Terahertz optical device

Abstract

The invention discloses a terahertz optical device, and relates to the technical field of optics, the terahertz optical device comprises a light-emitting light source, a dodging structure and a relay lens, the light-emitting light source comprises a focus lens and a light-emitting structure, the light-emitting structure is used for emitting light towards an axis extending in a first direction, the focus lens is arranged on a light path, and the light-emitting structure is used for emitting light towards the axis extending in the first direction. The light uniformizing structure comprises a plurality of light reflecting parts which are arranged at intervals in the direction of the optical axis, each light reflecting part is connected with two adjacent light reflecting parts so as to define a light uniformizing cavity, the light uniformizing cavity is provided with a light inlet and a light outlet which are oppositely arranged in the first direction, the light inlet is arranged corresponding to the focusing mirror, and the light outlet is arranged corresponding to the focusing mirror. And the relay lens is arranged corresponding to the light outlet and is used for correcting the light and projecting the light to an object needing to be illuminated. According to the arrangement, the uniformity of light rays irradiated to an object needing to be illuminated by the light-emitting structure can be ensured, so that the imaging accuracy is ensured.

Description

Technical Field

[0001] The invention relates to the field of optical technology, and in particular to a terahertz optical device. Background Art

[0002] Terahertz imaging technology has the advantages of penetration, non-contact, and non-ionizing radiation. It has broad application prospects in many industrial application scenarios such as foreign matter detection in food and drug packaging, corrosion detection, and internal defect detection of materials. At present, QCL (quantum cascade semiconductor laser) is small in size, high in power, and low in cost. It has a very large cost advantage as a lighting source in the field of terahertz array imaging.

[0003] However, the quality of its directly output laser beam is poor and the energy distribution is uneven. In order to achieve high-quality imaging, the beam needs to be optimized. Summary of the invention

[0004] The main purpose of the present invention is to provide a terahertz optical device, aiming to improve the problems of poor quality and uneven energy distribution of the laser beam output by the existing terahertz imaging structure.

[0005] To achieve the above-mentioned purpose, the terahertz optical device proposed in the present invention comprises:

[0006] A luminous light source, comprising a focusing mirror and a luminous structure, wherein the luminous structure is used to emit light toward an axis extending in a first direction, and the focusing mirror is arranged on the light path and is arranged in the first direction with two of the reflecting mirrors spaced apart to focus the light;

[0007] A light homogenizing structure, comprising a plurality of reflective portions arranged at intervals around an optical axis, each of the reflective portions connecting two adjacent reflective portions to enclose a light homogenizing cavity, the light homogenizing cavity having a light inlet and a light outlet arranged opposite to each other in a first direction, the light inlet being arranged corresponding to the focusing mirror so that the focused light can enter the light homogenizing cavity from the light inlet; and

[0008] The relay mirror is arranged corresponding to the light outlet, and is used for correcting the light and projecting it to the object that needs to be illuminated.

[0009] In one embodiment, the plurality of reflective portions include two first reflective portions, the two first reflective portions are arranged at intervals, and each of the first reflective portions includes:

[0010] A first body having a first end disposed toward another first body;

[0011] a first reflective layer, disposed at the first end, the first reflective layer constituting at least one side wall of the light homogenizing cavity; and

[0012] Two first connecting parts are both arranged on the first main body and are respectively located on two adjacent side surfaces of the first end and are arranged to be spaced apart from the first end. The two first connecting parts are respectively used to connect two adjacent reflective parts.

[0013] In one embodiment, the first body is further provided with a metal auxiliary part, the metal auxiliary part includes a first auxiliary layer, a second auxiliary layer and a third auxiliary layer which are stacked, and the first auxiliary layer is provided on the first body;

[0014] The first connecting portion connects the third auxiliary layer and a corresponding one of the light reflecting portions.

[0015] In one embodiment, a distance between each of the first connecting portions and a periphery of the first end is A, and A≤2 um.

[0016] In one embodiment, the plurality of light reflecting portions include two second light reflecting portions, the two second light reflecting portions are arranged at intervals, and each of the second light reflecting portions includes:

[0017] A second body having a second end disposed toward another second body;

[0018] a second reflective layer, disposed at the second end, the second reflective layer constituting at least one side wall of the light homogenizing cavity; and

[0019] Two second connection parts, both of which are connected to the second body and are respectively located on two opposite sides of the second reflective layer, and the two second connection parts are respectively connected to the two reflective parts.

