Single-frame white light Raney interference measuring device and method based on grating modulation illumination

Through grating modulation lighting technology, an illumination light field with specific spatial frequency and phase is formed, and the morphological information of the measured surface is directly obtained, solving the problems of high complexity, time-consuming and instability caused by longitudinal scanning in traditional white light interference measurement technology, and achieving efficient and accurate surface morphological measurement.

CN119756234AActive Publication Date: 2025-04-04SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
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Patent Information

Application Number
CN202411990294.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-04-04
Estimated Expiration
2044-12-31

AI Technical Summary

Technical Problem

Traditional white light interference surface morphology measurement technology requires longitudinal scanning, resulting in high measurement complexity, long time and high instability, especially when measuring small or complex surface structures, it is easy to introduce significant measurement errors.

Method used

A single-frame white-light Raynik interference measurement device based on grating modulation illumination is used to form an illumination light field with a specific spatial frequency and phase through grating modulation white light source, and the morphological information of the measured surface is directly obtained, avoiding the longitudinal scanning process.

Benefits of technology

Single-frame measurement of thin samples with surface morphology fluctuations less than one wavelength is achieved, improving measurement efficiency and accuracy; for thick samples, the measurement accuracy is improved, the measurement time is shortened, and the system complexity is reduced by increasing the minimum scanning step.

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Abstract

The invention relates to a single-frame white light Raney interference measuring device and method based on grating modulation illumination, the device uses a grating to modulate a light source and generate a specific illumination mode, uses a white light interference principle to measure the morphology of a measured surface, and can obtain the morphology information of the measured surface by analyzing the luminosity and position of interference fringes. According to the invention, grating modulation and white light interference principles are utilized to realize single-frame high-efficiency measurement of a thin sample, and the precision is improved. When a thick sample is measured, the scanning time can be shortened and the space-time flux of measurement can be improved by increasing the scanning step and reducing the range; meanwhile, self-calibration is carried out on scanning stepping through grating stripes, the measurement stability can be improved, the environmental vibration influence can be compensated in real time, and it is ensured that the measurement result is reliable.
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