Radio frequency power supply system dlp non-linear correction method, device, equipment and medium

Abstract

The present application relates to a kind of DLP nonlinear correction method, device, equipment and medium of radio frequency power supply system, including according to the working mode information of radio frequency power supply system obtained, determine whether radio frequency power supply system is in amplitude modulation mode;In the case where radio frequency power supply system is in amplitude modulation mode, the expected output power value currently selected by radio frequency power supply system is acquired;According to the expected output power value currently selected, the coefficient table corresponding to the power level where the expected output power value is located is inquired, and the target value of output amplitude coefficient is obtained, wherein the coefficient table corresponding to different power levels is stored by different bit width The corresponding relationship of the value of expected output power value and output amplitude coefficient is used to compatible DAC attenuation and DDS source amplitude modulation output in radio frequency power supply system;According to the target value of output amplitude coefficient, power amplifier gain and signal link attenuation sum, the target expected output power value of radio frequency power supply system is determined.

Description

Technical Field

[0001] This disclosure relates to the field of power supply technology, and in particular to a method, apparatus, equipment and medium for DLP nonlinear correction of radio frequency power supply systems. Background Technology

[0002] The RF power supply system exhibits severe nonlinear characteristics. The DDS source output is a linear system with a frequency resolution of 500MHz / 32bit, a phase resolution of 360 degrees / 14bit, and an amplitude resolution of 10mA / 10bit. It also has three output modes: single-mode, modulation, and linear sweep frequency / phase / amplitude. The DAC attenuation output is approximately a linear system. However, because the PA power amplifier uses LDMOS transistors, its gain is related not only to the quiescent operating point but also to the input power. It can be divided into a gain expansion curve in the low-power output range, a gain stability curve in the mid-power range, and a gain compression curve in the high-power range. (See [reference needed]). Figure 1-3 The characteristic curve shown, and Figure 4 The diagram shows the normalized graphs of the DAC output value, output power, and coupler forward power acquisition signal (DAC att power ADC measure) during open-loop operation. It is evident that the nonlinear circuitry and attenuation create a gain expansion curve, making accurate output power control of the RF power supply system difficult. Summary of the Invention

[0003] The purpose of this invention is to provide a method, apparatus, device, and medium for DLP nonlinear correction of an RF power supply system, aiming to solve the problem that nonlinear circuits and attenuation form gain expansion curves, making it difficult to accurately control the output power of the RF power supply system.

[0004] To achieve the above objectives, a first aspect of this disclosure provides a DLP nonlinearity correction method for an RF power supply system, the method comprising:

[0005] Based on the obtained operating mode information of the radio frequency power system, determine whether the radio frequency power system is in amplitude modulation mode;

[0006] When the RF power system is in amplitude modulation mode, obtain the currently selected desired output power value of the RF power system;

[0007] Based on the currently selected desired output power value, the coefficient table corresponding to the power level of the desired output power value is queried to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system.

[0008] The target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0009] In one possible implementation, the coefficient table corresponding to the different power levels is constructed in the following way:

[0010] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0011] Based on the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source, determine the correspondence between each power level and the maximum power value;

[0012] Based on the correspondence between the power level and the maximum power value, determine the value of the output amplitude coefficient corresponding to the output power value within the power range corresponding to each power level;

[0013] The output amplitude coefficient corresponding to the output power value within each power level is used to create a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0014] In one possible implementation, the coefficient table for power level 3kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 10-bit width, and the coefficient table for power levels 10 to 24kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 16-bit width.

[0015] In one possible implementation, the relationship between the value of the output amplitude coefficient and the power level corresponding to the desired output power value is as follows:

[0016]

[0017] Where, k i For the output amplitude coefficient of the amplitude modulation mode, p O G(P) represents the desired output power value, α represents the maximum output amplitude, and G(P) represents the maximum output amplitude. i ) represents the power amplifier gain, and Att represents the total signal link attenuation.

[0018] In one possible implementation, the method further includes:

[0019] When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined based on the phase difference between the two channels, wherein the dual-channel synthesis mode is the synthesis of the sensor channel and the ADC signal acquisition link channel;

[0020] The target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0021] In one possible implementation, with the RF power system in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0022]

[0023] Where, k j The target value for the output amplitude coefficient of the dual-channel synthesis mode. denoted as , where is the phase difference between the two channels, and cos is the cosine function in mathematical calculations.