[0020] In one embodiment, the light emitting structure includes at least two light emitting chips and at least two reflectors, the two light emitting chips are arranged at intervals around an axis extending in the first direction, and are both used to emit light toward the corresponding reflector, and the two reflectors are arranged close to each other to adjust the emission direction of the light to be emitted along the first direction;

[0021] The focusing mirror is arranged in the first direction with an interval between two reflecting mirrors.

[0022] In one embodiment, the diameter of the light homogenizing cavity is gradually reduced in a direction away from the focusing lens.

[0023] In one embodiment, the cavity diameter of the light homogenizing cavity is B, B≤0.2 mm; and / or,

[0024] The size of the light homogenizing cavity in the first direction is C, where C≤50 mm.

[0025] In one embodiment, the plurality of reflective portions include a first reflective portion, the first reflective portion includes a first body, and the material of the first body includes glass and mirror metal; and / or,

[0026] The plurality of reflective parts include a second reflective part, the second reflective part includes a second body, and the material of the second body includes glass and mirror metal.

[0027] In one embodiment, the terahertz optical device further includes a mounting seat and a transition heat sink, wherein the transition heat sink is mounted on the mounting seat and connected to the light source to provide a mounting base for the light source.

[0028] In the technical solution of the present invention, the light emitting structure emits light along the first direction, and the light irradiates the focusing mirror, and the focusing mirror focuses the light so that the light can be irradiated from the light inlet into the light homogenizing cavity, and the light will be irradiated onto the multiple reflective parts to be reflected multiple times, thereby performing light homogenization, so that the energy distribution of the light can be better homogenized and then emitted from the light outlet, and irradiated onto the relay mirror, and irradiated onto the object to be illuminated after correction by the relay mirror, thereby realizing terahertz illumination. Such a setting can make the light irradiated by the light emitting structure onto the object to be illuminated uniform, so as to ensure accurate imaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0030] Figure 1 A schematic structural diagram of an embodiment of a terahertz optical device provided by the present invention;

[0031] Figure 2 A schematic structural diagram of another embodiment of the terahertz optical device provided by the present invention;

[0032] Figure 3 A schematic structural diagram of another embodiment of the terahertz optical device provided by the present invention;

[0033] Figure 4 A schematic structural diagram of another embodiment of the terahertz optical device provided by the present invention;

[0034] Figure 5 for Figure 4 Structural schematic diagram of the light homogenization structure;

[0035] Figure 6 for Figure 5 A schematic structural diagram of the first reflective portion;

[0036] Figure 7 for Figure 5 Schematic diagram of the structure of the second reflecting part.

[0037] Description of Figure Numbers:

[0038] 100. Terahertz optical device; 1. Light emitting source; 11. Focusing mirror; 12. Light emitting structure; 121. Light emitting chip; 122. Reflector; 2. Light homogenization structure; 21. Reflecting part; 211. First reflecting part; 2111. First main body; 2112. First reflecting layer; 2113. Metal auxiliary part; 212. Second reflecting part; 2121. Second main body; 2122. Second reflecting layer; 3. Relay mirror; 4. Mounting seat; 5. Transition heat sink.

[0039] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0041] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0042] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0043] The present invention provides a terahertz optical device, which aims to improve the problems of poor quality and uneven energy distribution of the laser beam output by the existing terahertz imaging structure.

[0044] See also Figure 1-4 In one embodiment of the present invention, the terahertz optical device 100 includes a light source 1, a light homogenizing structure 2 and a relay mirror 3. The light source 1 includes a focusing mirror 11 and a light emitting structure 12. The light emitting structure 12 is used to emit light toward an axis extending in a first direction. The focusing mirror 11 is arranged on the optical path, and two reflecting mirrors 122 are arranged at intervals in the first direction to focus the light. The light homogenizing structure 2 includes a plurality of reflecting portions 21 arranged at intervals around the optical axis direction, each of the reflecting portions 21 connects two adjacent reflecting portions 21 to enclose a light homogenizing cavity. The light homogenizing cavity has a light inlet and a light outlet arranged relatively in the first direction. The light inlet is arranged corresponding to the focusing mirror 11 so that the focused light can enter the light homogenizing cavity from the light inlet. The relay mirror 3 is arranged corresponding to the light outlet to correct the light and project it onto the object to be illuminated.

