of the first probe unchanged, and rotate the first probe clockwise (i.e., increase the distance between the first probe and the bottom plate 1) or counterclockwise (i.e., reduce the distance between the first probe and the bottom plate 1) through the probe adjustment device 7; then re-measure the values ​​of the real-time readings d1 and d2, and jump to the first step. The rotation angle is arc tan (a1 / d1); or a multiple of arc tan (a1 / d1), or is rotated according to the minimum angle supported by the probe adjustment device 7.

[0074] The implementation of this embodiment has the following beneficial effects: by setting a base plate, a first probe, a first distance detection device, a second distance detection device, a probe adjustment device, and a storage and calculation device; wherein the base plate is used to assist the first distance detection device and the second distance detection device to complete distance detection, and the first probe is vertically arranged above the base plate; the first distance detection device is arranged in parallel with the first probe, fixed on the first probe, and used to measure the distance between the first distance detection device and the base plate; the second distance detection device is symmetrically arranged in parallel with the first distance detection device, fixed on the first probe, and used to measure the distance between the second distance detection device and the base plate; the probe adjustment device is arranged above the first probe; the probe can be adjusted in real time and accurately so that the probe does not tilt or shift, thereby improving the accuracy of system reset.

[0075] Embodiment 2

[0076] Figure 3 FIG. 1 is a schematic diagram showing a structure in which an alignment receiving device 8 is installed on a bottom plate 1 in another embodiment of a resistivity measurement system reset device of the present invention. Figure 3 As shown, on the basis of the first embodiment, an alignment receiving device 8 is added.

[0077] Since the upper probe (first probe 2) and the lower probe (second probe 5) may be misaligned during the process of adjusting the reset of the resistivity measurement system, resulting in a direct deviation between the upper and lower probes, in this embodiment, the resistivity measurement system reset device also includes an alignment receiving device 8. For precise alignment, the alignment receiving device 8 is provided on the base plate 1, which is used to align the first probe 2 and the second probe 5, and the alignment receiving device 8 and the distance detection device are installed in the same distribution. The alignment receiving device 8 will work only after receiving the laser signal of the laser rangefinder, so as to align the upper and lower probes. The laser rangefinder emits a laser, and an optical receiver is installed on the alignment receiving device 8. After receiving the laser signal, an output is generated; by judging whether an output is generated, it is determined whether it is aligned.

[0078] In a specific implementation, the alignment receiving device 8 may include a laser rangefinder, which simultaneously detects the distance from the alignment receiving device 8 to the distance detection device. The distance here refers to the laser rangefinder installed on the base plate 1, which detects the distance between the base plate 1 and the distance detection device (the laser rangefinder installed on the upper probe).

[0079] In this embodiment, the resistivity measurement system reset method disclosed in the first embodiment can still be used to adjust the position of the first probe.

[0080] The beneficial effect of implementing this embodiment is that it can simultaneously ensure that the probe does not deviate.

[0081] Embodiment 3

[0082] Figure 4 FIG. 1 is a schematic diagram of the structure of another embodiment of the resistivity measurement system reset device of the present invention, wherein the transmission and support device is provided. Figure 4 As shown, in order to detect whether the position of the sample 9 is tilted or offset, the resistivity measurement system reset device also includes a transmission and support device. The transmission and support device is arranged below the sample 9, and is used to control the transmission and support device to adjust the position of the sample 9 through the support adjustment device 12 when the sample 9 is tilted or offset.

[0083] In specific implementation, there can be multiple transmission and support devices. In this embodiment, two are provided, namely a first transmission and support device 10 and a second transmission and support device 11. The first transmission and support device 10 and the second transmission and support device 11 are symmetrically and evenly arranged on the left and right sides below the sample 9 to uniformly apply force to the sample 9.

[0084] In a specific implementation, the transmission and support device may include a transmission mechanism, which includes a first motor, a first reducer, a transmission belt or chain, and a roller. The first motor is used to reduce the rotation speed and increase the torque through the first reducer to drive the transmission belt or chain to move. The roller is installed above or on the side of the conveyor belt and is in direct contact with the sample 9 to achieve the transmission of the sample 9.

[0085] When adjusting the tilted specimen, the transmission mechanism needs to accurately control the moving speed and direction of the specimen to ensure that the specimen can be moved to the target position smoothly and accurately.

[0086] In a specific implementation, the transmission and support device also includes a support device. The support device may include a support frame, a support plate, an adjustment bolt, etc. The support frame, as the skeleton of the support device, needs to have sufficient strength and stability to support components such as the specimen and the transmission mechanism. The support plate is installed on the support frame to carry the specimen. When adjusting the tilted specimen, the angle and height of the support plate can be adjusted to keep the specimen and the transmission mechanism in a vertical or horizontal state. The adjustment bolt is used to fix the position of the support plate to ensure the stability of the specimen during the adjustment process.

