Pre-alarm monitoring device for low gas pressure
By designing a gas pressure low-pre-alarm monitoring device including a tee pipe, an installation mechanism and a main control early warning mechanism, the problem of inconvenience in disassembly and assembly of existing devices in ion source equipment is solved, automated detection, wireless early warning and rapid maintenance are realized, and the stability and maintenance efficiency of the equipment are improved.
Patent Information
- Application Number
- CN202411851506.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2025-03-25
AI Technical Summary
When used in ion source equipment, existing gas pressure pre-alarm monitoring devices are inconvenient to disassemble and install, resulting in long maintenance time and low efficiency.
A gas pressure low pre-alarm monitoring device including a tee pipe, an installation mechanism and a main control early warning mechanism is designed. Through the convenient and stable connection between the connecting flange of the tee pipe and the ion source pipe, the air pressure sensor monitors the pressure in real time, and realizes automatic detection and wireless early warning through the microcontroller controller and wireless communication module. The installation mechanism achieves rapid disassembly and clamping installation through the cooperation of the torsion spring and the limiting assembly, simplifying the maintenance process.
Through automated detection and wireless early warning functions, the device improves the response speed and processing capacity to abnormal gas pressure conditions, ensuring the stable operation of the ion source equipment. At the same time, the simplified installation mechanism greatly reduces maintenance time and labor costs, and improves work efficiency.