[0045] In the technical solution of the present invention, the light emitting structure 12 emits light along a first direction, and the light is irradiated into the focusing mirror 11. The focusing mirror 11 focuses the light so that the light can be irradiated from the light inlet into the light homogenizing cavity. The light will be irradiated onto the multiple reflective parts 21 to be reflected multiple times, thereby performing light homogenization, so that the energy distribution of the light can be better homogenized and then emitted from the light outlet, and irradiated onto the relay mirror 3. After correction by the relay mirror 3, it is irradiated onto the object to be illuminated, thereby realizing terahertz illumination. Such a configuration can ensure the uniformity of the light irradiated by the light emitting structure 12 onto the object to be illuminated, so as to ensure accurate imaging.

[0046] It can be understood that, in order to ensure the focusing effect of the focusing mirror 11, the focusing mirror 11 is a convex lens.

[0047] In addition, in the present invention, after the light is emitted from the light outlet, the light is extended in a diffused shape. Therefore, in order to ensure the correct illumination angle of the light, in the present invention, the relay lens 3 is also configured as a convex lens.

[0048] It should be noted that the present invention does not limit the specific structural form of the light-emitting structure 12. In one embodiment of the present invention, the light-emitting structure 12 includes a light-emitting chip 121, and the light-emitting chip 121 is used to emit light along a first direction toward the focusing lens 11. In this way, the light-emitting chip 121 can emit light extending in a diffuse shape toward the focusing lens 11, and then the focusing lens 11 converges the light to the light entrance, so that the homogenizing cavity can homogenize the light.

[0049] In other embodiments of the present invention, the light-emitting structure 12 may also include a plurality of the light-emitting chips 121. For example, in another embodiment of the present invention, the light-emitting structure 12 includes two light-emitting chips 121 and two reflectors 122. The two light-emitting chips 121 are spaced apart around an axis extending in the first direction, and are both used to emit light toward the corresponding reflector 122. The two reflectors 122 are arranged close to each other to adjust the emission direction of the light to be emitted in the first direction, and the focusing mirror 11 is arranged in the first direction at intervals between the two reflectors 122. With such an arrangement, in the two light-emitting chips 121, each of the light-emitting chips 121 can emit light toward the corresponding reflector 122. When the light is irradiated onto the corresponding reflector 122, the reflector 122 can correct the emission direction of the light by reflection, thereby adjusting the light to be emitted along the first direction, and allowing the light emitted by the two light-emitting chips 121 to be irradiated onto the focusing mirror 11, so as to ensure the light collimation ability of the focusing mirror 11. At this time, the light emitted by the two light-emitting chips 121 can be evenly mixed in the uniform light cavity, thereby achieving uniform energy distribution at the light outlet, so that the energy emitted by the two light-emitting chips 121 is superimposed, the illumination area is increased, and the illumination effect can be optimized.

[0050] In another embodiment of the present invention, the light-emitting structure 12 includes three light-emitting chips 121 and three corresponding reflectors 122. The three light-emitting chips 121 are arranged at intervals around an axis extending in the first direction, and are all used to emit light toward the corresponding reflector 122. The three reflectors 122 are arranged close to each other to adjust the light emitted by the corresponding light-emitting chip 121 to be emitted along the first direction. The focusing mirror 11 is arranged at intervals of three reflectors 122 in the first direction. With such an arrangement, the light emitted by the three light-emitting chips 121 can be respectively reflected by the corresponding reflectors 122, so as to be irradiated to the focusing mirror 11 together. The focusing mirror 11 converges the light emitted by the three light-emitting chips 121, so that it enters the light-homogenizing cavity from the light inlet to perform light homogenization, so as to ensure that the energy emitted by the three light-emitting chips 121 can be superimposed to optimize the lighting effect.

[0051] In another embodiment of the present invention, the light emitting structure 12 further includes four light emitting chips 121 and four corresponding reflectors 122. The four light emitting chips 121 are arranged at intervals around an axis extending in the first direction, and are used to emit light toward the corresponding reflectors 122. The four reflectors 122 are arranged close to each other to adjust the light emitted by the corresponding light emitting chip 121 to be emitted along the first direction, and the focusing mirror 11 is arranged in the first direction at intervals of four reflectors 122. In this way, the energy emitted by the four light emitting chips 121 can also be superimposed, thereby optimizing the lighting effect.

[0052] Of course, in other embodiments of the present invention, the number of the light emitting chips 121 may also be set to other numbers. Specifically, in actual setting, it can be selected according to needs, and the present invention does not limit this.

