Mold, manufacturing method, film forming method, article manufacturing method, and imprint apparatus

By designing a mold composed of high and low elastic modulus materials and forming a transfer pattern on its surface, the problem of foreign matter on the substrate cannot be completely transferred is solved, and a high-precision and durable imprinting effect is achieved.

CN119644669APending Publication Date: 2025-03-18CANON KK
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Patent Information

Application Number
CN202411282441.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-09-15
Filing Date
2024-09-13
Publication Date
2025-03-18

AI Technical Summary

Technical Problem

When manufacturing devices such as optical components, foreign objects on the substrate cause the pattern of the replica mold to be completely transferred, and vigorous printing may damage the mold.

Method used

A mold is designed which consists of a high elastic modulus material and a low elastic modulus material. By forming a low elastic modulus portion on the convex portion of the high elastic modulus portion of the mold and forming a transfer pattern on its surface, a film of a curable composition is formed between the mold and the substrate by an imprinting method.

Benefits of technology

While forming fine patterns on the substrate, the pressure requirement for the replica mold is reduced, the non-contact area around foreign matter is reduced, and the transfer accuracy and durability of the mold is improved.

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Abstract

The invention provides a mold, a manufacturing method, a film forming method, an article manufacturing method, and an imprint apparatus. The mold includes a first portion including a first surface and a second surface on an opposite side of the first surface, the second surface including a concave portion having a concave shape, the first surface including a convex portion having a convex shape, and a second portion including a convex portion having a convex shape. The second portion includes a third surface coupled to the convex portion of the first portion and a fourth surface on an opposite side of the third surface, a pattern to be transferred to the transfer object being formed on the fourth surface, the first portion being made of a material having a first elastic modulus, and the second portion being made of a material having a second elastic modulus. And the second portion is made of a material having a second elastic modulus lower than the first elastic modulus.
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