[0024] A second aspect of this disclosure provides a DLP nonlinear correction device for a radio frequency power supply system, comprising:

[0025] The first determining module is configured to determine whether the radio frequency power system is in amplitude modulation mode based on the obtained operating mode information of the radio frequency power system.

[0026] The acquisition module is configured to acquire the currently selected desired output power value of the RF power system when the RF power system is in amplitude modulation mode;

[0027] The query module is configured to query the coefficient table corresponding to the power level of the currently selected desired output power value to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system.

[0028] The second determining module is configured to determine the target expected output power value of the RF power system based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0029] A third aspect of this disclosure provides an electronic device, comprising:

[0030] A memory on which computer programs are stored;

[0031] A processor for executing the computer program in the memory to implement the steps of the method of any one of the first aspects.

[0032] A fourth aspect of this disclosure provides a computer-readable storage medium having a computer program stored thereon that, when executed by a processor, implements the steps of the method described in any of the first aspects.

[0033] This invention provides a method, apparatus, device, and medium for DLP nonlinear correction of an RF power supply system. Compared with the prior art, it has the following advantages:

[0034] By acquiring the operating mode information of the RF power supply system, the system intelligently identifies whether it is in amplitude modulation mode. After confirming that the system is in amplitude modulation mode, the currently selected desired output power value is obtained, ensuring the accuracy of subsequent power adjustment and enabling the system to adjust the output power according to actual needs. Based on the currently selected desired output power value, the corresponding power level coefficient table is consulted to obtain the target value of the output amplitude coefficient. Different power level coefficient tables use different bit widths to store the correspondence between the desired output power value and the output amplitude coefficient value. The attenuation characteristics of the DAC attenuation module and the amplitude modulation output capability of the DDS source in the RF power supply system are fully considered, ensuring accurate power adjustment at different power levels. This not only improves the output power adjustment accuracy of the RF power supply system in amplitude modulation mode but also achieves effective compatibility with the amplitude modulation output of the DAC attenuation module and the DDS source. This allows the system to meet the needs of various complex application scenarios while ensuring output power stability. Based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation, the target desired output power value of the RF power supply system is determined. This ensures that the system can operate stably according to the predetermined desired output power, improving the overall performance and reliability of the system. In summary, by intelligently identifying the operating mode, accurately obtaining the desired output power value, efficiently utilizing the power level coefficient table, and determining the target desired output power value, the precise adjustment of the output power of the RF power supply system in amplitude modulation mode is achieved.

[0035] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description

[0036] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings:

[0037] Figure 1This is a schematic diagram illustrating typical values ​​of power gain and drain efficiency as functions of output power and output power as a function of input power, as shown in the embodiments of the specification.

[0038] Figure 2 This is a schematic diagram illustrating typical values ​​of power gain and drain efficiency as functions of output power, and drain efficiency as a function of output power, as shown in the embodiments of the specification.

[0039] Figure 3 This is a schematic diagram illustrating another typical value obtained by using power gain and drain efficiency as a function of output power, and drain efficiency as a function of output power, according to an embodiment of the specification.

[0040] Figure 4 This is a normalized graph of the DAC output value, output power, and coupler forward power acquisition signal, as shown in the embodiment of the specification.

[0041] Figure 5 This is a flowchart illustrating a DLP nonlinear correction method for an RF power supply system according to an embodiment in the specification.

[0042] Figure 6 This is a block diagram of a radio frequency power system DLP nonlinear correction device according to an embodiment of the specification.

[0043] Figure 7 This is a block diagram of another radio frequency power system DLP nonlinear correction device shown in the embodiment of the specification. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.

[0046] This disclosure provides a DLP nonlinearity correction method for an RF power supply system. Figure 5 This is a flowchart illustrating a DLP nonlinearity correction method for an RF power supply system according to an embodiment. Specifically, the method includes:

[0047] In step S11, based on the obtained operating mode information of the radio frequency power system, it is determined whether the radio frequency power system is in amplitude modulation mode.