[0053] In addition, the present invention does not limit the specific structure of the reflective portion 21. For example, see Figure 5-7In one embodiment of the present invention, the plurality of reflecting portions 21 include two first reflecting portions 211, the two first reflecting portions 211 are arranged at intervals, each of the first reflecting portions 211 includes a first main body 2111, a first reflecting layer 2112 and two first connecting portions, the first main body 2111 has a first end arranged toward another first main body 2111, the first reflecting layer 2112 is arranged at the first end, the first reflecting layer 2112 constitutes at least one side wall of the light homogenizing cavity, the two first connecting portions are both arranged on the first main body 2111, and are respectively located on two adjacent side surfaces of the first end, and are arranged at intervals from the first end, and the two first connecting portions are respectively used to connect two adjacent reflecting portions 21. In this arrangement, the two first main bodies 2111 respectively provide support for the two first reflecting layers 2112, and the two first reflecting layers 2112 constitute the opposite side walls of the light homogenizing cavity, thereby ensuring the light homogenizing ability of the light homogenizing cavity together with the remaining reflecting parts 21, and the arrangement of the two first connecting parts can ensure the connection stability between each first reflecting part 211 and the two adjacent first reflecting parts 211, thereby ensuring the normal maintenance of the light homogenizing cavity.

[0054] It can be understood that the present invention does not limit the specific material of the first body 2111. In one embodiment of the present invention, the material of the first body 2111 can be set to glass, such as K9 glass; in another embodiment of the present invention, the material of the first body 2111 can also be set to mirror metal, such as oxygen-free copper, aluminum or other highly reflective materials; and in other embodiments of the present invention, the material of the first body 2111 can also be set to other materials, which can be selected according to needs during actual setting.

[0055] Specifically, in an embodiment of the present invention, the first reflective layer 2112 is a metal reflective layer. Such a configuration can ensure the total reflection effect of the first reflective layer 2112, thereby ensuring the light homogenizing ability of the light homogenizing cavity.

[0056] It should be noted that the present invention does not limit the specific structural form of the two first connecting parts. In one embodiment of the present invention, the first connecting part can be set to a threaded connection structure; and in another embodiment of the present invention, the first connecting part can also be set to a welding part, specifically, SnAu solder. In this way, the first main body 2111 and the adjacent reflecting part 21 can be welded into one, thereby ensuring the stability of the uniform light structure 2.

[0057] It is understandable that when the first connecting portion is set to SnAu solder, since it is set apart from the first end, space can be reserved for the melting of the solder, thereby preventing the solder from flowing to the first reflective layer 2112 and affecting the reflective ability of the first reflective layer 2112.

[0058] Furthermore, in order to prevent the solder from affecting the reflective ability of the first reflective layer 2112, while ensuring the connection and sealing ability between the adjacent two side walls of the light homogenizing cavity and preventing light leakage from the light homogenizing cavity, in another embodiment of the present invention, the distance between each of the first connecting portions and the periphery of the first end is A, A≤2um. Such a setting can not only provide a margin space for the flow of solder, but also ensure the connection and sealing ability between the adjacent two side walls of the light homogenizing cavity.

[0059] Of course, the present invention does not limit the specific value of the distance between each first connection portion and the periphery of the first end. It only needs to ensure that the value is within the required range. In actual setting, it can be selected according to needs.

[0060] In order to further improve the stability of the welding connection between the first body 2111 and the adjacent reflective portion 21, in one embodiment of the present invention, the first body 2111 is further provided with a metal auxiliary portion 2113, the metal auxiliary portion 2113 includes a first auxiliary layer, a second auxiliary layer and a third auxiliary layer which are stacked, the first auxiliary layer is provided on the first body 2111, and the first connecting portion connects the third auxiliary layer with a corresponding reflective portion 21. Specifically, in this embodiment, the first auxiliary layer includes a Ti metal layer, the second auxiliary layer includes a Pt metal layer, and the third auxiliary layer includes an Au metal layer, and in this way, the Au metal layer is welded and connected to the SnAu solder, thereby ensuring the stability of the welding connection.

