MOCVD graphite carrier temperature uniformity control device and method

By using electromagnetic heating components and ultrasonic cleaning structure in the MOCVD graphite roller disk temperature control device, the problems of temperature inhomogeneity and lack of cleaning functions are solved, more efficient temperature regulation and equipment cleaning are achieved, and the production efficiency and product quality of LED epitaxial sheets are improved.

CN119753642AInactive Publication Date: 2025-04-04AEROCARB MATERIALS CO LTD
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Patent Information

Application Number
CN202411967526.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-04-04
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing MOCVD graphite roller disc temperature control device has problems such as temperature unevenness, slow heating response speed, and lack of cleaning functions, which affects the wavelength accuracy and yield of LED epitaxial sheets.

Method used

The electromagnetic heating assembly and ultrasonic cleaning structure are used to induce uniform eddy current heating through the graphite base through the electromagnetic coil to achieve temperature uniformity regulation, and the ultrasonic cleaning structure is used to physically peel off the tiny particles to maintain the clean state of the reaction chamber.

Benefits of technology

It improves the uniformity and response speed of MOCVD graphite roller disc temperature, extends the service life of the equipment, and improves the production efficiency and product quality of LED epitaxial sheets.

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Abstract

The present invention discloses a device and method for controlling the temperature uniformity of an MOCVD graphite carrier, and specifically relates to the field of semiconductor equipment manufacturing technology, including a reaction chamber, wherein a graphite base is provided inside the reaction chamber. The present invention sets an electromagnetic heating component, wherein the first electromagnetic coil is close to the bottom area of ​​the graphite base, and the coil density is appropriately increased, so as to enhance the bottom heating effect, and the second electromagnetic coil is surrounded by the middle area of ​​the reaction chamber in a spiral and annular combination, so as to make the magnetic field distribution more uniform, thereby being able to efficiently induce the graphite base to generate uniform eddy currents, realize the self-heating of the graphite carrier, so that heat is generated from the inside of the carrier and evenly distributed on the entire carrier surface, effectively reducing the temperature difference between the center and the edge, and avoiding the problem that the temperature of the part close to the heating element is too high due to heat radiation and heat conduction, a large temperature gradient is generated, and the temperature difference between different positions on the carrier is large.
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