[0048] In this embodiment, apart from the power amplifier, the DDS source and attenuator can still be approximated as a linear system. However, the BAP70Q signal link suffers from instability such as slow impulse response, overshoot, and oscillation. Therefore, in DLP (Dual Level Pulsing) applications, to reduce output power fluctuations caused by power level switching, the system input and output can be defined as the following functional relationship:

[0049] P O =G(P i )·Att·k·α

[0050] Among them, G(p i () represents the amplifier gain, which is a function of the input power. See [reference needed]. Figure 1-3 Att is the total signal link attenuation, which is approximately a linear coefficient. k is the output amplitude coefficient of the DDS source, which is also a linear coefficient and can be fixed at 1. α is the maximum output amplitude of the DDS, which can be in mA. For example, it can be 10. However, for ease of calculation, it can be normalized to 1.

[0051] Operating modes: The RF power supply system can be set to different operating modes according to its application requirements, such as amplitude modulation mode, frequency modulation mode, and phase modulation mode. Amplitude modulation mode: In this mode, the output amplitude (i.e., power) of the RF power supply varies according to the input signal or a preset program.

[0052] In this embodiment of the disclosure, the radio frequency power supply system has an operating mode selection function. By detecting or reading the internal status of the system or external control signals, the current operating mode can be determined. The system first checks its operating mode information to determine whether it is in amplitude modulation mode.

[0053] For example, suppose an RF power supply system selects its operating mode by receiving an external control signal. When it receives a control signal indicating the amplitude modulation mode, the system confirms that it is in amplitude modulation mode and prepares for subsequent power regulation operations.

[0054] In step S12, when the RF power system is in amplitude modulation mode, the desired output power value currently selected by the RF power system is obtained;

[0055] The desired output power value is the power value that the RF power supply should output, as set by the user or the system, and is the target of system power regulation. In amplitude modulation mode, the RF power supply system needs to adjust its output power according to the desired output power value set by the user or a preset program.

[0056] In step S13, based on the currently selected desired output power value, the coefficient table corresponding to the power level of the desired output power value is queried to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system.

[0057] The coefficient table stores the correspondence between the desired output power value and the output amplitude coefficient. The output amplitude coefficient is used to adjust the output amplitude of the RF power supply; changing this coefficient changes the output power. The DAC attenuation module is the attenuation module after the digital-to-analog converter (DAC), used to further adjust the amplitude of the RF signal. The DDS source is a direct digital synthesis (DDS) source used to generate the frequency, phase, and amplitude of the RF signal.

[0058] In this embodiment, the RF power supply system typically includes multiple power levels, each corresponding to a coefficient table. These coefficient tables are designed and stored based on the attenuation characteristics of the DAC attenuation module and the amplitude modulation output capability of the DDS source. The system searches the coefficient table for the corresponding power level based on the currently selected desired output power value and obtains the corresponding output amplitude coefficient. This coefficient is used to subsequently adjust the output power of the RF power supply.

[0059] For example: Suppose an RF power supply system has three power levels, each corresponding to a coefficient table. When the desired output power is 100W, the system determines that this value belongs to the second power level and looks up the corresponding coefficient table for that level. In this table, the system finds an output amplitude coefficient of 1.2 (this is just an example value) corresponding to 100W, which is used for subsequent adjustments to the output power.

[0060] In step S14, the target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0061] Among them, power amplifier gain: the gain of the power amplifier (power amplifier), which indicates the degree to which the power amplifier amplifies the input signal. Total signal link attenuation: the sum of all attenuations experienced by the RF signal from the DDS source to the power amplifier output.

[0062] In this embodiment of the disclosure, the target desired output power value of the RF power supply system is calculated based on the obtained output amplitude coefficient, power amplifier gain, and the sum of signal link attenuation. This step takes into account the attenuation and amplification of the RF signal during transmission to ensure that the system can output the desired output power value set by the user or a preset program.

[0063] For example: Assume the power amplifier gain is 2 (i.e., the signal is amplified by 2 times), and the total signal link attenuation is 0.5 (i.e., the signal loses half its power during transmission). The output amplitude coefficient obtained in step S13 is 1.2. The system uses these parameters to calculate the target desired output power value. For example, if the original desired output power value is 100W, after calculation, the system may determine that the actual output power value should be 120W (this is just an example value) to ensure that the desired output power value of the user or preset program is still met after taking into account the power amplifier gain and signal link attenuation.

