Disassembling tool

By designing a disassembly tool including operating lever, plug-in section, abutment part and locking cone sleeve, the problem of difficulty in disassembling semiconductor equipment parts at high temperatures is solved, and convenient disassembly and safe protection of parts is achieved.

CN119658633APending Publication Date: 2025-03-21JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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Patent Information

Application Number
CN202411960090.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-27
Publication Date
2025-03-21

AI Technical Summary

Technical Problem

Semiconductor equipment parts are easily melted at high temperatures, which makes the parts sticking and not easily disassembled, and violent disassembly may lead to parts deformation and surface damage.

Method used

A disassembly tool is provided, including an operating rod, a plug section, abutment member and a locking cone sleeve. The fixing hole is inserted through the plug section, and the abutment member is connected to the operating rod at a limit. The locking cone sleeve pushes the abutment member to separate and clamps the inner wall of the fixing hole to achieve convenient disassembly of parts.

Benefits of technology

With this disassembly tool, the parts can be disassembled smoothly, avoiding deformation and surface damage of parts, simple and convenient operation, and the tools can be reused.

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Abstract

The invention provides a dismounting tool which is used for being arranged on a to-be-dismounted part, and a fixing hole is formed in the to-be-dismounted part. The detaching tool comprises an operating rod, a force applying rod, a fixing rod, a connecting rod, a connecting rod, a connecting rod and a connecting rod, and the operating rod is provided with an inserting section and a force applying section, the at least two abutting pieces are arranged outside the inserting section in a surrounding mode, the abutting pieces and the operating rod are provided with circumferential limiting, and the at least two abutting pieces can be relatively folded or relatively separated in the radial direction of the operating rod; the locking taper sleeve is in threaded connection with the operating rod, the locking taper sleeve is provided with a taper protruding block protruding towards the abutting piece, the taper protruding block is inserted between the abutting piece and the operating rod, and the locking taper sleeve and the abutting piece have circumferential limiting; the locking taper sleeve can be driven to move towards the abutting piece by rotating the operating rod, and the conical protruding block pushes the abutting piece to be relatively separated so as to be clamped on the inner wall of the fixing hole. When the disassembling tool is used for disassembling the to-be-disassembled part, the disassembling process is simple and convenient, and the body of the to-be-disassembled part is not damaged; and the dismounting tool can be repeatedly used.
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