[0061] In addition, in another embodiment of the present invention, the plurality of reflecting portions 21 include two second reflecting portions 212, the two second reflecting portions 212 are arranged at intervals, each second reflecting portion 212 includes a second main body 2121, a second reflecting layer 2122 and two second connecting portions, the second main body 2121 has a second end arranged toward another second main body 2121, the second reflecting layer 2122 is arranged at the second end, the second reflecting layer 2122 constitutes at least one side wall of the homogenizing cavity, the two second connecting portions are both connected to the second main body 2121, and are respectively located on two opposite sides of the second reflecting layer 2122, and the two second connecting portions are respectively connected to the two reflecting portions 21. In this arrangement, the two second main bodies 2121 provide support for the two second reflective layers 2122 respectively, so that the two second reflective layers 2122 constitute the other opposite side walls of the light homogenizing cavity to ensure the light homogenizing ability of the light homogenizing cavity. At the same time, the arrangement of the two second connecting parts can ensure the connection stability between each second reflective part 212 and the two adjacent reflective parts 21, thereby ensuring the stability of the light homogenizing cavity.

[0062] Likewise, the present invention does not limit the specific material of the second body 2121. In one embodiment of the present invention, the material of the second body 2121 can be glass, and in another embodiment of the present invention, the material of the second body 2121 can also be mirror metal. In actual settings, it can be selected according to needs.

[0063] Specifically, in an embodiment of the present invention, the second reflective layer 2122 can be configured as a metal reflective layer. In this configuration, the metal reflective layer can ensure the total reflection effect of the second reflective layer 2122, thereby ensuring the light homogenizing ability of the light homogenizing cavity.

[0064] Of course, the present invention also does not limit the specific structural form of the second connecting part. In one embodiment of the present invention, the second connecting part can be set as a threaded connection structure; in another embodiment of the present invention, the second connecting part can also be set as a welding part. In this way, the second main body 2121 and the adjacent reflecting part 21 can be welded into one, thereby ensuring the stability of the uniform light structure 2.

[0065] Furthermore, the present invention does not limit the type of the welding part. For example, in one embodiment of the present invention, the material of the welding part can be set to SnAu solder. When the second connecting portion is set to SnAu solder, since the two second connecting portions are arranged on opposite sides of the second reflective layer 2122, that is, they are spaced apart from the second reflective layer 2122, the two SnAu solders have sufficient reserved space when the welding is melted, which can prevent the solder from flowing to the second reflective layer 2122 and affecting the reflective ability of the second reflective layer 2122.

[0066] It should also be noted that the present invention does not limit the specific value of the distance between each second connection portion and the second reflective layer 2122, and it can be selected according to actual needs during actual setting.

[0067] In order to further improve the stability of the welding connection between the second body 2121 and the adjacent reflective portion 21, in a further embodiment of the present invention, the second body 2121 is also provided with the metal auxiliary portion 2113, the metal auxiliary portion 2113 includes a first auxiliary layer, a second auxiliary layer and a third auxiliary layer which are stacked, the first auxiliary layer is provided on the second body 2121, and the second connection portion connects the third auxiliary layer with a corresponding reflective portion 21. In this way, the third auxiliary layer is welded to the solder, thereby ensuring the stability of the welding connection.

[0068] It should be noted that, in a specific embodiment of the present invention, four reflective portions 21 are provided, and the four reflective portions 21 include two first reflective portions 211 disposed opposite to each other, and two second reflective portions 212 disposed opposite to each other, and two first reflective layers 2112 and two second reflective layers 2122 enclose four side walls of the light homogenizing cavity. In this case, the first connecting portion and the second connecting portion are integrally formed.

[0069] In addition, the present invention does not limit the specific shape of the light homogenizing cavity. In one embodiment of the present invention, the cavity diameter of the light homogenizing cavity is set to be constant in the direction away from the focusing mirror 11; in another embodiment of the present invention, the cavity diameter of the light homogenizing cavity is set to be gradually contracted in the direction away from the focusing mirror 11; and in another embodiment of the present invention, the cavity diameter of the light homogenizing cavity is set to be gradually expanded in the direction away from the focusing mirror 11. Specifically, the shape of the light homogenizing cavity can be selected according to actual conditions.

[0070] Furthermore, in order to ensure the uniformity of the light homogenization in the light homogenizing cavity, in one embodiment of the present invention, the cavity diameter of the light homogenizing cavity is B, and B≤0.2 mm.

[0071] In another embodiment of the present invention, the dimension of the light homogenizing cavity in the first direction is C, and C≤50 mm.