[0064] The above technical solution intelligently identifies whether the RF power supply system is in amplitude modulation mode by acquiring its operating mode information. After confirming the system is in amplitude modulation mode, it obtains the currently selected desired output power value, ensuring the accuracy of subsequent power adjustment and enabling the system to adjust the output power according to actual needs. Based on the currently selected desired output power value, it queries the corresponding power level coefficient table to obtain the target value of the output amplitude coefficient. The coefficient tables for different power levels use different bit widths to store the correspondence between the desired output power value and the output amplitude coefficient value. It fully considers the attenuation characteristics of the DAC attenuation module and the amplitude modulation output capability of the DDS source in the RF power supply system, ensuring accurate power adjustment at different power levels. This not only improves the output power adjustment accuracy of the RF power supply system in amplitude modulation mode but also achieves effective compatibility with the amplitude modulation output of the DAC attenuation module and the DDS source. This allows the system to meet the needs of various complex application scenarios while ensuring output power stability. Based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation, the target desired output power value of the RF power supply system is determined. This ensures the system operates stably at the predetermined expected output power, improving overall system performance and reliability. In summary, by intelligently identifying the operating mode, accurately acquiring the expected output power value, efficiently utilizing the power level coefficient table, and determining the target expected output power value, precise adjustment of the RF power supply system's output power in amplitude modulation mode is achieved. Simultaneously, when implementing Digital Signal Processing (DSP) / Multi-Level Pulsing (MLP) functions, combined with the gradual decrease and increase of the DDS source output, open-loop control, delayed closed-loop, multiple tuning, and coefficient register switching can be employed to achieve DSP / MLP functions with arbitrary power settings.

[0065] In one possible implementation, the coefficient table corresponding to the different power levels is constructed in the following way:

[0066] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0067] The power range is the interval between the minimum and maximum values ​​of the output power that can vary within each power level.

[0068] In this embodiment of the disclosure, based on the design and application requirements of the RF power supply system, the number of power levels the system can support and the power range corresponding to each level are first determined. This allows for a deeper understanding of the system hardware (such as power amplifiers, attenuators, etc.) and software (such as control algorithms).

[0069] For example: Suppose the RF power supply system supports three power levels: low, medium, and high. The low level corresponds to a power range of 0-3kW, the medium level is 3k-10kW, and the high level is 10-24kW.

[0070] Based on the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source, determine the correspondence between each power level and the maximum power value;

[0071] The maximum power value refers to the maximum power that the RF power supply system can output. The mapping relationship here refers to the relationship between power levels and the maximum power value, used to determine the proportion or range of each power level relative to the maximum power value.

[0072] In this embodiment of the disclosure, the correspondence between each power level and the maximum power value is determined by calculation or experiment based on the maximum power value of the RF power supply system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source. For example, the correspondence can be determined by calculating a ratio.

[0073] Based on the correspondence between the power level and the maximum power value, determine the value of the output amplitude coefficient corresponding to the output power value within the power range corresponding to each power level;

[0074] In this embodiment of the disclosure, for each power level, the value of the corresponding output amplitude coefficient is determined by calculation or experiment based on the output power value within that level and a defined correspondence. This typically involves precise measurement and adjustment of the system output characteristics.

[0075] The output amplitude coefficient corresponding to the output power value within each power level is used to create a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0076] Bit width: In a digital system, it refers to the number of binary bits occupied by a value, which determines the maximum and minimum values ​​that the value can represent.

[0077] In this embodiment of the disclosure, a coefficient table is created based on the output amplitude coefficient corresponding to the output power value within each power level, and the bit width corresponding to that level (which is usually related to the system's resolution and accuracy). The larger the bit width, the wider the range of output power that can be precisely adjusted under that power level.

[0078] For example: Suppose the bit width corresponding to the low level is 8 bits (i.e., 256 different output amplitude coefficient values), the medium level is 10 bits (i.e., 1024 different values), and the high level is 16 bits. Then, for each output power value in the low level, an 8-bit output amplitude coefficient value can be found in the coefficient table; similarly, the same applies to the medium and high levels.

