Quantitative analysis method and quantitative analysis device

By using natural isotopes in carrier gas as the detection reference in mass spectrometry analysis, the sensitivity changes caused by the change in vacuum degree are solved, and the effect of rapid detection and improving analysis accuracy is achieved.

CN119768683APending Publication Date: 2025-04-04NIPPON STEEL CORPORATION
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Patent Information

Application Number
CN202380054731.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-02-06
Filing Date
2023-07-19
Publication Date
2025-04-04

AI Technical Summary

Technical Problem

In mass spectrometry analysis, the change in the vacuum degree of the vacuum tank leads to changes in sensitivity, and frequent production of inspection lines is required, which increases the waste of cost and time.

Method used

By taking the natural isotope in the carrier gas as the object of mass spectrometry analysis and using it as a reference for detection, the detection line can be continuously calculated to reduce the impact on sensitivity changes.

Benefits of technology

The rapid detection of quantities in mass spectrometry analysis is achieved, which reduces the impact on device state changes, improves the accuracy and reproducibility of the analysis, and reduces the time and cost of preparing the detection line.

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Abstract

Provided are a quantitative analysis method and a quantitative analysis device with which the amount of detection is quickened and which are less susceptible to the device state (sensitivity variation) in mass spectrometry using a mass spectrometer. A quantitative analysis method for a measurement target using a mass spectrometer, the quantitative analysis method comprising: a gas introduction step in which a gas to be measured and a carrier gas different from the gas to be measured and having two or more natural isotopes are mixed and introduced into the mass spectrometer; a mass spectrometry step for performing mass spectrometry of two or more natural isotopes in the gas to be measured and the carrier gas by means of the mass spectrometer; and a gas concentration calculation step in which the concentration of the gas to be measured is calculated using the analysis values of the two or more natural isotopes in the carrier gas obtained by the mass spectrometry step as a reference.
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