[0072] Of course, the present invention does not limit the specific values ​​of the cavity diameter of the light homogenizing cavity and its size in the first direction. It only needs to ensure that the cavity diameter of the light homogenizing cavity and the size of the light homogenizing cavity in the first direction are within the required range. In actual setting, they can be selected according to needs.

[0073] In addition, it should be noted that, in one embodiment of the present invention, the terahertz optical device 100 further includes a mounting seat 4 and a transition heat sink 5, wherein the transition heat sink 5 is mounted on the mounting seat 4 and connected to the light source 1 to provide a mounting base for the light source 1. In this arrangement, when the light source 1 emits light, the heat generated by the light source 1 can be transferred from the transition heat sink 5 to the mounting seat 4, thereby cooling the light source 1 and ensuring the normal operation of the light source 1.

[0074] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention and the drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A terahertz optical device, characterized in that: include: A light emitting light source, comprising a focusing mirror and a light emitting structure, wherein the light emitting structure is used to emit light toward an axis extending in a first direction, and the focusing mirror is disposed on the light path and spaced apart from the light emitting structure in the first direction to focus the light; A light homogenizing structure, comprising a plurality of reflective portions arranged at intervals around an optical axis, each of the reflective portions connecting two adjacent reflective portions to enclose a light homogenizing cavity, the light homogenizing cavity having a light inlet and a light outlet arranged opposite to each other in a first direction, the light inlet being arranged corresponding to the focusing mirror so that the focused light can enter the light homogenizing cavity from the light inlet; as well as, The relay mirror is arranged corresponding to the light outlet, and is used to correct the light and project it to the object that needs to be illuminated.

2. The terahertz optical device according to claim 1, characterized in that: The plurality of reflective portions include two first reflective portions, the two first reflective portions are arranged at intervals, and each of the first reflective portions includes: A first body having a first end disposed toward another first body; a first reflective layer, disposed at the first end, the first reflective layer constituting at least one side wall of the light homogenizing cavity; and Two first connecting parts are both arranged on the first main body and are respectively located on two adjacent side surfaces of the first end and are arranged to be spaced apart from the first end. The two first connecting parts are respectively used to connect two adjacent reflective parts.

3. The terahertz optical device according to claim 2, characterized in that: The first body is further provided with a metal auxiliary part, the metal auxiliary part includes a first auxiliary layer, a second auxiliary layer and a third auxiliary layer which are stacked, and the first auxiliary layer is provided on the first body; The first connecting portion connects the third auxiliary layer and a corresponding one of the light reflecting portions.

4. The terahertz optical device according to claim 2, characterized in that: The distance between each of the first connecting portions and the periphery of the first end is A, and A≤2 um.

5. The terahertz optical device according to claim 1, characterized in that: The plurality of reflective portions include two second reflective portions, the two second reflective portions are arranged at intervals, and each of the second reflective portions includes: A second body having a second end disposed toward another second body; a second reflective layer, disposed at the second end, the second reflective layer constituting at least one side wall of the light homogenizing cavity; and Two second connection parts, both of which are connected to the second body and are respectively located on two opposite sides of the second reflective layer, and the two second connection parts are respectively connected to the two reflective parts.

6. The terahertz optical device according to claim 1, characterized in that: The light-emitting structure comprises at least two light-emitting chips and at least two reflectors, the two light-emitting chips are arranged at intervals around an axis extending in the first direction, and are used to emit light toward the corresponding reflectors, and the two reflectors are arranged close to each other to adjust the emission direction of the light to be emitted along the first direction; The focusing mirror is arranged in the first direction with an interval between two reflecting mirrors.

7. The terahertz optical device according to claim 1, characterized in that: The diameter of the light homogenizing cavity is gradually contracted or expanded in a direction away from the focusing mirror.

8. The terahertz optical device according to claim 1, characterized in that: The cavity diameter of the light homogenizing cavity is B, B≤0.2mm; and / or, The size of the light homogenizing cavity in the first direction is C, where C≤50 mm.

9. The terahertz optical device according to claim 1, characterized in that: The plurality of reflective parts include a first reflective part, the first reflective part includes a first body, and the material of the first body includes glass and mirror metal; and / or, The plurality of reflective parts include a second reflective part, the second reflective part includes a second body, and the material of the second body includes glass and mirror metal.

10. The terahertz optical device according to claim 1, characterized in that: The terahertz optical device further includes a mounting seat and a transition heat sink. The transition heat sink is mounted on the mounting seat and connected to the light source to provide a mounting base for the light source.

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