[0079] In one possible implementation, the coefficient table for power level 3kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 10-bit width, and the coefficient table for power levels 10 to 24kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 16-bit width.

[0080] Wherein, the linear coefficients are defined as: G Att =Att·k, then P O =G(P i )·Att·k·α, then according to Figure 4 G is obtained by creating a reverse lookup table. Att =LUT(P o In DLP / MLP applications, to keep Att constant, a maximum output power value p is defined. max And other power values ​​p0, p1, ..., then:

[0081]

[0082]

[0083]

[0084]

[0085] ...

[0086] To simultaneously support linear output adjustment during PID control while keeping k constant, we have:

[0087]

[0088] Therefore, the lookup table can be made 16-bit wide, which is compatible with both DAC attenuation (16-bit) and DDS amplitude modulation output (taking the high 10 bits as the DDS amplitude modulation coefficient).

[0089] One approach is to use a lookup table to convert the nonlinearity of power amplification into linear adjustment of the DDS. While nonlinearity is inherent in the circuit and attenuation, it doesn't affect feasibility because the coefficient only minimizes the error in the set power value, serving as a "coarse adjustment" of the power output. "Fine adjustment" is handled in the PID fine-tuning stage. Simultaneously, the "repeatability" of the lookup table must be ensured; that is, the power value and the DAC / DDS coefficients may not perfectly correspond, but the measured values ​​under the same conditions should not deviate significantly, thereby improving control accuracy.

[0090] In one possible implementation, the relationship between the value of the output amplitude coefficient and the power level corresponding to the desired output power value is as follows:

[0091]

[0092] Where, k i For the output amplitude coefficient of the amplitude modulation mode, p O G(P) represents the desired output power value, α represents the maximum output amplitude, and G(P) represents the maximum output amplitude. i ) represents the power amplifier gain, and Att represents the total signal link attenuation.

[0093] In one possible implementation, the method further includes:

[0094] When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined based on the phase difference between the two channels, wherein the dual-channel synthesis mode is the synthesis of the sensor channel and the ADC signal acquisition link channel;

[0095] Among them, the dual-channel synthesis mode refers to the RF power system operating two channels simultaneously (sensor channel and ADC signal acquisition link channel) and synthesizing their output signals.

[0096] Phase difference: The relative displacement of two or more signals over time, usually measured in angle or time. In two-channel synthesis, the phase difference affects the amplitude and phase of the synthesized signal.

[0097] Target value of output amplitude coefficient: In dual-channel synthesis mode, the value of the output amplitude coefficient needs to be adjusted in order to obtain the desired synthesized signal amplitude.

[0098] In this embodiment of the disclosure, when the RF power supply system is in dual-channel synthesis mode, the output signals of the sensor channel and the ADC signal acquisition link channel are synthesized. Since there may be a phase difference between the two channels, this will affect the amplitude of the synthesized signal. To obtain the desired synthesized signal amplitude, the output amplitude coefficient needs to be adjusted according to the phase difference. This typically involves a deep understanding of the signal synthesis principle and precise control of the system hardware and software characteristics.

[0099] For example, suppose the output signals of the sensor channel and the ADC signal acquisition link channel have a 90-degree phase difference in the time domain. According to the principle of signal synthesis, when the two signals have a 90-degree phase difference, the amplitude of their synthesized signal will be √2 times the amplitudes of the two signals (assuming the amplitudes of the two signals are equal). Therefore, in order to obtain the desired synthesized signal amplitude, it may be necessary to adjust the output amplitude coefficient to √2 of the original value (i.e., multiply by 0.707) to compensate for the amplitude change caused by the phase difference.

[0100] The target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0101] Similarly, according to P mentioned in the foregoing embodiments O =G(P i The target desired output power value can be derived and calculated using the formula α·Att·k·α.

[0102] In one possible implementation, with the RF power system in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0103]

[0104] Where, k j The target value for the output amplitude coefficient of the dual-channel synthesis mode. denoted as , where is the phase difference between the two channels, and cos is the cosine function in mathematical calculations.