[0087] In addition, in order to further improve the adjustment accuracy and stability of the transmission and support devices, some auxiliary components can be added. For example, the sensor can monitor the position and posture of the sample in real time and provide accurate data support for the control system. The control system automatically adjusts the movement speed and direction of the transmission mechanism, as well as the angle and height of the support device according to the feedback signal of the sensor to achieve precise adjustment of the sample. At the same time, in order to reduce the vibration and impact of the sample during the transmission process, components such as shock pads or shock absorbers can be added between the transmission mechanism and the support device.

[0088] In the specific operation process, when the sample is found to be tilted, the movement of the transmission mechanism is stopped first, and then the angle and height of the support plate in the support device are adjusted to keep the sample and the transmission mechanism in a vertical or horizontal state. During the adjustment process, the position and posture of the sample can be monitored in real time by sensors, and the relevant parameters of the transmission mechanism and the support device can be automatically adjusted through the control system. When the sample is adjusted to a straight state, the transmission mechanism is started again to transport the sample to the target position.

[0089] In this embodiment, the position of the sample can be adjusted by referring to the resistivity measurement system reset method disclosed in the first embodiment, wherein the object of adjustment is changed from the probe to the transmission and support device.

[0090] The beneficial effect of implementing this embodiment is that the sample is prevented from tilting or deflecting, thereby improving the accuracy of the system.

[0091] Embodiment 4

[0092] Figure 5 Schematic diagram of adjusting the transmission and support device of another embodiment of the resistivity measurement system reset device of the present invention. The difference between this embodiment and the third embodiment is that the distance detection device is installed on the bottom plate to detect whether the sample is tilted or offset from below the sample. When the sample is offset, the transmission and support device is controlled by the support adjustment device 12 to adjust the position of the sample 9.

[0093] In this embodiment, the position of the sample can be adjusted by referring to the resistivity measurement system reset method disclosed in the first embodiment, wherein the object of adjustment is changed from the probe to the transmission and support device.

[0094] The beneficial effect of implementing this embodiment is that the sample is prevented from tilting or deflecting, and the accuracy of the measurement system can be improved.

[0095] The present invention can be used in many general or special computer system environments or configurations. For example: personal computers, server computers, handheld or portable devices, tablet devices, multiprocessor systems, microprocessor-based systems, set-top boxes, programmable consumer electronic devices, network PCs, minicomputers, mainframe computers, distributed computing environments including any of the above systems or devices, etc. The present invention can be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present invention can also be practiced in distributed computing environments, in which tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules can be located in local and remote computer storage media including storage devices.

[0096] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be implemented by instructing the relevant hardware through computer-readable instructions, and the computer-readable instructions can be stored in a computer-readable storage medium. When the program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, the aforementioned storage medium can be a non-volatile storage medium such as a disk, an optical disk, a read-only memory (ROM), or a random access memory (RAM).

[0097] It should be understood that, although the steps in the flowchart of the accompanying drawings are displayed in sequence as indicated by the arrows, these steps are not necessarily executed in sequence in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least a part of the steps in the flowchart of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed in turn or alternately with other steps or at least a part of the sub-steps or stages of other steps.

[0098] Embodiment 5

[0099] To solve the above technical problems, the embodiment of the present invention also provides a computer device. Figure 7 , Figure 7 This is a basic structural block diagram of the computer device in this embodiment.

[0100] The computer device 7 includes a memory 71, a processor 72, and a network interface 73 that are interconnected through a system bus. It should be noted that the figure only shows a computer device 7 having components of a memory 71, a processor 72, and a network interface 73, but it should be understood that it is not required to implement all the components shown, and more or fewer components may be implemented instead. Among them, those skilled in the art can understand that the computer device here is a device that can automatically perform numerical calculations and / or information processing according to pre-set or stored instructions, and its hardware includes but is not limited to a microprocessor, an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a digital processor (DSP), an embedded device, etc.

[0101] The computer device may be a desktop computer, a notebook computer, a PDA, a cloud server, etc. The computer device may interact with the user through a keyboard, a mouse, a remote control, a touch pad, or a voice control device.

[0102] The memory 71 includes at least one type of readable storage medium, and the readable storage medium includes flash memory, hard disk, multimedia card, card-type memory (for example, SD or DX memory, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memory, disk, optical disk, etc. In some embodiments, the memory 71 may be an internal storage unit of the computer device 7, such as a hard disk or memory of the computer device 7. In other embodiments, the memory 71 may also be an external storage device of the computer device 7, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (FlashCard), etc. equipped on the computer device 7. Of course, the memory 71 may also include both the internal storage unit of the computer device 7 and its external storage device. In this embodiment, the memory 71 is generally used to store the operating system and various application software installed on the computer device 7, such as computer-readable instructions of the resistivity measurement system reset method, etc. In addition, the memory 71 can also be used to temporarily store various types of data that have been output or are to be output.

[0103] The processor 72 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, or other data processing chips in some embodiments. The processor 72 is generally used to control the overall operation of the computer device 7. In this embodiment, the processor 72 is used to run the computer-readable instructions stored in the memory 71 or process data, such as running the computer-readable instructions of the resistivity measurement system reset method.

[0104] The network interface 73 may include a wireless network interface or a wired network interface. The network interface 73 is generally used to establish a communication connection between the computer device 7 and other electronic devices.