[0105] This disclosure also provides a DLP nonlinear correction device for an RF power supply system. See [link to relevant documentation] Figure 6 As shown, it includes:

[0106] The first determining module 210 is configured to determine whether the radio frequency power system is in amplitude modulation mode based on the obtained operating mode information of the radio frequency power system.

[0107] The acquisition module 220 is configured to acquire the currently selected desired output power value of the RF power system when the RF power system is in amplitude modulation mode;

[0108] The query module 230 is configured to query the coefficient table corresponding to the power level of the currently selected desired output power value to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system.

[0109] The second determining module 240 is configured to determine the target expected output power value of the RF power system based on the target value of the output amplitude coefficient, the power amplifier gain, and the sum of the signal link attenuation.

[0110] In one possible implementation, the query module 230 is configured to construct a coefficient table corresponding to different power levels in the following manner:

[0111] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0112] Based on the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source, determine the correspondence between each power level and the maximum power value;

[0113] Based on the correspondence between the power level and the maximum power value, determine the value of the output amplitude coefficient corresponding to the output power value within the power range corresponding to each power level;

[0114] The output amplitude coefficient corresponding to the output power value within each power level is used to create a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0115] In one possible implementation, the coefficient table for power level 3kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 10-bit width, and the coefficient table for power levels 10 to 24kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 16-bit width.

[0116] In one possible implementation, the relationship between the value of the output amplitude coefficient and the power level corresponding to the desired output power value is as follows:

[0117]

[0118] Where, k i For the output amplitude coefficient of the amplitude modulation mode, p OG(P) represents the desired output power value, α represents the maximum output amplitude, and G(P) represents the maximum output amplitude. i ) represents the power amplifier gain, and Att represents the total signal link attenuation.

[0119] In one possible implementation, the first determining module 210 is configured as follows:

[0120] When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined based on the phase difference between the two channels, wherein the dual-channel synthesis mode is the synthesis of the sensor channel and the ADC signal acquisition link channel;

[0121] The target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

[0122] In one possible implementation, with the RF power system in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0123]

[0124] Where, k j The target value for the output amplitude coefficient of the dual-channel synthesis mode. denoted as , where is the phase difference between the two channels, and cos is the cosine function in mathematical calculations.

[0125] This disclosure also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of any of the methods described in the foregoing embodiments.

[0126] This disclosure also provides an electronic device, including:

[0127] A memory on which computer programs are stored;

[0128] A processor for executing the computer program in the memory to implement the steps of any of the methods described in the foregoing embodiments.

[0129] Figure 7The illustrated DLP nonlinear correction device 100 for an RF power system includes a processor 1001 and a memory 1003. The processor 1001 and the memory 1003 are connected, for example, via a bus 1002. Optionally, the DLP nonlinear correction device 100 may further include a communication component 1004, which can be used for data interaction between the device 100 and other devices, such as data transmission and / or data reception. It should be noted that in actual operation, the communication component 1004 is not limited to one, and the structure of this DLP nonlinear correction device 100 does not constitute a limitation on the embodiments of this application.

[0130] Processor 1001 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It can implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. Processor 1001 may also be a combination that implements computing functions, such as including one or more microprocessor combinations, a combination of a DSP and a microprocessor, etc.

[0131] Bus 1002 may include a pathway for transmitting information between the aforementioned components. Bus 1002 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. Bus 1002 can be divided into address bus, data bus, control bus, etc. For ease of representation, Figure 7 The bus is represented by a single thick line, but this does not mean that there is only one bus or one type of bus.

[0132] The memory 1003 may be ROM (Read Only Memory) or other types of static storage devices capable of storing static information and instructions, RAM (Random Access Memory) or other types of dynamic storage devices capable of storing information and instructions, or EEPROM (Electrically Erasable Programmable Read Only Memory), CD-ROM (Compact Disc Read Only Memory) or other optical disc storage, optical disc storage (including compressed optical discs, laser discs, optical discs, digital universal optical discs, Blu-ray discs, etc.), magnetic disk storage media, other magnetic storage devices, or any other medium capable of carrying or storing program code and capable of being read by a computer, without limitation herein.

[0133] The memory 1003 is used to store program code for executing the embodiments of this disclosure, and its execution is controlled by the processor 1001. The processor 1001 is used to execute the program code stored in the memory 1003 to implement the steps shown in the embodiments of the DLP nonlinear correction method for the aforementioned radio frequency power supply system.