[0105] The beneficial effect of implementing this embodiment is that the tilt or offset state of the measurement system can be adjusted accurately in real time, thereby improving the accuracy of the measurement system.

[0106] Embodiment 6

[0107] The present invention also provides another embodiment, namely, providing a computer-readable storage medium, wherein the computer-readable storage medium stores computer-readable instructions, and the computer-readable instructions can be executed by at least one processor to enable the at least one processor to perform the steps of the resistivity measurement system reset method as described above.

[0108] The beneficial effects of implementing this embodiment are: preventing the sample from tilting or deflecting, and improving the accuracy of the system.

[0109] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, a magnetic disk, or an optical disk), and includes a number of instructions for a terminal device (which can be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the various embodiment methods of the present invention.

[0110] There is a simple mathematical conversion relationship between resistivity, conductivity and square resistance. Therefore, the method and device of the present invention are also applicable to adjusting the position of the probe or sample in the scenario of measuring conductivity and square resistance. Obviously, the embodiments described above are only part of the embodiments of the present invention, not all of them. The preferred embodiments of the present invention are given in the accompanying drawings, but they do not limit the scope of the patent of the present invention. The present invention can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive. Although the present invention is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific embodiments, or to replace some of the technical features therein with equivalents. Any equivalent structure made using the contents of the specification and drawings of the present invention, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the present invention.

Claims

1. A resistivity measurement system reset device, characterized in that: include: A base plate, a sample, a first probe, a first distance detection device, a second distance detection device, a probe adjustment device, and a storage and computing device; wherein the base plate or the sample is used to assist the first distance detection device and the second distance detection device to complete distance detection, and the first probe is vertically arranged above the base plate; the first distance detection device is arranged in parallel with the first probe, fixed on the first probe, and used to measure the distance between the first distance detection device and the base plate; the second distance detection device is symmetrically arranged with the first distance detection device, fixed on the first probe, and used to measure the distance between the second distance detection device and the base plate; the probe adjustment device is arranged above the first probe; the storage and computing device is connected to the distance detection device, the sample is arranged above the base plate, parallel to the base plate, and the sample has no contact with the base plate or the first probe.

2. The resistivity measurement system reset device according to claim 1, characterized in that: The measurement system resetting device further includes: a second probe vertically mounted on the bottom plate and in a straight line with the center of the first probe.

3. The resistivity measurement system reset device according to claim 1, characterized in that: The distance detection device comprises a laser rangefinder, and the laser emission direction of the laser rangefinder is parallel to the direction of the first probe and perpendicular to the sample or the bottom plate.

4. The resistivity measurement system reset device according to claim 2, characterized in that: The measurement system resetting device further includes: an alignment receiving device, which is disposed on the bottom plate and is used to align the first probe with the second probe.

5. The resistivity measurement system reset device according to claim 1, characterized in that: The measurement system resetting device further comprises: a transmission and support device, which is disposed below the sample and is used to adjust the sample when the sample is tilted or offset.

6. The resistivity measurement system reset device according to claim 5, characterized in that: The transmission and support devices are provided in plurality, and the plurality of transmission and support devices are evenly arranged below the sample.

7. The resistivity measurement system reset device according to any one of claims 1 to 6, characterized in that: The probe adjustment device includes an adjustment mechanism, which includes a second motor, a reducer, and a transmission shaft. The second motor is used to drive the reducer to rotate, and the reducer is used to drive the transmission shaft to rotate, thereby realizing the movement and rotation of the first probe.

8. A method for resetting a resistivity measurement system, characterized in that: Applied to the measurement system resetting device according to any one of claims 1 to 7, the position of the first probe is adjusted according to the result of the distance measurement, and the method comprises the following steps: Step S1, calculating the average value of the real-time measurement result d1 of the first distance detection device and the real-time measurement result d2 of the second distance detection device If the average is not equal to the preset standard distance d, jump to step S2; if the average value If it is equal to the preset standard distance d, jump to step S3; Step S2, if the average value When the distance is greater than the preset standard distance d, the first probe is moved away from the base plate or the sample. If the average When the distance is less than the preset standard distance d, the first probe is moved toward the direction close to the base plate or the sample. Then re-measure the distance and jump to step S1; Step S3, calculate the first distance deviation a1=d1-d; if the absolute value of the first distance deviation a1 is less than or equal to the preset maximum error γ, the adjustment is completed; otherwise, if the first distance deviation a1 is greater than the preset maximum error γ, rotate the first probe counterclockwise; if the first distance deviation a1 is less than the negative of the preset maximum error γ, rotate the first probe clockwise; then re-measure the distance and jump to step S1.

9. The resistivity measurement system reset method according to claim 8, characterized in that: In the step S3, when the first probe is rotated counterclockwise and clockwise, the rotation angle is a multiple of arc tan a1 / d1 or arc tan a1 / d1 or a minimum rotation angle supported by the probe adjustment device.

10. The resistivity measurement system reset method according to claim 8, characterized in that: The method further comprises: during the adjustment process, counting the number of adjustment times, and ending the adjustment process when the value of the number of adjustment times exceeds a preset maximum number of adjustment times.

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