[0134] This disclosure also provides a computer-readable storage medium storing program code. When the program code is executed by a processor, it can implement the steps and corresponding content of the aforementioned embodiment of the DLP nonlinear correction method for radio frequency power systems.

[0135] The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings. However, the present disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present disclosure, various changes, modifications, substitutions and variations can be made to these embodiments, and all such changes, modifications, substitutions and variations fall within the protection scope of the present disclosure.

[0136] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction, and such combinations should also be considered as part of this disclosure. To avoid unnecessary repetition, this disclosure will not further describe the various possible combinations. The technical scope of this application is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A DLP nonlinearity correction method for an RF power supply system, characterized in that, The method includes: Based on the obtained operating mode information of the radio frequency power system, determine whether the radio frequency power system is in amplitude modulation mode; When the RF power system is in amplitude modulation mode, obtain the currently selected desired output power value of the RF power system; Based on the currently selected desired output power value, the coefficient table corresponding to the power level of the desired output power value is queried to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system. The target expected output power value of the RF power supply system is determined based on the total signal link attenuation, the target value of the output amplitude coefficient, and the power amplifier gain.

2. The DLP nonlinearity correction method for an RF power supply system as described in claim 1, characterized in that, The coefficient table corresponding to the different power levels is constructed in the following way: Determine each of the power levels and corresponding power ranges supported by the radio frequency power system; Based on the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source, determine the correspondence between each power level and the maximum power value; Based on the correspondence between the power level and the maximum power value, determine the value of the output amplitude coefficient corresponding to the expected output power value within the power range corresponding to each power level; The output amplitude coefficient corresponding to the desired output power value within each power level is used to create a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

3. The DLP nonlinearity correction method for an RF power supply system as described in claim 2, characterized in that, The coefficient table for power levels of 3kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 10-bit width, while the coefficient table for power levels of 10 to 24kW stores the correspondence between the expected output power value and the output amplitude coefficient value using a 16-bit width.

4. The DLP nonlinearity correction method for an RF power supply system as described in claim 2, characterized in that, The relationship between the value of the output amplitude coefficient and the power level corresponding to the desired output power value is as follows: Where, k i For the output amplitude coefficient of the amplitude modulation mode, p O G(P) represents the desired output power value, α represents the maximum output amplitude, and G(P) represents the maximum output amplitude. i ) represents the power amplifier gain, and Att represents the total signal link attenuation.

5. The DLP nonlinearity correction method for an RF power supply system as described in any one of claims 1-4, characterized in that, The method further includes: When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined based on the phase difference between the two channels, wherein the dual-channel synthesis mode is the synthesis of the sensor channel and the ADC signal acquisition link channel; The target expected output power value of the RF power supply system is determined based on the target value of the output amplitude coefficient, the power amplifier gain, and the total signal link attenuation.

6. The DLP nonlinearity correction method for an RF power supply system as described in claim 5, characterized in that, When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula: Where, k j The target value for the output amplitude coefficient of the dual-channel synthesis mode. denoted as , where is the phase difference between the two channels, and cos is the cosine function in mathematical calculations.

7. A DLP nonlinear correction device for an RF power supply system, characterized in that, include: The first determining module is configured to determine whether the radio frequency power system is in amplitude modulation mode based on the obtained operating mode information of the radio frequency power system. The acquisition module is configured to acquire the currently selected desired output power value of the RF power system when the RF power system is in amplitude modulation mode; The query module is configured to query the coefficient table corresponding to the power level of the currently selected desired output power value to obtain the target value of the output amplitude coefficient. The coefficient tables corresponding to different power levels store the correspondence between the desired output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module and the amplitude modulation output of the DDS source in the RF power supply system. The second determining module is configured to determine the target expected output power value of the RF power system based on the total signal link attenuation, the target value of the output amplitude coefficient, and the power amplifier gain.

8. An electronic device, characterized in that, include: A memory on which computer programs are stored; A processor for executing the computer program in the memory to implement the steps of the method according to any one of claims 1-6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When executed by a processor, the program implements the steps of the method described in any one of claims 1-6.

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